Morning Litho status reports 8/5

Gary Sosa gsosa at stanford.edu
Fri Aug 5 07:26:02 PDT 2011


Good morning All-

     Here is the morning Litho status report

SVG Coat 1- Shutdown. User reports accidentally dropping quartz pieces 
into process bowl. Will retrieve the users
                        substrates and verify track operation

Note 1: There will be an ASML Stepper maintenance training class from 
7/25 through 8/12. During certain parts
            of the day the stepper will be unavailable as the trainers 
will be using the tool for the "hands-on" portion
            of the training class. There will be a large group gathered 
around the stepper during this time and the area
            around the stepper will be blocked off to normal traffic. 
Please observe the barricades during this  time
            period. We apologize for the inconvenience and thank you for 
your patience and understanding.



      Please check back in Coral for the latest tool updates and current 
equipment status.

              Thanks... The Litho Team

*/Photolithography Area Status/*

	
	

*/Friday, August 05, 2011/*


	
	
	
	

*/General Information / Lab Activities/*

	

	

	

ASML 3 week training class in progress

	
	
	

Mario- Out today

	
	
	
	

	
	
	
	

	

	

	

	

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Intermittent carrier inspection

	

3

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Down*

	

Wafer pieces lost in coater bowl

	

1

3617 Process

	

*Up*

	

	

220-7 Process

	

*Up*

	

	

SVGCoat2

	

3612 Process

	

*Problem*

	

bubbles in dispense line

	

2

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*UP*

	

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/Microscpoes-/*

	

	

	

#1 Leica/

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

New graphite on order ETA 8/9

	

4

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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