From vilanova at stanford.edu  Tue Feb  1 08:59:45 2011
From: vilanova at stanford.edu (Eddy M Vilanova)
Date: Tue, 1 Feb 2011 08:59:45 -0800 (PST)
Subject: Fwd: Litho Daily Status Report 2/1/2011
In-Reply-To: <177557475.910955.1296579530016.JavaMail.root@zm05.stanford.edu>
Message-ID: <1083178694.911061.1296579585075.JavaMail.root@zm05.stanford.edu>



----- Forwarded Message -----
From: "Eddy M Vilanova" <vilanova at stanford.edu>
To: litho at stanford.edu
Cc: "vilanova" <vilanova at snf.stanford.edu>
Sent: Tuesday, February 1, 2011 8:58:50 AM
Subject: Litho Daily Status Report 2/1/2011

Photolithography Area Status
  
 Tuesday , February 01, 2011
 
 
  
  
  
  
 
General Information / Lab Activities
  
  
  
 
Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due to transfer fan problem.
 
 
 
 
 
 
 
Exposure Tools
 Status
 Comments
 Priority
 
ASML Stepper - Converting to 6" until tomorrow 2/2/2011
 UP
  
   
 
EVAlign
 UP
  
   
 
EVAlign2
 UP
  
   
 
EVG-Imprint
 UP
  
   
 
Karl Suss 1
 UP
  
   
 
Karl Suss 2
 UP
  
   
 
Manual Coaters
 Status
  
   
 
EVGSpraycoat
 UP
  
   
 
Headway
 UP
  
   
 
Laurel
 UP
  
   
 
Coaters
 Process Status
  
   
 
SVGCoat
 3612 Process
 Up
  
   
 
220-3 Process
 Up
  
   
 
220-7 Process
 Problem
 Optimizing Process
 1
 
SVGCoat2
 3612 Process
 Up
  
   
 
955-0.7 Process
 Up
  
   
 
3617 Process
 Up
  
   
 
Developers
 Status
  
   
 
SVGDEV
 UP
  
   
 
SVGDEV2
 UP
  
   
 
Ovens / Hotplates
 Status
  
  
 
BLUEM
 UP
  
   
 
Blue M 90 C.
 UP
  
   
 
Blue M 110 C
 UP
  
   
 
Blue M 150 C
 UP
  
   
 
Fusion
 DOWN
 Hotplate experiments
  
 
UV-Cure
 UP
  
  
 
White-Oven
 UP
  
   
 
YES Vapor Prime
 UP
  
   
 
 Hotplates- 
  
  
  
 
   Laurel-left
 UP
  
  
 
   Laurel- right
 UP
  
  
 
   Headway
 UP
  
  
 
   Torrey Pines- left
 UP
  
  
 
   90 Deg C
 UP
  
  
 
   115 Deg C
 UP
  
  
 
   Torrey Pines- Right
 UP
  
  
 
Metrology/Inspection
 Status
  
  
 
Alpha-Step 500
 UP
  
  
 
Nanospec 2-Litho
 UP
  
  
 
Nanospec 1-Etch
 UP
  
  
 
P2 Profiler
 PROBLEM
 -11 stage error
 4
 
 Microscpoes-
  
  
  
 
   #1 Leica/Analytical
 UP
  
  
 
   #2 Ergolux/Drytek2
 UP
  
  
 
   #3 Olympus/Litho
 UP
  
   
 
   #4 Nikon Optiphot/Litho
 UP
  
  
 
   #5 Nikon/Litho
 UP
  
  
 
   #6 Leitz/Bosch
 UP
  
  
 
   #7 Leitz/Diffusion
 UP
  
  
 
   #8 Olympus/Litho
 UP
  
  
 
   #9 Olympus/Litho
 UP
  
  
 
Miscellaneous
 Status
  
   
 
EVBond
 PROBLEM
 Left flag did not pull
 3
 
KSBonder
 PROBLEM
 Leaking nitrogen hose
 5
 
KSCoat
 UP
  
   
 
Litho SRD
 UP
  
   
 
Mask Cleaner
 DOWN
 Water leak, Waiting for parts
 2
 
 
  
  
 


From vilanova at stanford.edu  Wed Feb  2 07:08:31 2011
From: vilanova at stanford.edu (Mario Vilanova)
Date: Wed, 02 Feb 2011 07:08:31 -0800
Subject: Litho Morning Report 2/2/2011
Message-ID: <4D49736F.1060607@stanford.edu>


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From vilanova at stanford.edu  Thu Feb  3 07:22:33 2011
From: vilanova at stanford.edu (Mario Vilanova)
Date: Thu, 03 Feb 2011 07:22:33 -0800
Subject: Litho Daily Status Report
Message-ID: <4D4AC839.7080508@stanford.edu>


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From gsosa at stanford.edu  Fri Feb  4 07:39:05 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Fri, 04 Feb 2011 07:39:05 -0800
Subject: Morning Litho status report 2/4
Message-ID: <4D4C1D99.9040604@stanford.edu>

Good morning All.....

   Here is the morning Litho status report.

    No airflow in aisle L102(SVG coat/develop aisle) due to transfer fan 
problem. Due to this failure, there will
be a loss of temperature, humidity and particulate control. Repairs are 
in progress. Please consider this
as it relates to the sensitivity of your process. Parts are on order to 
repair the problem

ASML Stepper- System needs 3D Align setup. Also user reports that 
"Dialog Screen" was closed out.
                              Will investigate on morning rounds.

EVG Spray Coater- FSE identified a bad component in the power 
distribution box. Parts are on order
                                    to replace the failed component.

Mask Cleaner- Need to check on status of replacement part.

     Please check back in Coral for latest tool updates and current 
equipment status.

         Thanks.....  The Litho Team


*/Photolithography Area Status/*

	

	

*/Friday, February 04, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due 
to transfer fan problem.

Mahnaz- Out today

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Needs 3D align setup

	

4

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*DOWN*

	

Problem with power distribution

	

1

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

7

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Left flag did not pull

	

5

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

6

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*DOWN*

	

Water leak, Waiting for parts

	

2

	

	

	




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From gsosa at stanford.edu  Mon Feb  7 07:22:06 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 07 Feb 2011 07:22:06 -0800
Subject: Morning Litho status report 2/7
Message-ID: <4D500E1E.1060801@stanford.edu>

Good morning All......

    Here is the morning Litho status report.

      Mahnaz is out today

SVG Coat 1- User reports rails sticking on VP module. Will investigate 
on morning rounds

SVG Coat 2- User reports sticking lifters on VP module. Will investigate 
on morning rounds

EVG  Spraycoater- Down for parts. Dead component in power distribution 
box. Parts on order

Mask Cleaner- High pressure hose on order. Expect parts today.

EV Bonder- User requests Quartz plate installation. Will swap in Quarts 
plate this morning


     Please check back in Coral for latest tool updates and current 
equipment status.


        Thanks ....  The Litho Team


*/Photolithography Area Status/*

	

	

*/Monday, February 07, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due 
to transfer fan problem.

Mahnaz- Out today

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*DOWN*

	

Problem with power distribution

	

4

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Problem*

	

Wafer transfer issue

	

1

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Problem*

	

Wafer transfer issue

	

2

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

7

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Left flag did not pull

	

6

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

8

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*DOWN*

	

Water leak, Waiting for parts

	

5

	

	

	




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From gsosa at stanford.edu  Tue Feb  8 07:40:12 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Tue, 08 Feb 2011 07:40:12 -0800
Subject: Morning Litho status report 2/8
Message-ID: <4D5163DC.9030408@stanford.edu>

Good morning All......

    Here is the morning Litho status report.

EVG Spraycoater- Parts are on order to repair the power distribution box.

Mask Cleaner- The new high pressure hose will be here today. Will 
install and test

    Please check back in Coral for the latest tool updates and current 
equipment status.


             Thanks....  The Litho Team


*/Photolithography Area Status/*

	

	

*/Tuesday, February 08, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due 
to transfer fan problem.

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*DOWN*

	

Problem with power distribution

	

1

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

5

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Left flag did not pull

	

4

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

6

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*DOWN*

	

Water leak, Waiting for parts

	

2

	

	

	


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From gsosa at stanford.edu  Wed Feb  9 07:43:17 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Wed, 09 Feb 2011 07:43:17 -0800
Subject: Morning Litho status report 2/9
Message-ID: <4D52B615.8050506@stanford.edu>

Good morning All

       Here is the morning Litho status report.

EVG Spraycoater- Still having issues with power distribution. System 
needs further troubleshooting by vendor
                                  to identify and repair the problem.

Mask Cleaner- The mask cleaner is back up. Replaced the high pressure 
hose. Tested system-OK Checked for leaks-OK

    Please check back in Coral for latest tool updates and current 
equipment status.


        Thanks.... The Litho Team


*/Photolithography Area Status/*

	

	

*/Wednesday, February 09, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due 
to transfer fan problem.

