From gsosa at stanford.edu Mon Apr 2 07:25:43 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 2 Apr 2012 07:25:43 -0700 (PDT) Subject: Morning Litho status report 4/2 In-Reply-To: <5742e7ba-492a-4480-9ab7-7e99e5807a4a@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, April 02, 2012 Reported Problems No new problems reported over the weekend Problem Updates ( > 24 Hrs ) AFM- Down: Computer not booting up. Replacement power supply expected delivery this morning ASML Stepper- Up for front-side align only. ASML working on BSA issues Photolithography Area Status Monday, April 02, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM 3D align need calibration 2 EVAlign PROBLEM Intermittant joystick issue EVAlign2 UP EVG-Imprint DOWN Shutdown til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Mis-aligning pieces 3 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM DOWN Computer boot-up 1 Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Apr 3 07:47:42 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 3 Apr 2012 07:47:42 -0700 (PDT) Subject: Morning Litho status report 4/3 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, April 03, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) AFM- Problem: Computer repair complete. System needs testing Photolithography Area Status Tuesday, April 03, 2012 General Information / Lab Activities EVG-Imprint- System and lamp are powered off until users need it. Please see Mahnaz for arrangements and to allow staff adequate time to bring system up. Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Mis-aligning pieces 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM PROBLEM Repairs completed Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Apr 4 07:42:39 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 4 Apr 2012 07:42:39 -0700 (PDT) Subject: Morning Litho status report 4/4 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Wednesday, April 04, 2012 Reported Problems Karl Suss 2- Problem: User "popomoo" reports a"reset failed" error. Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, April 04, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittant joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM System locked up 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Apr 5 07:37:46 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 5 Apr 2012 07:37:46 -0700 (PDT) Subject: Morning Litho status report 4/5 In-Reply-To: <376b1038-866a-44d1-b962-eae664ba4aca@Gary-PC> Message-ID: <2a60d69c-6ace-41fa-81fb-4140bbe17d9d@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Thursday, April 05, 2012 Reported Problems SVG Coat1- Problem: User "eperalta" reports a buffer/exhaust failure Problem Updates ( > 24 Hrs ) Photolithography Area Status Thursday, April 05, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittant joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Mis-aligning pieces 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Buffer/Exhaust failure 1 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 5 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Apr 6 07:51:17 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 6 Apr 2012 07:51:17 -0700 (PDT) Subject: Morning Litho status report 4/6 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, April 06, 2012 Reported Problems No new problems reported overrnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Friday, April 06, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Apr 9 07:46:49 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 9 Apr 2012 07:46:49 -0700 (PDT) Subject: Morning Litho status report 4/9 In-Reply-To: Message-ID: <1cb03dd9-9421-4421-9cb1-40477c1a86de@Gary-PC> Good Morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, April 09, 2012 Reported Problems No new problems reported over the weekend Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, April 09, 2012 General Information / Lab Activities Mahnaz: Vacation 4/9 through 4/11 returning 4/12(Thursday) Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Apr 10 07:21:03 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 10 Apr 2012 07:21:03 -0700 (PDT) Subject: Morning Litho status report 4/10 In-Reply-To: Message-ID: <223c5678-6412-4142-baca-5d1fdd0a8853@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, April 10, 2012 Reported Problems EVG Spraycoater-Down: User "ludwig" reports a chuck vacuum problem Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, April 10, 2012 General Information / Lab Activities Mahnaz: Vacation 4/9 through 4/11 returning 4/12(Thursday) EE410 Class begins today Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat DOWN Vacuum error 1 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Apr 11 07:12:36 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 11 Apr 2012 07:12:36 -0700 (PDT) Subject: Morning Litho status report 4/11 In-Reply-To: <48d82598-9b9d-45c5-9bef-34d6db20daf4@Gary-PC> Message-ID: <32f4c898-9d38-43fa-92a6-f85d07c01959@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, April 11, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, April 11, 2012 General Information / Lab Activities Mahnaz: Vacation 4/9 through 4/11 returning 4/12(Thursday) EE410 Class Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Tested OK by JWC Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Thu Apr 12 07:41:23 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Thu, 12 Apr 2012 07:41:23 -0700 (PDT) Subject: Litho Daily Status Report 4/12/12 In-Reply-To: <1883798008.71081470.1334241627889.JavaMail.root@zm05.stanford.edu> Message-ID: <241244010.71082169.1334241683559.