Lito Daily Morning Report 6/17/11

Mario Vilanova vilanova at stanford.edu
Fri Jun 17 07:34:25 PDT 2011


Good morning All....

    Here is the morning Litho status report.

No new problems reported overnight.


*Note* *1*: There will be an ASML Stepper maintenance training class 
from 6/13 through 7/1. During certain parts
            of the day the stepper will be unavailable as the trainers 
will be using the tool for the "hands-on" portion
            of the training class. There will be a large group gathered 
around the stepper during this time and the area
            around the stepper will be blocked off to normal traffic. 
Please observe the barricades during this  time
            period. We apologize for the inconvenience and thank you for 
your patience and understanding.


*Note 2:* The Litho Help Desk volunteers are available during the 
following hours:

               Tuesday 10am-noon Liz Edwards
               Tuesday 1-3pm Nahid Harjee
               Wednesday 10am-noon Raja Jain
               Thursday 8:45-10:45am Rostam Dinyari
               Thursday 1:30-3:30pm J Provine

      They are an additional resource for the Litho area to assist 
users. They can help answer any processing or procedural
          questions and help solve problems and offer guidance.


          Please check back in Coral for the latest tool updates and 
current equipment status.

                     Thanks...  The Litho Team

*/Photolithography Area Status/*

	

	

*/Friday , June 17, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

ASML Stepper maintenance training class from 6/13 through 7/1



*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Intermittant carrier inspection

	

1

EVAlign

	

*PROBLEM*

	

Non-criticals only

	     2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurell

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Up*

	

	

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*UP*

	

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	

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