Morning Litho status report 10/5

Gary J Sosa gsosa at stanford.edu
Wed Oct 5 08:08:55 PDT 2011


Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Wednesday, October 05, 2011 
	
Reported Problems 	
	
	
	

	
EVG Spraycoater- Problem: User reports a chuck vacuum problem 
	

	

	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
EVG Bonder-Down: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Vendor is 
	
attempting a rebuild with parts from a donor pump that they just aquired. Vendor to have a status 
	
update on Thursday(10/6). Also pursuing the purchase of a replacement pump. 
	

	

	
Photolithography Area Status 	
	
Wednesday, October 05, 2011 
	
General Information / Lab Activities 	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Intermittent carrier inspection 	
3 
	
EVAlign 	
UP 	
	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
UP 	
	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
PROBLEM 	
Chuck vacuum error 	
2 
	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Torrey Pines- left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
UP 	
	

	
KSBonder 	
DOWN 	
Turbo problem 	
1 
	
KSCoat 	
PROBLEM 	
Unknown error on hotplate 1 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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