Morning Litho status report 3/9

Gary Sosa gsosa at stanford.edu
Wed Mar 9 07:34:18 PST 2011


Good morning All...

   Here is the morning Litho status report.

ASML Stepper- Is up for topside alignment only. 3D Align is OOS. ASML 
will schedule a time to do a setup.

EVG Align- User reports under exposure. Will check and post intensity 
results

Karl Suss Coater- Troubleshooting in progress. Appears that the 
developer module computer is not working.
                                  Need to remove and diagnose computer.

     Please check back in Coral for latest tool updates and current 
equipment status.

        Thanks... The Litho Team

*/Photolithography Area Status/*

	

	

*/Wednesday, March 09, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mario- Out today 3/9

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Topside align only

	

1

EVAlign

	

*PROBLEM*

	

Underexposure

	

2

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*DOWN*

	

Out for repair

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

	

KSBonder

	

*PROBLEM*

	

Leaking nitrogen hose

	

KSCoat

	

*PROBLEM*

	

Developer not responding

	

4

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


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