From gsosa at stanford.edu Mon Oct 3 07:31:44 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 3 Oct 2011 07:31:44 -0700 (PDT) Subject: Morning Litho status report 10/3 Message-ID: <6e618d70-0bb2-4609-b3a3-bb504a70d51c@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, October 03, 2011 Reported Problems SVG Coat 2- Problem: User reports that vapor prime lid obstructing the carriage arms Karl Suss Align #1- Problem: User reports that keys are not responding. Problem Updates ( > 24 Hrs ) EVG Bonder-Down: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendor is having issues with pump which requires further testing. Photolithography Area Status Monday, October 03, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermitent carrier inspection 4 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 PROBLEM Keys not responding 1 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Vapor prime lid problem 2 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder DOWN Turbo problem 3 KSCoat PROBLEM Unknown error on hotplate 1 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Tue Oct 4 07:32:20 2011 From: vilanova at stanford.edu (Mario Vilanova) Date: Tue, 04 Oct 2011 07:32:20 -0700 Subject: Litho AM Daily Report 10/04/11 Message-ID: <4E8B18F4.2020202@stanford.edu> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team */Photolithography Quick Snapshot/* */Tuesday, October 04, 2011/* */_Reported Problems_/* Yes Prime Oven Door Got stuck while user try to open it, Will investigate on Morning Rounds */_Problem Updates ( > 24 Hrs )_/* EVG Bonder-Down: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendor is having issues with pump which requires further testing. */Photolithography Area Status/* */Monday, October 03, 2011/* */General Information / Lab Activities/* */Exposure Tools/**//* Status Comments Priority ASML Stepper *PROBLEM* Intermitent carrier inspection 2 EVAlign *UP* EVAlign2 *UP* EVG-Imprint *UP* Karl Suss 1 * UP* Karl Suss 2 *UP* */Manual Coaters/* Status EVGSpraycoat *UP* Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process * UP* 3617 Process *Up* 220-7 Process *Up* SVGCoat2 3612 Process *Up* 955-0.7 Process *Up* 220-3 Process *Up* */Developers/* Status SVGDEV *UP* SVGDEV2 *UP* */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *UP* UV-Cure *UP* White-Oven *UP* YES Oven * PROBLEM* Door Got Stuck 1 */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Torrey Pines- left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *UP* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Nanospec 2-Litho *UP* Nanospec 1-Etch *UP* P2 Profiler *UP* */Microscpoes-/* #1 Leica/ *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* KSBonder *DOWN* Turbo problem 3 KSCoat *PROBLEM* Unknown error on hotplate 1 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 5 08:08:55 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 5 Oct 2011 08:08:55 -0700 (PDT) Subject: Morning Litho status report 10/5 Message-ID: <2047c5e6-d043-43cd-830c-e62e25c0062d@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, October 05, 2011 Reported Problems EVG Spraycoater- Problem: User reports a chuck vacuum problem Problem Updates ( > 24 Hrs ) EVG Bonder-Down: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendor is attempting a rebuild with parts from a donor pump that they just aquired. Vendor to have a status update on Thursday(10/6). Also pursuing the purchase of a replacement pump. Photolithography Area Status Wednesday, October 05, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat PROBLEM Chuck vacuum error 2 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder DOWN Turbo problem 1 KSCoat PROBLEM Unknown error on hotplate 1 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 6 07:30:25 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 6 Oct 2011 07:30:25 -0700 (PDT) Subject: Morning Litho status report 10/6 In-Reply-To: <05085ffe-69ad-4bc7-9fd9-ba3cbd14803d@Gary-PC> Message-ID: <19d05a37-2c4e-47d2-98e6-e819987e294a@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Thursday, October 06, 2011 Reported Problems SVG Coat 2-Problem: User reports wafer transfer problem from Bake plate to Receiver Problem Updates ( > 24 Hrs ) EVG Bonder-Problem: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendor is attempting a rebuild with parts from a donor pump that they just acquired. Vendor to have a status update on Thursday(10/6). Also pursuing the purchase of a replacement pump. The turbo pump is bypassed for those users who can utilize the tool in this configuration. Photolithography Area Status Thursday, October 06, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Wafer transfer problem 2 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder PROBLEM Turbo problem 1 KSCoat PROBLEM Unknown error on hotplate 1 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 7 07:29:33 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 7 Oct 2011 07:29:33 -0700 (PDT) Subject: Morning Litho status report 10/7 Message-ID: <9dbb4e79-ab74-46e1-a448-b38008460ef9@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, October 07, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) EVG Bonder-Problem: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendors attempt to repair the turbo pump not successful. They are working on a replacement refurb'd pump. In parallel, a backup pump was purchased from an altrenate supplier. Purchase order faxed to supplier yesterday. Instructions to ship