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*DOWN*

	

Problem with power distribution

	

1

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Left flag did not pull

	

3

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

Hose replaced, tested OK

	

	

	

	


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From gsosa at stanford.edu  Thu Feb 10 07:22:10 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Thu, 10 Feb 2011 07:22:10 -0800
Subject: Morning Litho status report
Message-ID: <4D5402A2.6030203@stanford.edu>

Good morning All....

     Here is the morning Litho status report

Karl Suss Aligner #2- Mask top plate for mounting mask holder not sensed 
by system. Need to troubleshoot.

   Please check back in Coral for latest tool updates and current 
equipment status.

     Thanks... The Litho Team


*/Photolithography Area Status/*

	

	

*/Thursday, February 10, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mario- Out today

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*DOWN*

	

Mask plate problem

	

1

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Left flag did not pull

	

3

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

Hose replaced, tested OK

	

	

	

	


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From gsosa at stanford.edu  Fri Feb 11 07:35:46 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Fri, 11 Feb 2011 07:35:46 -0800
Subject: Morning Litho status report 2/11
Message-ID: <4D555752.10200@stanford.edu>

Good morning All....

    Here is the morning Litho status report

SVG Dev2- Indexer making noise . Will check on morning rounds

EVG Bonder- User reports that top heater not working. Possible lamp 
problem. Will check on morning rounds

       Please check back in Coral for latest tool updates and current 
equipment status.

                Thanks.... The Litho Team

*/Photolithography Area Status/*

	

	

*/Friday, February 11, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mahnaz in Late today( 10:00AM)

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*PROBLEM*

	

Elevator making noise

	

2

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*DOWN*

	

Heater lamp problem

	

1

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Mon Feb 14 07:42:54 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 14 Feb 2011 07:42:54 -0800
Subject: Morning Litho status report 2/14
Message-ID: <4D594D7E.2030703@stanford.edu>

Good morning All....

    Here is the morning Litho status report

Please check back in Coral for latest tool updates and current equipment 
status.

      Thanks... The Litho Team



*/Photolithography Area Status/*

	

	

*/Monday, February 14, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

1

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

3

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Heater lamps replaced

	

2

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

4

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	



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From gsosa at stanford.edu  Tue Feb 15 07:23:57 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Tue, 15 Feb 2011 07:23:57 -0800
Subject: Morning Litho status report 2/15
Message-ID: <4D5A9A8D.9090001@stanford.edu>

Good morning All....

     Here is the morning Litho status report.

EVG Align- User reports that screen is frozen and computer unresponsive. 
Will investigate on morning rounds.


     Please check back in Coral for latest tool updates and current 
equipment status.

              Thanks...  The Litho Team



*/Photolithography Area Status/*

	

	

*/Tuesday, February 15, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*PROBLEM*

	

Computer screen frozen

	

1

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Flag puller issue

	

3

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Wed Feb 16 07:41:34 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Wed, 16 Feb 2011 07:41:34 -0800
Subject: Morning Litho status report 2/16
Message-ID: <4D5BF02E.8010102@stanford.edu>

Good morning All....

    Here is the morning Litho status report

EV Align- Exposure Lamp exploded yesterday(2/15). Lamphouse cleanup 
performed by Stanford EH&S.
                   System re-assembled and under evaluation. Will 
replace reflector and install new lamp today.
                    Will test and evaluate for intensity/uniformity 
issues. Will take further action if needed.

   Please check back in Coral for latest tool updates and equipment status.


      Thanks.... The Litho Team

*/Photolithography Area Status/*

	

	

*/Wednesday, February 16, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*DOWN*

	

UV lamp explosion

	

1

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Flag puller issue

	

3

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Thu Feb 17 07:45:45 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Thu, 17 Feb 2011 07:45:45 -0800
Subject: Morning Litho status report 2/17
Message-ID: <4D5D42A9.2030209@stanford.edu>

Good morning All...

   Here is the morning Litho status report.

ASML Stepper- Down. Problems encountered with HP stage laser during 
customer demo. ASML F/S to
                              replace the laser today and do required 
setups and testing.

EVG Aligner- Down. Low intensity with the current optics. Will do 
further testing. Also acquiring information
                          from EVG for replacement parts.

Laurell Spinner- User reports poor spin with 3612 resist. Will check out 
on morning rounds

      Please check back in Coral for latest tool updates and current 
equipment status.

           Thanks...... The Litho Team

*/Photolithography Area Status/*

	

	

*/Thursday, February 17, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*DOWN*

	

Stage laser problem

	

1

EVAlign

	

*DOWN*

	

UV lamp explosion

	

2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*PROBLEM*

	

Poor Spin

	

3

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

4

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

5

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Flag puller issue

	

6

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

7

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Fri Feb 18 07:11:29 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Fri, 18 Feb 2011 07:11:29 -0800
Subject: Morning Litho status report 2/18
Message-ID: <4D5E8C21.2020105@stanford.edu>

Good morning All.

