Litho MOrning Daily Report 12/09/2011

Eddy M Vilanova vilanova at stanford.edu
Fri Dec 9 08:45:22 PST 2011


Good morning All...

   Here is the morning Litho status report

     Please check back in Coral for the latest tool updates and current status.

                 Thanks...  The Litho Team

















Photolithography Quick Snapshot
	
	

Friday , December 09, 2011

Reported Problems
	
Karlsuss # 2 Intermittent Sensor Error ,Also  10 Um Misalignment.
 
	

 
	

 
	

 

 

 

 

 

 

Problem Updates ( > 24 Hrs )
	
	
	

 

 

 

 

 

 

Photolithography Area Status
	
	
Friday , December 09,  2011

General Information / Lab Activities
	

 
	

 
	

 

 Gary Sosa Will Be in late Today 
	
	
	
	

 

	
	
	
	

 

 
	
	
	
	

 

 
	

 
	

 
	

 
	

 

Exposure Tools
	

Status
	

Comments
	

Priority

ASML Stepper
	

PROBLEM
	

Intermittant carrier inspection
	

1

EVAlign
	

UP
	

 
	

 

EVAlign2
	

UP
	

 
	

 

EVG-Imprint
	

UP
	

 
	

 

Karl Suss 1
	

UP
	

 
	

 

Karl Suss 2
	

PROBLEM
	

Intermitent Sensor Problem,Also  10um Misalignment . 
	

2 

Manual Coaters
	

Status
	

 
	

 

EVGSpraycoat
	

UP
	

 
	

 

Headway
	

UP
	

 
	

 

Laurel
	

UP
	

 
	

 

Coaters
	

Process Status
	

 
	

 

SVGCoat
	

3612 Process
	

Up
	

 
	

 

3617 Process
	

Up
	

 
	

 

220-7 Process
	

Up
	

 
	

 

SVGCoat2
	

3612 Process
	

Up
	

 
	

 

955-0.7 Process
	

Up
	

 
	

 

220-3 Process
	

Up
	

 
	

 

Developers
	

Status
	

 
	

 

SVGDEV
	

UP
	

 
	

 

SVGDEV2
	

UP
	

 
	

 

Ovens / Hotplates
	

Status
	

 
	

 

BLUEM
	

UP
	

 
	

 

Blue M 90 C.
	

UP
	

 
	

 

Blue M 110 C
	

UP
	

 
	

 

Blue M 150 C
	

UP
	

 
	

 

Fusion
	

UP
	

 
	

 

UV-Cure
	

UP
	

 
	

 

White-Oven
	

UP
	

 
	

 

YES Vapor Prime
	

UP
	

 
	

 

 Hotplates-
	

 
	

 
	

 

   Laurel-left
	

UP
	

 
	

 

   Laurel- right
	

UP
	



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