Morning Litho status report 12/12

Gary J Sosa gsosa at stanford.edu
Mon Dec 12 08:05:42 PST 2011


Good morning All.. 

Here is the morning Litho status report. The report also indicates tools that are shutting down today. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks.. The Litho Team 


	
Photolithography Quick Snapshot 	
	
Monday, December 12, 2011 
	
Reported Problems 	
	
	
	

	
SVG Dev 2-Problem: Indexing issues. Either an elevator motor or wire harness, but needs further 
	
troubleshooting 
	
Karl Suss 2- Problem: Misaligning pieces. Need to investigate and troubleshoot 
	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	

	

	

	

	

	
Photolithography Area Status 	
	
Monday, December 12, 2011 
	
General Information / Lab Activities 	
	
	

	
Mahnaz- Out today(12/12) 	
	
	
	

	
Lab equipment shutdowns begin today to prepare for renovation. See below for tools shutting 	

	
down today(12/12) 	
	
	
	

	
EVG Bonder- Changing pressure plate from Quartz to Steel today 	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Customer demo and shutdown(12/12) 	
1 
	
EVAlign 	
UP 	
	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
UP 	
Shutdown today(12/12) 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Misaligning pieces 	
2 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
Shutdown today(12/12) 	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
Shutdown today(12/12) 	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
PROBLEM 	
Receive indexer problem 	
3 
	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
Shutdown today(12/12) 	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Torrey Pines- left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
Shutdown today(12/12) 	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
Shutdown today(12/12) 	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
Shutdown today(12/12) 	

	
Woolam 	
UP 	
Shutdown today(12/12) 	

	
Zygo 	
UP 	
Shutdown today(12/12) 	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
Shutdown today(12/12) 	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
Shutdown today(12/12) 	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
Shutdown today(12/12) 	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
UP 	
	

	
KSBonder 	
UP 	
Shutdown today(12/12) 	

	
KSCoat 	
PROBLEM 	
Shutdown today(12/12) 	
2 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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