      Here is the morning Litho status report.

ASML Stepper- System froze up with work in progress. Will investigate 
and retrieve stranded wafers.

EVG Align- Will re-check intensity today. Tool release today with 
increased exposures to compensate
                      for low lamp intensity. Quotes for replacement 
parts received and being reviewed

EVG Bonder-  The pressure plate will be changed to steel this afternoon.

    Please check back in Coral for latest tool updates and current 
equipment status.

      Thanks...  The Litho Team


*/Photolithography Area Status/*

	

	

*/Friday, February 18, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

EV Bonder- Changing pressure plate to Steel this afternoon

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*DOWN*

	

System froze up

	

1

EVAlign

	

*DOWN*

	

System testing

	

2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Flag puller issue

	

5

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

6

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From vilanova at stanford.edu  Wed Feb 23 07:51:44 2011
From: vilanova at stanford.edu (Mario Vilanova)
Date: Wed, 23 Feb 2011 07:51:44 -0800
Subject: Litho Morning Status Report 2/23/2011
Message-ID: <4D652D10.3050702@stanford.edu>


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From gsosa at stanford.edu  Thu Feb 24 07:31:14 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Thu, 24 Feb 2011 07:31:14 -0800
Subject: Morning litho status report 2/24
Message-ID: <4D6679C2.1050909@stanford.edu>

Good morning All...

    Here is the morning litho status report-

EV Bonder- The top heater lamps are not working. Troubleshooting system 
in progress

EV Align- Non-criticals only. New optics for lamp house received. Will 
schedule a time to install/test.


    Please check back in Coral for latest tool updates and current 
equipment status.


          Thanks...  The Litho Team



*/Photolithography Area Status/*

	

	

*/Thursday, February 24, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mahnaz- Out today 2/24

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*PROBLEM*

	

Non-Critical work only

	

2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*DOWN*

	

Top heater not working

	

1

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

5

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Fri Feb 25 07:31:12 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Fri, 25 Feb 2011 07:31:12 -0800
Subject: Morning Litho status report 2/25
Message-ID: <4D67CB40.1020809@stanford.edu>

Good morning All.....

    Here is the morning Litho status report.

EV Aligner- The lamp house optics are being replaced and 
intensity/uniformity tested

EV Bonder- Repairs and testing of heater lamps to be completed 
today(2/25). The bonder will be configured for "Steel"
                       pressure plate as per the published schedule 
posted at the machine.

Dump Rinser- User reports problem with D/R in "wbmiscres". Will test out 
this morning

Microscope 2- Across from Drytek. User reports a problem. Will check out 
microscope this morning.

     Please check back in Coral for latest tool updates and current 
equipment status.

       Thanks...  The Litho Team


*/Photolithography Area Status/*

	

	

*/Friday, February 25, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mahnaz- Out today 2/25

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*DOWN*

	

Replacing optics

	

2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

4

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

5

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*PROBLEM*

	

Not working correctly

	

3

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*DOWN*

	

Top heater not working

	

1

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

6

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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From gsosa at stanford.edu  Mon Feb 28 07:30:45 2011
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 28 Feb 2011 07:30:45 -0800
Subject: Morning Litho status report 2/28
Message-ID: <4D6BBFA5.6090304@stanford.edu>

Good morning All....

     Here is the morning Litho status report.

SVG Coat !- User reports that HPO transfer belts not turning. Will 
investigate on morning rounds

Karl Suss 1- User reports that system is not working. Will check out on 
morning rounds

Karl Suss 2- User reports that X/Y stage not moving well. Will check out 
on morning rounds

Microscope #2- Turret not turning with buttons. Will report to our 
microscope service people. Turret
                              can be rotated manually.

EV Bonder- Converting pressure plate from Steel to Quartz this morning.


     Please check back in Coral for latest tool updates and current 
equipment status.

        Thanks....  The Litho Team


*/Photolithography Area Status/*

	

	

*/Monday, February 28, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

EV Bonder converting to Quartz pressure plate this morning

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*PROBLEM*

	

Non-criticals only

	

4

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*PROBLEM*

	

System not responding

	

2

Karl Suss 2

	

*DOWN*

	

X/Y stage movement

	

1

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Problem*

	

Hot plate transport problem

	

3

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing Process

	

5

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

6

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*PROBLEM*

	

Turret not rotating

	

7

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

	

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

8

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	



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