Morning Litho status 8/22

[Gary J Sosa]

Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Wednesday, August 22, 2012 
	
New Issues 	
	
	
	

	
None 
	

	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um 
	
and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed 
	
for repair by ASML. 
	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve 
	
body and mech pump did not solve. Adjusted N2 purge and chamber door position. 
	
Replaced door gasket on 7/24. Replaced controller 7/26. Vacuum valve replaced 7/31 
	
Replaced convectron tube and pumpline on 8/1. Replacing HMDS nupro valve today(8/9) 
	
KSCoat -Problem: Robot vacuum and wafer pick up failure at load-station. Troubleshot 
	
vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z 
	
height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" 
	
positions 	
	
	
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	
ASML Stepper - Shutdown: System powered down on Friday due to interruption to PCW 
	
and CDA. PCW system has been repaired fully restored. Stepper powered up and stabilizing. 
	
Stabilization taking longer than expected. System out of focus by .6 microns. Tool allowed 	

	
to stabilize overnight. After 24Hr stabilization, IQC test indicated very large X and Y image tilts, 
	
beyond the allowable update range. Performed necessary metrology tests/calibrations to correct 
	
tilts and redefined news system reference state. Daily quals performed and in spec. 
	

	

	

	
Photolithography Area Status 	
	
Wednesday, August 22, 2012 
	
General Information / Lab Activities 	
	
	

	
ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to 	

	
Veldhoven to replace broken windows. Installation date still to be determined 
	

	
	
	
	
	

	
	
	
	
	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
No thick resist 	
2 
	
EVAlign 	
PROBLEM 	
Intermittent joystick issue 	
4 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
1 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
3 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Robot teaching 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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