Litho AM Daily Report 7/14/11

Eddy M Vilanova vilanova at stanford.edu
Thu Jul 14 08:34:10 PDT 2011


Good morning All....

   Here is the morning Litho status report.

   Please check back in Coral for latest tool updates and current equipment status.

               Thanks....  The Litho Team


Photolithography Area Status
	

 
	

Thursday, July 14, 2011

 
	

 
	

 
	

 
	

 

General Information / Lab Activities
	

 
	

 
	

 

Gary Sosa - Out at noon today

 

 

 

Exposure Tools
	

Status
	

Comments
	

Priority

ASML Stepper
	

PROBLEM
	

Intermittent carrier inspection
	

1

EVAlign
	

PROBLEM
	

Non-criticals only
	

2

EVAlign2
	

UP
	

 
	

 

EVG-Imprint
	

UP
	

 
	

 

Karl Suss 1
	

UP
	

 
	

 

Karl Suss 2
	

UP
	

 
	

 

Manual Coaters
	

Status
	

 
	

 

EVGSpraycoat
	

UP
	

 
	

 

Headway
	

UP
	

 
	

 

Laurell
	

UP
	

 
	

 

Coaters
	

Process Status
	

 
	

 

SVGCoat
	

3612 Process
	

Up
	

 
	

 

220-3 Process
	

Up
	

 
	

 

220-7 Process
	

Up
	

 
	

 

SVGCoat2
	

3612 Process
	

Up
	

 
	

 

955-0.7 Process
	

Up
	

 
	

 

3617 Process
	

Up
	

 
	

 

Developers
	

Status
	

 
	

 

SVGDEV
	

UP
	

 
	

 

SVGDEV2
	

UP
	

 
	

 

Ovens / Hotplates
	

Status
	

 
	

 

BLUEM
	

UP
	

 
	

 

Blue M 90 C.
	

UP
	

 
	

 

Blue M 110 C
	

UP
	

 
	

 

Blue M 150 C
	

UP
	

 
	

 

Fusion
	

UP
	

 
	

 

UV-Cure
	

UP
	

 
	

 

White-Oven
	

UP
	

 
	

 

YES Vapor Prime
	

UP
	

 
	

 

 Hotplates-
	

 
	

 
	

 

   Laurel-left
	

UP
	

 
	

 

   Laurel- right
	

UP
	

 
	

 

   Headway
	

UP
	

 
	

 

   Torrey Pines- left
	

UP
	

 
	

 

   90 Deg C
	

UP
	

 
	

 

   115 Deg C
	

UP
	

 
	

 

   Torrey Pines- Right
	

UP
	

 
	

 

Metrology/Inspection
	

Status
	

 
	

 

Alpha-Step 500
	

UP
	

 
	

 

Nanospec 2-Litho
	

UP
	

 
	

 

Nanospec 1-Etch
	

UP
	

 
	

 

P2 Profiler
	

UP
	

 
	

 

 Microscpoes-
	

 
	

 
	

 

   #1 Leica/Analytical
	

UP
	

 
	

 

   #2 Ergolux/Drytek2
	

UP
	

 
	

 

   #3 Olympus/Litho
	

UP
	

 
	

 



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