priority. The turbo pump is Bypassed for those users who can utilize the tool in this configuration. Photolithography Area Status Friday, October 07, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermitent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder PROBLEM Turbo problem 1 KSCoat PROBLEM Unknown error on hotplate 1 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 10 07:35:22 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 10 Oct 2011 07:35:22 -0700 (PDT) Subject: Morning Litho status report 10/10 Message-ID: <8c93730a-8ab8-40d3-8ce7-214262328291@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, October 10, 2011 Reported Problems No new problems reported over the weekend Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, October 10, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 11 07:23:41 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 11 Oct 2011 07:23:41 -0700 (PDT) Subject: Morning Litho status report 10/11 Message-ID: <68fa995d-c31b-4f2b-8135-c357b340209a@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, October 11, 2011 Reported Problems No new problems reported over-night Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, October 11, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 12 07:25:31 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 12 Oct 2011 07:25:31 -0700 (PDT) Subject: Morning Litho status report 10/12 In-Reply-To: <1845c275-5cf6-4735-8326-ff0c6982d43b@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Wednesday, October 12, 2011 Reported Problems No new problems reported over-night Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, October 12, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermitent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 13 07:38:10 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 13 Oct 2011 07:38:10 -0700 (PDT) Subject: Morning Litho status report 10/13 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, October 13, 2011 Reported Problems No new problems reported over-night Problem Updates ( > 24 Hrs ) Photolithography Area Status Thursday, October 13, 2011 General Information / Lab Activities Gary- Out at 1:30PM Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 14 07:50:37 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 14 Oct 2011 07:50:37 -0700 (PDT) Subject: Morning Litho status report 10/14 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, October 14, 2011 Reported Problems No new problems reported over-night Problem Updates ( > 24 Hrs ) Photolithography Area Status Friday, October 14, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 17 07:29:23 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 17 Oct 2011 07:29:23 -0700 (PDT) Subject: Morning Litho status report 10/17 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, October 17, 2011 Reported Problems Karl Suss Aligner #2: Problem: User reports an overcurrent error. Problem Updates ( > 24 Hrs ) EVG Spraycoated: Down: Need to get a new "Key code" to activate the tool software. Key code issued from Austria. Request by local EVG submitted on Friday(10/14). Photolithography Area Status Monday, October 17, 2011 General Information / Lab Activities Mahnaz- Out Today(10/17) and Tomorrow(10/18) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 PROBLEM Overcurrent error 2 Manual Coaters Status EVGSpraycoat DOWN Need Keycode 1 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 18 07:37:21 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 18 Oct 2011 07:37:21 -0700 (PDT) Subject: Morning Litho status report 10/18 Message-ID: Good morning All... Here is the morning Litho Status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, October 18, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, October 18, 2011 General Information / Lab Activities Mahnaz- Out Today(10/18) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 1 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch UP P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 2 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 19 07:37:19 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 19 Oct 2011 07:37:19 -0700 (PDT) Subject: Morning Litho status report 10/19 In-Reply-To: <6bd1435e-d87a-4145-bf9f-b7064f30ebec@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, October 19, 2011 Reported Problems Nanospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, October 19, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 20 07:44:45 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 20 Oct 2011 07:44:45 -0700 (PDT) Subject: Morning Litho Status report 10/20 Message-ID: Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, October 20, 2011 Reported Problems SVG Coat1- Problem: User reports broken wafer pieces in process bowl. Will clean the bowl Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Arranging for field service call. Photolithography Area Status Thursday, October 20, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Wafer pieces in bowl 1 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 2 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 21 07:27:29 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Oct 2011 07:27:29 -0700 (PDT) Subject: Morning Litho status report 10/21 Message-ID: <867678ea-583e-479f-92b8-12d7f1865535@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, October 21, 2011 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Purchase order for service call in progress