Morning Litho status 8/7

Gary J Sosa gsosa at stanford.edu
Tue Aug 7 07:43:18 PDT 2012


Good morning All.. 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Tuesday, August 07, 2012 
	
New Issues 	
	
	
	

	
ASML Stepper- Shutdown: User "alsune" reports a wafer stuck on the exposure chuck 
	

	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um 
	
and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed 
	
for repair by ASML. 
	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve 
	
body and mech pump did not solve. Adjusted N2 purge and chamber door position. 
	
Replaced door gasket on 7/24. Replaced controller 7/26. Vacuum valve replaced 7/31 
	
Replaced convectron tube and pumpline on 8/1 
	
KSCoat -Problem: Robot vacuum and wafer pick up failure at load-station. Troubleshot 
	
vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z 
	
height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" 
	
positions 	
	
	
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	
ASML Stepper- Problem: User "cchen86" reports a port 4 problem. System tested OK 
	
during daily quals. 
	

	

	

	
	
	
	
	

	

	
Photolithography Area Status 	
	
Tuesday, August 07, 2012 
	
General Information / Lab Activities 	
	
	

	
ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to 	

	
Veldhoven to replace broken windows. Instalation date still to be determined 
	

	
	
	
	
	

	
	
	
	
	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
DOWN 	
Wafer stuck on E-chuck 	
1 
	
EVAlign 	
PROBLEM 	
Intermittent joystick issue 	
4 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
2 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
3 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Robot teaching 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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