Fwd: Litho Daily Status Report 2/1/2011

Tue Feb 1 08:59:45 PST 2011

----- Forwarded Message -----
From: "Eddy M Vilanova" <vilanova at stanford.edu>
To: litho at stanford.edu
Cc: "vilanova" <vilanova at snf.stanford.edu>
Sent: Tuesday, February 1, 2011 8:58:50 AM
Subject: Litho Daily Status Report 2/1/2011

Photolithography Area Status

 Tuesday , February 01, 2011

General Information / Lab Activities

Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due to transfer fan problem.

Exposure Tools
 Status
 Comments
 Priority

ASML Stepper - Converting to 6" until tomorrow 2/2/2011
 UP

EVAlign
 UP

EVAlign2
 UP

EVG-Imprint
 UP

Karl Suss 1
 UP

Karl Suss 2
 UP

Manual Coaters
 Status

EVGSpraycoat
 UP

Headway
 UP

Laurel
 UP

Coaters
 Process Status

SVGCoat
 3612 Process
 Up

220-3 Process
 Up

220-7 Process
 Problem
 Optimizing Process
 1

SVGCoat2
 3612 Process
 Up

955-0.7 Process
 Up

3617 Process
 Up

Developers
 Status

SVGDEV
 UP

SVGDEV2
 UP

Ovens / Hotplates
 Status

BLUEM
 UP

Blue M 90 C.
 UP

Blue M 110 C
 UP

Blue M 150 C
 UP

Fusion
 DOWN
 Hotplate experiments

UV-Cure
 UP

White-Oven
 UP

YES Vapor Prime
 UP

 Hotplates- 

   Laurel-left
 UP

   Laurel- right
 UP

   Headway
 UP

   Torrey Pines- left
 UP

   90 Deg C
 UP

   115 Deg C
 UP

   Torrey Pines- Right
 UP

Metrology/Inspection
 Status

Alpha-Step 500
 UP

Nanospec 2-Litho
 UP

Nanospec 1-Etch
 UP

P2 Profiler
 PROBLEM
 -11 stage error
 4

 Microscpoes-

   #1 Leica/Analytical
 UP

   #2 Ergolux/Drytek2
 UP

   #3 Olympus/Litho
 UP

   #4 Nikon Optiphot/Litho
 UP

   #5 Nikon/Litho
 UP

   #6 Leitz/Bosch
 UP

   #7 Leitz/Diffusion
 UP

   #8 Olympus/Litho
 UP

   #9 Olympus/Litho
 UP

Miscellaneous
 Status

EVBond
 PROBLEM
 Left flag did not pull
 3

KSBonder
 PROBLEM
 Leaking nitrogen hose
 5

KSCoat
 UP

Litho SRD
 UP

Mask Cleaner
 DOWN
 Water leak, Waiting for parts
 2