From gsosa at stanford.edu Tue Mar 1 07:35:08 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Tue, 01 Mar 2011 07:35:08 -0800 Subject: Morning Litho Status report 3/1 Message-ID: <4D6D122C.3080001@stanford.edu> Good morning All... Here is the morning Litho status report Karl Suss Align- Scheduled lamp change this AM Karl Suss Align 2- Scheduled lamp change this AM Please chech back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team */Photolithography Area Status/* */Tuesday, March 01, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *UP* EVAlign *PROBLEM* Non-criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* UV Lamp Change today 1 Karl Suss 2 *UP* UV Lamp Change today 2 */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing Process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error 5 */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *PROBLEM* Turret not rotating 6 #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose 7 KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Mar 2 11:26:15 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Wed, 02 Mar 2011 11:26:15 -0800 Subject: Morning Litho status report 3/2 Message-ID: <4D6E99D7.3030004@stanford.edu> Good Morning All.... Here is the morning Litho status report. Solvent Exhaust- The solvent exhaust issues have been resolved by the Facilities Maintenance Group. All affected Litho tools have been re-adjusted and tested and are operating normally. EVG Spraycoater- Due to solvent exhaust interruption, the tool powered off. Will need to get a new registration code from EVG to restart the application software. Karl Suss Coater- Developer module not responding during startup/initialization Microscope #2- Turret does not rotate. BiOptic microscope services picked up the microscope for repair Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Wednesday, March 02, 2011/* */General Information / Lab Activities/* Mario- Out today 3/2 Solvent exhaust issues resolved by Facilities Maintenance. Litho tools affected have been tested and are back to normal */Exposure Tools/* Status Comments Priority ASML Stepper *UP* EVAlign *PROBLEM* Non-criticals only 2 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *DOWN* Registration code needed 1 Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing Process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error 5 */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Turret not rotating 6 #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose 7 KSCoat *PROBLEM* Developer not responding 3 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Mar 3 07:43:29 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Thu, 03 Mar 2011 07:43:29 -0800 Subject: Morning Litho status report 3/3 Message-ID: <4D6FB721.5010407@stanford.edu> Good Morning All..... Here is the morning Litho status report. ASML Stepper- Batch abort during exposure. FSE is on site and will address problem, and begin Monthly PM EVG Spraycoater- Registration code received from EVG. Will enter new code and test system operation SVG Coat 2- Broken wafer in coater bowl. Will clean up process bowl and checkout system P2 Profiler- Not available from 9am to noon while we create a harddisk mirror for backup purposes KSCoater- Developer module is not responding. Needs troubleshooting. Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Thursday, March 03, 2011/* */General Information / Lab Activities/* P2 profiler not available today from 9am to noon while system harddisk mirror is created ASML Monthly PM begins today */Exposure Tools/**//* Status Comments Priority ASML Stepper *DOWN* Batch abort during exposure 1 EVAlign *PROBLEM* Non-criticals only 5 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *DOWN* Registration code needed 4 Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing Process 6 SVGCoat2 3612 Process *Problem* Broken wafer in cup 2 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 3 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Mar 4 07:45:02 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Fri, 04 Mar 2011 07:45:02 -0800 Subject: Morning Litho status report 3/4 Message-ID: <4D7108FE.1000900@stanford.edu> Good Morning All.... Here is the morning Litho status report. ASML Stepper- Monthly PM continues today SVG Dev1- User reports that conveyor belts not working. Will check out during morning rounds KS Coater- Developer module not working. Still troubleshooting Please check back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team */Photolithography Area Status/* */Friday, March 04, 2011/* */General Information / Lab Activities/* EVG Bonder converted to Steel pressure plate today */Exposure Tools/**//* Status Comments Priority ASML Stepper *UP* Monthlty PM continues EVAlign *PROBLEM* Non-criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing Process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *PROBLEM* Conveyor not working 1 SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error 5 */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 