Morning Litho status report 9/26

[Gary J Sosa]

Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for latest tool updates and current equipment status. 

Thanks.... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Monday, September 26, 2011 
	
Reported Problems 	
	
	
	

	
SVG Coat #1- Problem: User reports poor uniformity on 220-7, 7.0 micron process 
	
SVG Develop #1- Problem: User reports a broken wafer in develop module 
	
Yes Oven- Problem: User reports that dedicated cassettes at another station and wrong cassettes at 
	
the Yes oven station 
	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
EVG Bonder-Down: Turbo not spinning/Seized up. Pump shipped out on Friday 9/16. Turbo pump due 
	
back at Stanford either Monday(9/26) or Tuesday(9/26) depending on final testing. 
	

	

	

	
Photolithography Area Status 	
	
Monday, September 26, 2011 
	
General Information / Lab Activities 	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Intermitent carrier inspection 	
4 
	
EVAlign 	
UP 	
	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
UP 	
	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
220-7 Process 	
Problem 	
Poor Uniformity 	
3 
	
SVGCoat2 	
3612 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
PROBLEM 	
Broken wafer 	
4 
	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Cassettes mixed up 	
1 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Torrey Pines- left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
UP 	
	

	
KSBonder 	
DOWN 	
Turbo problem 	
2 
	
KSCoat 	
PROBLEM 	
Unknown error on hotplate 1 	
5 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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