Morning Litho status report 3/29

Gary Sosa gsosa at stanford.edu
Tue Mar 29 07:51:04 PDT 2011


Good morning All...

    Here is the morning Litho status report.

ASML Stepper- Intermittent carrier inspection. ASML service working on a 
test plan

SVG Dev 2- User reports dirty chuck and hotplate. Will inspect/clean on 
morning rounds

*Note:* The Litho Help Desk volunteers are available during the 
following hours:

Tuesday 10am-noon Liz Edwards
Tuesday 1-3pm Nahid Harjee
Wednesday 10am-noon Raja Jain
Thursday 8:45-10:45am Rostam Dinyari
Thursday 1:30-3:30pm J Provine

      They are an additional resource for the Litho area to assist 
users. They can help answer any processing or procedural
          questions and help solve problems and offer guidance.

      Please check back in Coral for the latest tool updates and current 
equipment status.

          Thanks.. The Litho Team

*/Photolithography Area Status/*

	

	

*/Tuesday, March 29, 2011/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Litho Help Desk- Liz Edwards: 10am - Noon, Nahid Harjee: 1 - 3 PM

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Intermittent carrier inspection

	

1

EVAlign

	

*PROBLEM*

	

Non-Criticals only

	

4

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurell

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

3

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*PROBLEM*

	

Chuck and Hotplate dirty

	

2

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

-11 stage error

	

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

Mask Cleaner

	

*UP*

	

	

	

	

	


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20110329/fed37ec0/attachment.html>


More information about the litho mailing list