2 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Mar 7 07:29:12 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Mon, 07 Mar 2011 07:29:12 -0800 Subject: Morning Litho status report 3/7 Message-ID: <4D74F9C8.1010005@stanford.edu> Good Morning All.... Here is the morning Litho status report ASML Stepper- Users report a ghost pattern on some wafers. Will call in ASML F/S Karl Suss #1- Users report a microscope viewing problem and a chuck slider problem. Will check out on morning rounds SVG Coat #1- Incomplete coverage on 220-7 resist. Will check out on morning rounds SVG Coat #2- Wafer transfer problem reported. Wafers overshoot the centering devices. Will investigate Karl Suss Coater- Developer not responding. Working with tech support to troubleshoot. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Monday, March 07, 2011/* */General Information / Lab Activities/* Mahnaz- Out today 3/7 */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Ghost patterns 1 EVAlign *PROBLEM* Non-criticals only 6 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *PROBLEM* Microscope and chuck problem 4 Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Incomplete coverage 2 SVGCoat2 3612 Process *Problem* Wafer transfer problem 3 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 5 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Mar 8 07:44:33 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Tue, 08 Mar 2011 07:44:33 -0800 Subject: Morning Litho status report 3/8 Message-ID: <4D764EE1.6040508@stanford.edu> Good morning All... Here is the morning Litho status report ASML Stepper- Intermittent carrier inspection on input cassette. ASML is investigating. Usually retrying the carrier inspection will work or try lifting and placing the cassette back onto the platform. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Tuesday, March 08, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection failure 1 EVAlign *PROBLEM* Non-criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 2 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Mar 9 07:34:18 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Wed, 09 Mar 2011 07:34:18 -0800 Subject: Morning Litho status report 3/9 Message-ID: <4D779DFA.5040903@stanford.edu> Good morning All... Here is the morning Litho status report. ASML Stepper- Is up for topside alignment only. 3D Align is OOS. ASML will schedule a time to do a setup. EVG Align- User reports under exposure. Will check and post intensity results Karl Suss Coater- Troubleshooting in progress. Appears that the developer module computer is not working. Need to remove and diagnose computer. Please check back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team */Photolithography Area Status/* */Wednesday, March 09, 2011/* */General Information / Lab Activities/* Mario- Out today 3/9 */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Topside align only 1 EVAlign *PROBLEM* Underexposure 2 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 3 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Mar 10 07:48:08 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Thu, 10 Mar 2011 07:48:08 -0800 Subject: Morning Litho status report 3/10 Message-ID: <4D78F2B8.2050603@stanford.edu> Good morning All.... Here is the morning Litho status report. ASML Stepper- User reports a start batch problem(port 3 and port 4) . Maybe related to the intermittent carrier inspection problem. Will review the system logging. Karl Suss Aligner #1- User reports No light on Left BSA microscope. Possible burned out bulb. Please check back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team. */Photolithography Area Status/* */Thursday, March 10, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Start batch issue 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *PROBLEM* No Left BSA microscope light 2 Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 5 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Mar 11 07:34:45 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Fri, 11 Mar 2011 07:34:45 -0800 Subject: Morning Litho status report 3/11 Message-ID: <4D7A4115.1000507@stanford.edu> Good morning All... Here is the morning Litho status report. ASML Stepper: Topside align only. ASML will be doing 3D align setup today Karl Suss Coater- Developer module is down. Power supply for developer module PC on order. Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Friday, March 11, 2011/* */General Information / Lab Activities/* */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Topside align only 1 EVAlign *PROBLEM* Non-Criticals only 2 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 3 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *PROBLEM* Leaking nitrogen hose KSCoat *PROBLEM* Developer not responding 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Mar 14 07:36:06 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Mon, 14 Mar 2011 07:36:06 -0700 Subject: Morning Litho status report 3/14 Message-ID: <4D7E27D6.5000401@stanford.edu> Good morning All... Here is the morning Litho status report. ASML Stepper- Down. Users wafer is stuck in the system. Will check out and retrieve wafer. SVG Coater 2- Wafer broken in process bowl. Will clean up and test wafer . Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Monday, March 14, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *DOWN* Wafer stuck in system 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 4 SVGCoat2 3612 Process *Problem* Broken wafer in spin module 2 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *PROBLEM* Developer not responding 5 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Mar 15 07:36:15 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Tue, 15 Mar 2011 07:36:15 -0700 Subject: Morning Litho status report 3/15 Message-ID: <4D7F795F.5040903@stanford.edu> Good morning All.... Here is the morning Litho status report. Headway Spinner- Spindle vacuum problem and not spinning. Will check and repair during morning rounds Karl Suss Coater- New power supply for developer computer installed. System and developer booting OK. System needs testing. Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Tuesday, March 15, 2011/* */General Information / Lab Activities/* */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 2 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *DOWN* Spindle vacuum problem 1 Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *PROBLEM* Developer not responding 5 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Mar 16 07:17:42 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Wed, 16 Mar 2011 07:17:42 -0700 Subject: Morning Litho status report 3/16 Message-ID: <4D80C686.1040308@stanford.edu> Good morning All... Here is the morning Litho status report. SVG Coat 2- Wafers are mis-positioning or overshooting at coat module. Will investigate Blue M Oven- User reports problem with program 7. Will check out program and oven operation Karl Suss Coater- Tested operation of system, including developer module. All working OK. Need to re-install the panels and covers. Please check back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team */Photolithography Area Status/* */Wednesday, March 16, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 3 EVAlign *PROBLEM* Non-Criticals only 4 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 5 SVGCoat2 3612 Process *Problem* Wafers overshooting at coater 1 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *PROBLEM* Program 7 problem 2 Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *PROBLEM* Developer not responding 6 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Mar 17 07:55:07 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Thu, 17 Mar 2011 07:55:07 -0700 Subject: Morning Litho status report 3/17 Message-ID: <4D8220CB.3080600@stanford.edu> Good morning All.... Here is the morning Litho status report. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Thursday, March 17, 2011/* */General Information / Lab Activities/* Gary- Out at noon today */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 2 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 1 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *PROBLEM* Developer not responding 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Mar 18 07:32:07 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Fri, 18 Mar 2011 07:32:07 -0700 Subject: Morning Litho status report 3/18 Message-ID: <4D836CE7.9060900@stanford.edu> Good Morning All... Here is the morning Litho status report. ASML Stepper- F/S will be in today to replace a PC board to resolve the carrier inspection problem. SVG Coat !- Broken wafer in coater bowl. Will clean up and test out track Blue M Oven- Tempeature displays in F instead of C. Will verify controller setup and correct/test. Please check back in Coral for latest tool updates and current equipment status. Thanks... The Litho Team */Photolithography Area Status/* */Friday, March 18, 2011/* */General Information / Lab Activities/* Contractors in lab near E-beam room doing preliminary work as part of the building renovations. Please observe any blockades for safety purposes */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 2 EVAlign *PROBLEM* Non-Criticals only 5 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Problem* Broken wafer in coater bowl 1 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 4 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *PROBLEM* Temp display in F instead of C 3 Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Mar 21 07:13:45 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Mon, 21 Mar 2011 07:13:45 -0700 Subject: Morning Litho status report 3/21 Message-ID: <4D875D19.2050207@stanford.edu> Good morning All..... Here is the morning Litho status report. ASML Stepper- Down. Wafer lost in the tool. Will investigate and test. SVG Dev2- Wafer stuck in develop module SVG Coat 2- Intermittent wafer centering problem. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Monday, March 21, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *DOWN* Wafer lost in system 1 EVAlign *PROBLEM* Non-Criticals only 5 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 4 SVGCoat2 3612 Process *Problem* Wafer centering problem 3 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *DOWN* Wafer stuck in developer 2 */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *DOWN* Out for repair #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Mar 22 07:14:46 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Tue, 22 Mar 2011 07:14:46 -0700 Subject: Morning Litho status report 3/22 Message-ID: <4D88AED6.8010107@stanford.edu> Good morning All..... Here is the morning Litho status report... ASML Stepper- Down, A system error occurred. Wafers stuck in system. Will check out on daily qual. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Tuesday, March 22, 2011/* */General Information / Lab Activities/* */Exposure Tools/* Status Comments Priority ASML Stepper *DOWN* System error 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 2 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* The microscope is back and working #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Mar 23 07:31:24 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Wed, 23 Mar 2011 07:31:24 -0700 Subject: Morning Litho status report 3/23 Message-ID: <4D8A043C.3010405@stanford.edu> Good morning All.... Here is the morning Litho status report... ASML Stepper- Down, Users wafers are stuck in the system. Will investigate and check event log. ASML to check out wafer handling calibration. Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Wednesday, March 23, 2011/* */General Information / Lab Activities/* Mario- Out today */Exposure Tools/**//* Status Comments Priority ASML Stepper *DOWN* Wafers stuck in system 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 2 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* The microscope is back and working #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Mar 24 07:19:05 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Thu, 24 Mar 2011 07:19:05 -0700 Subject: Morning Litho status report 3/24 Message-ID: <4D8B52D9.8040206@stanford.edu> Good morning All.... Here is the morning Litho status report.. ASML Stepper- Down, Wafer stuck on robot before going to pre-aligner. WIl investigate and recover wafer SVG Coat2- User reports wafers are off center. Will check out on morning rounds. Please check back in Coral for latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Area Status/* */Thursday, March 24, 2011/* */General Information / Lab Activities/* */Exposure Tools/* Status Comments Priority ASML Stepper *DOWN* Wafers stuck on robot 1 EVAlign *PROBLEM* Non-Criticals only 4 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 3 SVGCoat2 3612 Process *Problem* Wafers off center 2 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Mar 25 07:25:24 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Fri, 25 Mar 2011 07:25:24 -0700 Subject: Morning Litho status report Message-ID: <4D8CA5D4.3010508@stanford.edu> Good morning All.. Here is the morning Litho status report. ASML Stepper- Down, Wafer handler stopped. Will investigate and review event log Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Friday, March 25, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *DOWN* Wafer handler stopped 1 EVAlign *PROBLEM* Non-Criticals only 2 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 3 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Mar 28 07:35:21 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Mon, 28 Mar 2011 07:35:21 -0700 Subject: Morning Litho status report 3/28 Message-ID: <4D909CA9.3090009@stanford.edu> Good morning All.... Here is the morning Litho status report. Please check back in Coral for latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Monday, March 28, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *UP* EVAlign *PROBLEM* Non-Criticals only 2 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurell *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 1 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Mar 29 07:51:04 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Tue, 29 Mar 2011 07:51:04 -0700 Subject: Morning Litho status report 3/29 Message-ID: <4D91F1D8.9060508@stanford.edu> Good morning All... Here is the morning Litho status report. ASML Stepper- Intermittent carrier inspection. ASML service working on a test plan SVG Dev 2- User reports dirty chuck and hotplate. Will inspect/clean on morning rounds *Note:* The Litho Help Desk volunteers are available during the following hours: Tuesday 10am-noon Liz Edwards Tuesday 1-3pm Nahid Harjee Wednesday 10am-noon Raja Jain Thursday 8:45-10:45am Rostam Dinyari Thursday 1:30-3:30pm J Provine They are an additional resource for the Litho area to assist users. They can help answer any processing or procedural questions and help solve problems and offer guidance. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team */Photolithography Area Status/* */Tuesday, March 29, 2011/* */General Information / Lab Activities/* Litho Help Desk- Liz Edwards: 10am - Noon, Nahid Harjee: 1 - 3 PM */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 1 EVAlign *PROBLEM* Non-Criticals only 4 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurell *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 3 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *PROBLEM* Chuck and Hotplate dirty 2 */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Mar 30 07:29:24 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Wed, 30 Mar 2011 07:29:24 -0700 Subject: Morning Litho status report 3/30 Message-ID: <4D933E44.5010702@stanford.edu> Good morning All... Here is the morning Litho status report. *Note:* The Litho Help Desk volunteers are available during the following hours: Tuesday 10am-noon Liz Edwards Tuesday 1-3pm Nahid Harjee Wednesday 10am-noon Raja Jain Thursday 8:45-10:45am Rostam Dinyari Thursday 1:30-3:30pm J Provine They are an additional resource for the Litho area to assist users. They can help answer any processing or procedural questions and help solve problems and offer guidance. Please check back in Coral for the latest tool updates and current equipment status. Thanks...... The Litho Team */Photolithography Area Status/* */Wednesday, March 30, 2011/* */General Information / Lab Activities/* Litho Help Desk- Raja Jain: 10am - Noon Gary- Offsite- 9:00 - 11:30 AM */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurell *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 2 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Mar 31 07:22:04 2011 From: gsosa at stanford.edu (Gary Sosa) Date: Thu, 31 Mar 2011 07:22:04 -0700 Subject: Morning Litho status report 3/31 Message-ID: <4D948E0C.3090109@stanford.edu> Good morning All... Here is the morning Litho status report. *Note:* The Litho Help Desk volunteers are available during the following hours: Tuesday 10am-noon Liz Edwards Tuesday 1-3pm Nahid Harjee Wednesday 10am-noon Raja Jain Thursday 8:45-10:45am Rostam Dinyari Thursday 1:30-3:30pm J Provine They are an additional resource for the Litho area to assist users. They can help answer any processing or procedural questions and help solve problems and offer guidance. Please check back in Coral for the latest tool updates and current equipment status. Thanks..... The Litho Team */Photolithography Area Status/* */Thursday, March 31, 2011/* */General Information / Lab Activities/* Litho Help Desk- Rostam Dinyari: 8:45 - 10:45, J Provine: 1:30 - 3:30 PM */Exposure Tools/* Status Comments Priority ASML Stepper *PROBLEM* Intermittent carrier inspection 1 EVAlign *PROBLEM* Non-Criticals only 3 EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurell *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 220-3 Process *Up* 220-7 Process *Problem* Optimizing process 2 SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 3617 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Hotplate experiments UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *PROBLEM* -11 stage error */Microscpoes-/* #1 Leica/Analytical *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9 Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *UP* Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Thu Mar 31 08:44:56 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 31 Mar 2011 08:44:56 -0700 Subject: Litho help desk tag In-Reply-To: References: Message-ID: <4D94A178.8030506@stanford.edu> Hello all, I made few tags and is hanging on the side of the black cabinet in the litho area close to svg coasters. mahnaz On 3/31/2011 8:35 AM, Rostam Dinyari wrote: > I will be 45 minutes late today, arriving at 9:30am. My apologies. > Rostam > > > > On Sun, Mar 27, 2011 at 12:21 AM, J Provine > wrote: > > hello litho help desk team and litho leads, > a new quarter brings change in many people's schedule. as such we > need to rework timing for the litho help desk experiment > (including our new volunteers). below is a draft of an email to > be distributed to labmembers ideally on monday at the latest. > please let me know if you would like to change any of the > phrasing. i've also attached the litho help desk > checklist/expectations. > > dear labmembers, > a new quarter brings changes in schedule and the litho help desk > experiment is no exception. new volunteers have joined the mix as > well. the new schedule is as follows: > Tuesday 10am-noon Liz Edwards > Tuesday 1-3pm Nahid Harjee > Wednesday 10am-noon Raja Jain > Thursday 8:45-10:45am Rostam Dinyari > Thursday 1:30-3:30pm J Provine > > A friendly reminder that the litho help desk effort is to handle > user requests about process, issues, safety, etc, and allow the > staff a these periods of time to pursue longer term projects of > benefit to the snf lithography area development. The various > litho help desk attendees should always be available during their > time in the litho area. > > thank you, > the litho help desk > > -------------- next part -------------- An HTML attachment was scrubbed... URL: