Morning Litho status report 8/26

Gary Sosa gsosa at stanford.edu
Fri Aug 26 07:39:14 PDT 2011


Good morning All....

     Here is the morning Litho status report

         Please check back in Coral for latest tool updates and current 
equipment status.

                    Thanks...   The Litho Team


*/Photolithography Quick Snapshot/*

	
	

*/Friday, August 26, 2011/*

*/_Reported Problems_/*

	

	

	

	

EVAlign: Down- User reports that system will not initialize and WEC not 
moving properly

SVG Coat 2- Problem: User reports that receive indexer not working 
correctly.

*/_Problem Updates ( > 24 Hrs )_/*

	
	
	

EVG Bonder: Down.The turbo pump is bad. Turbo pump has been shipped out 
yesterday. Estimated

delivery to vendor-8/26. Estimated time to repair: 3 - 5 days

*/Photolithography Area Status/*

	
	

*/Friday, August 26, 2011/*

*/General Information / Lab Activities/*

	

	

	

	
	
	
	

	
	
	
	

	
	
	
	

	

	

	

	

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Intermittent carrier inspection

	

4

EVAlign

	

*DOWN*

	

Won't Initialize

	

1

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Up*

	

	

SVGCoat2

	

3612 Process

	

*Problem*

	

Receiver problem

	

2

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*UP*

	

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/Microscpoes-/*

	

	

	

#1 Leica/

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*DOWN*

	

Dead turbo pump

	

3

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	



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