Photolithography Area Status Friday, October 21, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 24 07:34:32 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 24 Oct 2011 07:34:32 -0700 (PDT) Subject: Morning Litho status report 10/24 Message-ID: <2b8b391a-555d-44c6-b8a5-764961177d82@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho team Photolithography Quick Snapshot Monday, October 24, 2011 Reported Problems SVG Coat1-Problem: User reports that hotplate is dirty SVG Coat2-Problem: User reports a problem with rails on prime module Karl Suss Align2-Problem: User reports no image from left BSA camera Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Purchase order for service call in progress Photolithography Area Status Monday, October 24, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 5 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 PROBLEM No image on left BSA camera 4 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Hotplate is dirty 2 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Prime module rail problem 3 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 6 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 25 07:43:36 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 25 Oct 2011 07:43:36 -0700 (PDT) Subject: Morning Litho status report 10/25 Message-ID: <0942b0db-d446-4a65-9a36-c43962bcafab@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, October 25, 2011 Reported Problems SVG DEV2- Problem: User "sclaussen" reports a wafer was left on the hotplate. Track would not contInue. Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Purchase order for service call in progress Photolithography Area Status Tuesday, October 25, 2011 General Information / Lab Activities CAMPUS CLEANUP TODAY(10/25) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Wafer stranded at hotplate 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 26 07:47:20 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 26 Oct 2011 07:47:20 -0700 (PDT) Subject: Morning Litho status report 10/26 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, October 26, 2011 Reported Problems No new problems reported overnight. Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Purchase order for service call in progress Photolithography Area Status Wednesday, October 26, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 27 07:18:50 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 27 Oct 2011 07:18:50 -0700 (PDT) Subject: Morning Litho status report 10/27 Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Thursday, October 27, 2011 Reported Problems No new problems reported overnight. Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Unable to recover with Tech support recommendations. Possible monitor logic or CPU failure. Purchase order for service call in progress. All approvals completed and PO Faxed to vendor by procurement dept. Photolithography Area Status Thursday, October 27, 2011 General Information / Lab Activities CAMPUS CLEANUP TODAY!! Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 28 07:27:35 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 28 Oct 2011 07:27:35 -0700 (PDT) Subject: Morning Litho status report 10/28 Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, October 28, 2011 Reported Problems No new problems reported overnight. Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Field service will be in today to service the tool. Photolithography Area Status Friday, October 28, 2011 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 2 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 1 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 31 07:43:41 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 31 Oct 2011 07:43:41 -0700 (PDT) Subject: Morning Litho status report 10/31 In-Reply-To: <0eaf0b1f-47cc-49a9-988e-c289855e511a@Gary-PC> Message-ID: <0446929a-70c2-48a3-885d-e5070715417d@Gary-PC> Good morning All... Here is the morning Litho status report.... Important Notice- Please read : The ASML Stepper will be shut down this Thursday(11/3) , beginning at 7:00 am to complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank you for your patience and understanding. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, October 31, 2011 Reported Problems SVG Dev1-Problem: User "mislam" reports a broken transfer belt on developer Problem Updates ( > 24 Hrs ) Nanaospec 1(Etch)-shutdown: System not resetting correctly and there is scrolling garbage on the screen. Vendor could not repair onsite on Friday. He took the controller back to the shop to repair. Estimated Monday return to complete repair. Photolithography Area Status Monday, October 31, 2011 General Information / Lab Activities HAPPY HALLOWEEN! Exposure Tools Status Comments Priority ASML Stepper PROBLEM Intermittent carrier inspection 3 EVAlign UP EVAlign2 UP EVG-Imprint UP Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 3617 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 955-0.7 Process Up 220-3 Process Up Developers Status SVGDEV PROBLEM Broken belt 1 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Torrey Pines- left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right UP Metrology/Inspection Status Alpha-Step 500 UP Nanospec 2-Litho UP Nanospec 1-Etch DOWN Not resetting 2 P2 Profiler UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP KSBonder UP KSCoat PROBLEM Unknown error on hotplate 1 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: