From gsosa at stanford.edu Tue Nov 1 07:32:16 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 1 Nov 2011 07:32:16 -0700 (PDT) Subject: Morning Litho status report 11/1 In-Reply-To: <53ef23aa-258b-4f79-92a5-eadefb16e0f8@Gary-PC> Message-ID: <8a7ec424-6084-45e3-bcc7-aa7e3fcd712a@Gary-PC> Good morning All... Here is the morning Litho status report.... Important Notice- Please read : The ASML Stepper will be shut down this Thursday(11/3) , beginning at 7:00 am to complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank you for your patience and understanding. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, November 01, 2011 Reported Problems Karl Suss Aligner #1- Problem: User "dton" reports that "left BSA lamp is not on" Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, November 01, 2011 General Information / Lab Activities Mario- Out today 11/1 Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 PROBLEM Left BSA lamp not on 1 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 2 08:00:17 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 2 Nov 2011 08:00:17 -0700 (PDT) Subject: Morning Litho status report 11/2 In-Reply-To: Message-ID: <268b601c-060d-499e-bd3b-08ccf957a2b2@Gary-PC> Good morning All... Here is the morning Litho status report.... Important Notice- Please read : The ASML Stepper will be shut down this Thursday(11/3) , beginning at 7:00 am to complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank you for your patience and understanding. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Wednesday, November 02, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Surfscan 4500- Laser error. Vendor scheduled in today to repair the system. Photolithography Area Status Wednesday, November 02, 2011 General Information / Lab Activities Mahnaz- Out at 3:45 today(11/2) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 DOWN Laser error 1 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Nov 3 08:13:45 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 3 Nov 2011 08:13:45 -0700 (PDT) Subject: Morning Litho status report 11/3 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report.... Important Notice- Please read : The ASML Stepper will be shut down today, Thursday(11/3) , beginning at 7:00 am to complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank you for your patience and understanding. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Thursday, November 03, 2011 Reported Problems ASML Stepper-Shutdown: User "ylyang" reports a s system error and a wafer stranded in the tool. SVG Coat 1- Problem: User "dton" reports that thick resist is not dispensing Problem Updates ( > 24 Hrs ) Photolithography Area Status Thursday, November 03, 2011 General Information / Lab Activities ASML Stepper- Scheduled shutdown for process cooling water upgrade. Work is in progress by contractors. Exposure Tools Status Comments Priority ASML Stepper DOWN System Error 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Problem Not dispensing 2 SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Nov 4 07:55:46 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 4 Nov 2011 07:55:46 -0700 (PDT) Subject: Morning Litho status report Message-ID: <82b10e43-c239-41b5-9321-ec8de1b2d7ca@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral fo rthe latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, November 04, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper- Will verify lens temperature stability and perform daily quals to confirm critical parameters are in spec. Tool should be released with full capability today Photolithography Area Status Friday, November 04, 2011 General Information / Lab Activities EVG Bonder- Changing pressure plate from "Quartz" to "Steel" today(11/4) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Lens temps stabilizing 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 7 07:28:00 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 7 Nov 2011 07:28:00 -0800 (PST) Subject: Morning Litho status report 11/7 Message-ID: <68c1159e-b750-4ed2-8751-8e537e9f8c05@Gary-PC> Good morning All.... Here is the morning LItho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, November 07, 2011 Reported Problems SVG Dev #1- Problem: User "cktee" reports a dispensing problem SVG Dev #2- Problem: User "sgchong" reports receive indexer making noise Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, November 07, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV PROBLEM Dispense problem 1 SVGDEV2 PROBLEM Reciever problem 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Nov 8 07:31:21 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 8 Nov 2011 07:31:21 -0800 (PST) Subject: Morning Litho status report 11/8 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, November 08, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, November 08, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 9 07:28:10 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 9 Nov 2011 07:28:10 -0800 (PST) Subject: Morning Litho status report 11/9 In-Reply-To: <240c9f98-876d-4152-adff-19f2e75d5a0f@Gary-PC> Message-ID: <91cb060b-9149-4cf8-a59f-4ccd5fc674e2@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, November 09, 2011 Reported Problems ASML Stepper-Shutdown: User "ehe" reports that 2 Quartz wafer are stuck in the tool SVG Coat #1- Problem: User "dton" reports that 227-7 is not dispensing Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, November 09, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper DOWN Wafers stuck in tool 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Problem Not dispensing 2 SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Thu Nov 10 07:16:50 2011 From: vilanova at stanford.edu (Mario Vilanova) Date: Thu, 10 Nov 2011 07:16:50 -0800 Subject: Morning Litho Status Report 11/10/11 Message-ID: <4EBBEAE2.8060207@stanford.edu> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks Litho Team */Photolithography Quick Snapshot/**//* */Thursday, November 10, 2011/* */_Reported Problems_/* No New Problems Reported Overnight */_Problem Updates ( > 24 Hrs )_/* */Photolithography Area Status/* */Wednesday, November 09, 2011/* */General Information / Lab Activities/* Gary Out Today 11/10 */Exposure Tools/* Status Comments Priority ASML Stepper *Problem* Intermittent wafer Carrier Inspection 1 EVAlign *UP* EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 *UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Up* 3617 Process *Up* 220-7 Process *Up* SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 220-3 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *UP* UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Flexus Stresstest *UP* Nanospec 1-Etch *UP* Nanospec 2-Litho *UP* Prometrix *UP* P2 Profiler *UP* Rudolph Ellipsometer *UP* Surfscan 4500 *UP* */Microscpoes-/* #1 Leica/ *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *UP* KSCoat *PROBLEM* Unknown error on hotplate 1 2 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: stanford-logo.jpg Type: image/jpeg Size: 10092 bytes Desc: not available URL: From gsosa at stanford.edu Fri Nov 11 07:31:28 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 11 Nov 2011 07:31:28 -0800 (PST) Subject: Morning Litho status report 11/11 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho team Photolithography Quick Snapshot Friday, November 11, 2011 Reported Problems ASML Stepper-Shutdown: Burning smell coming from electronics cabinet. The stepper was powered off and ASML field service notified. Problem Updates ( > 24 Hrs ) Photolithography Area Status Friday, November 11, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper DOWN Burning smell 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 14 07:29:10 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 14 Nov 2011 07:29:10 -0800 (PST) Subject: Morning Litho status report 11/14 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, November 14, 2011 Reported Problems No new problems reported over the weekend Problem Updates ( > 24 Hrs ) ASML Stepper-Shutdown: Burning smell coming from electronics cabinet. The stepper was powered off and ASML field service notified. Problem identified as a bad lamp power supply. New power supply expected today. Repair and stabilization estimate- 12 to 24 hours. Photolithography Area Status Monday, November 14, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper DOWN Burning smell 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Nov 15 07:34:36 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 15 Nov 2011 07:34:36 -0800 (PST) Subject: Morning Litho status report 11/15 Message-ID: <2d815c36-444a-4ef6-ba15-9cd879472b09@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, November 15, 2011 Reported Problems Laurel-R:Problem- User "ranidaw" reports that exhaust magnehelic reading low. Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Burning smell coming from electronics cabinet. The power supply was replaced by ASML F/S on Monday morning. Tool released for Non-critical work at mid-afternoon. Will verify tool stability this morning and check critical parameters. Tool availability pending, due to scheduled ASML demo work. Photolithography Area Status Tuesday, November 15, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel PROBLEM Possible low exhaust 2 Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 16 07:18:44 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 16 Nov 2011 07:18:44 -0800 (PST) Subject: Morning Litho status report 11/16 Message-ID: <28db446f-6f59-4f50-85bd-01549b1a908b@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, November 16, 2011 Reported Problems SVG Coat2- Problem: User "jparker" reports that a transfer belt on hotplate is damaged Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, November 16, 2011 General Information / Lab Activities ASML Stepper- Scheduled vendor Monthly PM today and tomorrow. Tool will not be available from 7:30am to 4:00 unless otherwise noted by ASML. EVG Bonder- Changing pressure plate today from Steel to Quartz Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Transfer belt problem 1 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Nov 17 07:23:59 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 17 Nov 2011 07:23:59 -0800 (PST) Subject: Morning Litho status report 11/17 In-Reply-To: <175f97fa-f2dd-4069-808d-fce12933869d@Gary-PC> Message-ID: <62e2206a-2957-4eeb-af02-72f4206587d8@Gary-PC> Good morning All..... