Morning Litho status report 12/13

Gary J Sosa gsosa at stanford.edu
Tue Dec 13 07:49:36 PST 2011


Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks.. The Litho Team 


	
Photolithography Quick Snapshot 	
	
Tuesday, December 13, 2011 
	
Reported Problems 	
	
	
	

	

	

	

	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
Karl Suss 2- Problem: Misaligning pieces. Need to investigate and troubleshoot 
	

	

	

	

	
Photolithography Area Status 	
	
Tuesday, December 13, 2011 
	
General Information / Lab Activities 	
	
	

	
Mario- Out today(12/13) 	
	
	
	

	
Lab equipment shutdowns continues today to prepare for renovation. See below for tools shutting 	

	
down today(12/13) 	
	
	
	

	
	
	
	
	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
DOWN 	
Customer demo and shutdown(12/12) 	
1 
	
EVAlign 	
UP 	
	

	
EVAlign2 	
DOWN 	
Shutdown for Renovation 	

	
EVG-Imprint 	
DOWN 	
Shutdown for Renovation 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Misaligning pieces 	
2 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
Shutdown today(12/13) 	

	
Headway 	
UP 	
	

	
Laurel 	
DOWN 	
Shutdown for Renovation 	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
Shutdown today(12/13) 	

	
3617 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
Shutdown today(12/13) 	

	
955-0.7 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
Shutdown today(12/13) 	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Torrey Pines- left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
Shutdown today(12/13) 	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
DOWN 	
Shutdown for Renovation 	

	
Nanospec 2-Litho 	
UP 	
Shutdown today(12/13) 	

	
Prometrix 	
DOWN 	
Shutdown for Renovation 	

	
P2 Profiler 	
UP 	
Shutdown today(12/13) 	

	
Rudolph Ellipsometer 	
UP 	
Shutdown today(12/13) 	

	
Surfscan 4500 	
DOWN 	
Shutdown for Renovation 	

	
Woolam 	
UP 	
Shutdown today(12/13) 	

	
Zygo 	
DOWN 	
Shutdown for Renovation 	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
DOWN 	
Shutdown for Renovation 	

	
#2 Ergolux/Drytek2 	
UP 	
Shutdown today(12/13) 	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
Shutdown today(12/13) 	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
DOWN 	
Shutdown for Renovation 	

	
#7 Leitz/Diffusion 	
UP 	
Shutdown today(12/13) 	

	
#8 Olympus/Litho 	
DOWN 	
Shutdown for Renovation 	

	
#9Olympus/Litho 	
DOWN 	
Shutdown for Renovation 	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
UP 	
	

	
KSBonder 	
DOWN 	
Shutdown for Renovation 	

	
KSCoat 	
PROBLEM 	
Shutdown today(12/13) 	
2 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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