Morning Litho status report 9/9

[Gary J Sosa]

Good morning All.... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks.... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Friday, September 09, 2011 
	
Reported Problems 	
	
	
	

	
SVG Dev 2- Problem: User reports wafer not spinning after loading onto chuck 
	
SVG Dev 1- Down: Problem with wafer detection sensors. Need to troubleshoot. 
	
EVG Spraycoater- Needs start-up and testing. 
	
KS Coater- Needs qualification by ASML 
	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
EVG Bonder: Down.The turbo pump is bad. Repaired turbo pump received on 9/8. Installation 
	
to begin on 9/9 
	

	

	

	
Photolithography Area Status 	
	
Friday, September 09, 2011 
	
General Information / Lab Activities 	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Intermittant carrier inspection 	
4 
	
EVAlign 	
UP 	
	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
UP 	
	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
DOWN 	
Needs start-up 	
3 
	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
DOWN 	
Wafer transfer problem 	
2 
	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Torrey Pines- left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
DOWN 	
Dead turbo pump 	
1 
	
KSBonder 	
UP 	
	

	
KSCoat 	
DOWN 	
Needs qualification by ASML 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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