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho team Photolithography Quick Snapshot Thursday, November 17, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Thursday, November 17, 2011 General Information / Lab Activities ASML Stepper- Continuation of vendor Monthly PM today. Tool will not be available from 7:30am to 4:00 unless otherwise noted by ASML. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Nov 18 07:38:16 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 18 Nov 2011 07:38:16 -0800 (PST) Subject: Morning Litho status report 11/18 In-Reply-To: <40132d56-1f83-42e2-b796-db2bbf1cf13b@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, November 18, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Friday, November 18, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 21 07:12:13 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 21 Nov 2011 07:12:13 -0800 (PST) Subject: Morning Litho status report 11/21 Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, November 21, 2011 Reported Problems SVG Dev #2- Problem: User "itot" reports problem with receiver Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, November 21, 2011 General Information / Lab Activities Mario- Vacation today(11/21) EVG Bonder- Changing pressure plate from Quartz to Steel today Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Receiver problem 1 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Nov 22 07:15:37 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 22 Nov 2011 07:15:37 -0800 (PST) Subject: Morning Litho status report 11/22 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updagtes and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, November 22, 2011 Reported Problems ASML Stepper- Shutdown: User "clchang6" reports a wafer shuck inside system Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, November 22, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper DOWN wafer stuck inside system 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 23 08:02:53 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 23 Nov 2011 08:02:53 -0800 (PST) Subject: Morning Litho status report 11/23 In-Reply-To: <611e2d08-1be9-4d7a-977a-172537558939@Gary-PC> Message-ID: <3ef073a4-42a9-4fb3-a980-4d0a45ad4697@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, November 23, 2011 Reported Problems Tencor P2- Shutdown: Stylus force calibration error Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, November 23, 2011 General Information / Lab Activities Mahnaz- Vacation today(11/23) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler DOWN Stylus force error 1 Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 28 07:51:03 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 28 Nov 2011 07:51:03 -0800 (PST) Subject: Morning Litho status report 11/28 In-Reply-To: <8b53ea93-826c-4dc7-aa0b-a4f6e04c5325@Gary-PC> Message-ID: <9343e78e-82af-424b-840e-94a38580c651@Gary-PC> Good morning All..... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, November 28, 2011 Reported Problems Headway: Problem- User "yuxinz" reports that vacuum is not working Karl Suss 2: Problem: User "sclaussen" reports piece shifted during exposure step Problem Updates ( > 24 Hrs ) Tencor P2- Shutdown: Stylus force calibration error. Vendor coming in today to evaluate the problem Photolithography Area Status Monday, November 28, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 4 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 PROBLEM Piece shifting during exposure 3 Manual Coaters Status EVGSpraycoat UP Headway PROBLEM Vacuum problem 2 Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler DOWN Stylus force error 1 Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Nov 29 07:50:30 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 29 Nov 2011 07:50:30 -0800 (PST) Subject: Morning Litho ststus report 11/29 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks ... The Litho Team Photolithography Quick Snapshot Tuesday, November 29, 2011 Reported Problems Problem Updates ( > 24 Hrs ) Karl Suss 2: Problem: User "sclaussen" reports piece shifted during exposure step. Staff to work with user to understand and resolve issue Photolithography Area Status Tuesday, November 29, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 PROBLEM Piece shifting during exposure 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 30 09:20:04 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 30 Nov 2011 09:20:04 -0800 (PST) Subject: Morning Litho status report 11/30 Message-ID: Good morning All..... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, November 30, 2011 Reported Problems Problem Updates ( > 24 Hrs ) Karl Suss 2: Problem: User "sclaussen" reports piece shifted during exposure step. Staff to work with user to understand and resolve issue. User attempting to do piece work on ASML Stepper. Also advised user on alignment techniques for the contact aligner. Photolithography Area Status Wednesday, November 30, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittant carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 PROBLEM Piece shifting during exposure 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: