Morning Litho status report 4/3

Gary J Sosa gsosa at stanford.edu
Tue Apr 3 07:47:42 PDT 2012


Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks.. The Litho Team 

	
Photolithography Quick Snapshot 	
	
Tuesday, April 03, 2012 
	
Reported Problems 	
	
	
	

	
No new problems reported overnight 
	

	

	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
AFM- Problem: Computer repair complete. System needs testing 
	

	

	

	

	
Photolithography Area Status 	
	
Tuesday, April 03, 2012 
	
General Information / Lab Activities 	
	
	

	
EVG-Imprint- System and lamp are powered off until users need it. Please see Mahnaz for 
	
arrangements and to allow staff adequate time to bring system up. 
	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
UP 	
	

	
EVAlign 	
PROBLEM 	
Intermittent joystick issue 	
3 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Mis-aligning pieces 	
1 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
DOWN 	
New oven ordered 	
4 
	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
PROBLEM 	
Repairs completed 	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
2 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Wafer handling 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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