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 23145 bytes Desc: not available URL: From vilanova at stanford.edu Fri Apr 13 09:07:17 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Fri, 13 Apr 2012 09:07:17 -0700 (PDT) Subject: Litho Daily Report 04/13/2012 In-Reply-To: <1696077767.73290451.1334333233124.JavaMail.root@zm05.stanford.edu> Message-ID: <1503207717.73290520.1334333237599.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 22633 bytes Desc: not available URL: From gsosa at stanford.edu Mon Apr 16 08:01:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 16 Apr 2012 08:01:26 -0700 (PDT) Subject: Morning Litho status report 4/16 In-Reply-To: <705535f9-030d-41d8-a226-3e2226e10ef3@Gary-PC> Message-ID: <725396dd-4b2d-450c-adec-2c5d22802afb@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, April 16, 2012 Reported Problems No new problems reported over the weekend Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, April 16, 2012 General Information / Lab Activities Scheduled downtime on ASML Stepper: Field service to investigate a possible problem with the height of the purge hood that protects the lens. Tool expected to be unavailable to users from 7:00am to 3:30pm today. Check Coral for current status. Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Apr 17 08:01:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 17 Apr 2012 08:01:31 -0700 (PDT) Subject: Morning Litho status report 4/17 In-Reply-To: <279ef95e-eae3-49c8-9401-39d07a09e992@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, April 17, 2012 Reported Problems No new problems reported over night Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, April 17, 2012 General Information / Lab Activities Scheduled downtime on ASML Stepper: Monthly PM begins today Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven ordered 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Apr 18 07:22:17 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 18 Apr 2012 07:22:17 -0700 (PDT) Subject: Morning Litho status report 4/18 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, April 18, 2012 Reported Problems ASML Stepper-Shutdown: User "maxms" reports wafers stuck in system Problem Updates ( > 24 Hrs ) Photolithography Area Status Wednesday, April 18, 2012 General Information / Lab Activities Scheduled downtime on ASML Stepper: Monthly PM continues today New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper DOWN Wafers stuck in tool 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Apr 19 07:40:50 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 19 Apr 2012 07:40:50 -0700 (PDT) Subject: Morning Litho status report 4/19 In-Reply-To: <7c6b93f4-f554-4fbc-b89f-4256e133b735@Gary-PC> Message-ID: <910a0958-22a2-410f-9cfd-a8c523dea215@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, April 19, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Thursday, April 19, 2012 General Information / Lab Activities Scheduled downtime on ASML Stepper: Monthly PM continuing. Also, rotary unit to swing stone in and out to be replaced. New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick issue 2 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Apr 20 07:42:02 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 20 Apr 2012 07:42:02 -0700 (PDT) Subject: Morning Litho status report 4/20 In-Reply-To: <18d762d9-ec13-4dd6-a3c2-7ea0afb63707@Gary-PC> Message-ID: <901b5741-42c3-4c09-beb8-1f8721c60d71@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, April 20, 2012 Reported Problems SVGDEV1-Problem: User "jasonlin" reports a spindle deviation problem Problem Updates ( > 24 Hrs ) ASML Stepper- Rotary unit for swining stage in/out has been repaired. Tool stabilized overnight. Vendor will continue with metrology portion of Monthly PM. Photolithography Area Status Friday, April 20, 2012 General Information / Lab Activities New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper DOWN Monthly PM continues 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Spindle deviation 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 5 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Apr 23 07:04:58 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 23 Apr 2012 07:04:58 -0700 (PDT) Subject: Morning Litho status report 4/23 In-Reply-To: Message-ID: <3170c364-7205-4c5e-8f31-bf9d97eec072@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, April 23, 2012 Reported Problems ASML Stepper-Shutdown: User "cbellew" reports a wafer stuck in system. SVGDEV2-Problem" User "hector" reports a broken wafer at process bowl Problem Updates ( > 24 Hrs ) Photolithography Area Status Monday, April 23, 2012 General Information / Lab Activities New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper DOWN Wafer stuck in system 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Broken wafer 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 5 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Apr 24 07:27:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 24 Apr 2012 07:27:26 -0700 (PDT) Subject: Morning Litho status report 4/24 In-Reply-To: <0797f6ec-dacc-4917-bb5b-a6b28cfc9f21@Gary-PC> Message-ID: <83237812-ffc6-420b-a4dd-abfa89776cfb@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for hte latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, April 24, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) Photolithography Area Status Tuesday, April 24, 2012 General Information / Lab Activities EE-410 Class in Litho today New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper PROBLEM Needs 3D align setup 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Apr 25 08:11:41 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 25 Apr 2012 08:11:41 -0700 (PDT) Subject: Morning Litho status report 4/25 In-Reply-To: <9a18194a-425e-424c-bba0-0d8a94d12d06@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, April 25, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-3D align unavailabe. Apps group will setup/calibrate the 3D align system on Friday(4/27) Photolithography Area Status Wednesday, April 25, 2012 General Information / Lab Activities Mario- Out today(4/25) EE-410 Class in Litho today New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper PROBLEM Needs 3D align setup 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Apr 26 07:19:58 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 26 Apr 2012 07:19:58 -0700 (PDT) Subject: Morning Litho status report 4/26 In-Reply-To: Message-ID: <540f26b6-43eb-4bb1-9d42-6cc4612065b7@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status Thanks... The Litho Team Photolithography Quick Snapshot Thursday, April 26, 2012 Reported Problems Olympus Microscope- User "eperalta" reports that the image capture is not working correctly Problem Updates ( > 24 Hrs ) ASML Stepper-3D align unavailable. Apps group will setup/calibrate the 3D align system on Friday(4/27) Photolithography Area Status Thursday, April 26, 2012 General Information / Lab Activities EE-410 Class in Litho today New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper PROBLEM Needs 3D align setup 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 5 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho PROBLEM Image capture problem 3 #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Apr 27 09:40:15 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 27 Apr 2012 09:40:15 -0700 (PDT) Subject: Morning Litho status report 4/27 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, April 27, 2012 Reported Problems ASML-Shutdown: User "alsune" reported wafer stuck on E-chuck. Users wafer was recovered and inspected and retested OK throught the wafer handling system. Yes Oven- Problem: user "qran" reported that the cycle would not start. Had to re-enter the process program. Tested OK. Problem Updates ( > 24 Hrs ) ASML Stepper-3D align unavailable. Apps group in process of calibrating the 3D align system Photolithography Area Status Friday, April 27, 2012 General Information / Lab Activities New oven to replace "White Oven" shipping from Oregon on 4/27 Exposure Tools Status Comments Priority ASML Stepper PROBLEM 3D align setup in progress 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 4 YES Vapor Prime UP System reprogrammed Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Apr 30 07:47:45 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 30 Apr 2012 07:47:45 -0700 (PDT) Subject: Morning Litho status report 4/30 In-Reply-To: Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, April 30, 2012 Reported Problems Nanospec2-Problem: User "xuanwu" reports that the lamp is out Karl Suss2- Problem: User "clee58" reports that the monitor not turning on. Problem Updates ( > 24 Hrs ) ASML Stepper-Shutdown: Damage to several optical components on wafer table and mirror block. Source of problem has not yet been identified. ASML to begin investigation this morning. Photolithography Area Status Monday, April 30, 2012 General Information / Lab Activities New oven to replace "White Oven" expected to ship from Oregon on 4/27. No confirmation yet Mahnaz- Out Today and Tomorrow(4/30 - 5/1) Mario- Out Today(4/30) Exposure Tools Status Comments Priority ASML Stepper DOWN Damaged optics in exposure area 1 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Monitor problem 3 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 6 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho PROBLEM Lamp not on 2 Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: