Fwd: Litho Daily Status Report 2/1/2011

Eddy M Vilanova vilanova at stanford.edu
Tue Feb 1 08:59:45 PST 2011



----- Forwarded Message -----
From: "Eddy M Vilanova" <vilanova at stanford.edu>
To: litho at stanford.edu
Cc: "vilanova" <vilanova at snf.stanford.edu>
Sent: Tuesday, February 1, 2011 8:58:50 AM
Subject: Litho Daily Status Report 2/1/2011

Photolithography Area Status
  
 Tuesday , February 01, 2011
 
 
  
  
  
  
 
General Information / Lab Activities
  
  
  
 
Temp/Humidity/Airflow problem in aisle L-102(SVG Coat/Develop aisle) due to transfer fan problem.
 
 
 
 
 
 
 
Exposure Tools
 Status
 Comments
 Priority
 
ASML Stepper - Converting to 6" until tomorrow 2/2/2011
 UP
  
   
 
EVAlign
 UP
  
   
 
EVAlign2
 UP
  
   
 
EVG-Imprint
 UP
  
   
 
Karl Suss 1
 UP
  
   
 
Karl Suss 2
 UP
  
   
 
Manual Coaters
 Status
  
   
 
EVGSpraycoat
 UP
  
   
 
Headway
 UP
  
   
 
Laurel
 UP
  
   
 
Coaters
 Process Status
  
   
 
SVGCoat
 3612 Process
 Up
  
   
 
220-3 Process
 Up
  
   
 
220-7 Process
 Problem
 Optimizing Process
 1
 
SVGCoat2
 3612 Process
 Up
  
   
 
955-0.7 Process
 Up
  
   
 
3617 Process
 Up
  
   
 
Developers
 Status
  
   
 
SVGDEV
 UP
  
   
 
SVGDEV2
 UP
  
   
 
Ovens / Hotplates
 Status
  
  
 
BLUEM
 UP
  
   
 
Blue M 90 C.
 UP
  
   
 
Blue M 110 C
 UP
  
   
 
Blue M 150 C
 UP
  
   
 
Fusion
 DOWN
 Hotplate experiments
  
 
UV-Cure
 UP
  
  
 
White-Oven
 UP
  
   
 
YES Vapor Prime
 UP
  
   
 
 Hotplates- 
  
  
  
 
   Laurel-left
 UP
  
  
 
   Laurel- right
 UP
  
  
 
   Headway
 UP
  
  
 
   Torrey Pines- left
 UP
  
  
 
   90 Deg C
 UP
  
  
 
   115 Deg C
 UP
  
  
 
   Torrey Pines- Right
 UP
  
  
 
Metrology/Inspection
 Status
  
  
 
Alpha-Step 500
 UP
  
  
 
Nanospec 2-Litho
 UP
  
  
 
Nanospec 1-Etch
 UP
  
  
 
P2 Profiler
 PROBLEM
 -11 stage error
 4
 
 Microscpoes-
  
  
  
 
   #1 Leica/Analytical
 UP
  
  
 
   #2 Ergolux/Drytek2
 UP
  
  
 
   #3 Olympus/Litho
 UP
  
   
 
   #4 Nikon Optiphot/Litho
 UP
  
  
 
   #5 Nikon/Litho
 UP
  
  
 
   #6 Leitz/Bosch
 UP
  
  
 
   #7 Leitz/Diffusion
 UP
  
  
 
   #8 Olympus/Litho
 UP
  
  
 
   #9 Olympus/Litho
 UP
  
  
 
Miscellaneous
 Status
  
   
 
EVBond
 PROBLEM
 Left flag did not pull
 3
 
KSBonder
 PROBLEM
 Leaking nitrogen hose
 5
 
KSCoat
 UP
  
   
 
Litho SRD
 UP
  
   
 
Mask Cleaner
 DOWN
 Water leak, Waiting for parts
 2
 
 
  
  
 



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