From gsosa at stanford.edu Thu Feb 16 12:51:05 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 16 Feb 2012 12:51:05 -0800 (PST) Subject: Status report 02162012 Message-ID: <8c5abc2d-df80-4425-8d9b-2a481871778c@Gary-PC> Hi All... Here is the Litho status report. The Litho Team Photolithography Quick Snapshot Thursday, February 16, 2012 Reported Problems Problem Updates ( > 24 Hrs ) SVG Coat #1- Vendor working on software/hardware conflicts Photolithography Area Status Thursday, February 16, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper DOWN 6" Demo in progress 1 EVAlign PROBLEM EVAlign2 UP EVG-Imprint DOWN Needs power up/testing Karl Suss 1 UP Karl Suss 2 PROBLEM Misaligning pieces 3 Manual Coaters Status EVGSpraycoat DOWN Needs new keycode Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Down Vendor working on software issue 2 220-3 Process Down 220-7 Process Down SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Down Needs thickness check Developers Status SVGDEV UP Powered up/Tested SVGDEV2 UP Powered up/Tested Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion DOWN Needs power up/testing UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right DOWN Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond UP Needs test bond KSBonder DOWN Need to power up/test KSCoat PROBLEM Wafer handling 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Fri Feb 17 08:52:10 2012 From: vilanova at stanford.edu (Mario Vilanova) Date: Fri, 17 Feb 2012 08:52:10 -0800 Subject: Litho Daily Report 2/17/2012 Message-ID: <4F3E85BA.1000805@stanford.edu> Hi All... Here is the Litho status report. The Litho Team :-) */Photolithography Quick Snapshot/**//* */Friday, February 17 2012/* */_Reported Problems_/* */_Problem Updates ( > 24 Hrs )_/* SVG Coat #1- Vendor Coming to work on software/hardware conflicts */Photolithography Area Status/* */Friday, February 17, 2012/* */General Information / Lab Activities/* */Exposure Tools/* Status Comments Priority ASML Stepper *DOWN* 6" Demo in progress 1 EVAlign *PROBLEM* EVAlign2 *UP* EVG-Imprint *DOWN* Needs power up/testing Karl Suss 1 *UP* Karl Suss 2 *PROBLEM* Misaligning pieces 3 */Manual Coaters/* Status EVGSpraycoat *DOWN* Needs new keycode Headway *UP* Laurel *UP* */Coaters/* Process Status SVGCoat 3612 Process *Down* Vendor working on software issue 2 220-3 Process *Down* 220-7 Process *Down* SVGCoat2 3612 Process *Up* 3617 Process *Up* 955-0.7 Process *Up* */Developers/* Status SVGDEV *UP* Powered up/Tested SVGDEV2 *UP* Powered up/Tested */Ovens / Hotplates/* Status BLUEM *UP* Blue M 90 C. *UP* Blue M 110 C *UP* Blue M 150 C *UP* Fusion *DOWN* Needs power up/testing UV-Cure *UP* White-Oven *UP* YES Vapor Prime *UP* */Hotplates- /* Laurel-left *UP* Laurel- right *UP* Headway *UP* Wenesco- Left *UP* 90 Deg C *UP* 115 Deg C *UP* Torrey Pines- Right *DOWN* */Metrology/Inspection/* Status Alpha-Step 500 *UP* Flexus Stresstest *UP* Nanospec 1-Etch *UP* Nanospec 2-Litho *UP* Prometrix *UP* P2 Profiler *UP* Rudolph Ellipsometer *UP* Surfscan 4500 *UP* Woolam *UP* Zygo *UP* */Microscpoes-/* #1 Leica/ *UP* #2 Ergolux/Drytek2 *UP* #3 Olympus/Litho *UP* #4 Nikon Optiphot/Litho *UP* #5 Nikon/Litho *UP* #6 Leitz/Bosch *UP* #7 Leitz/Diffusion *UP* #8 Olympus/Litho *UP* #9Olympus/Litho *UP* */Miscellaneous/* Status EVBond *UP* Mahnaz Qualifying The tool KSBonder *DOWN* Need to power up/test KSCoat *PROBLEM* Wafer handling 4 Litho SRD *UP* Mask Cleaner *UP* -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Feb 27 07:55:06 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 27 Feb 2012 07:55:06 -0800 (PST) Subject: Morning Litho status report 2/27 In-Reply-To: <2dfcc76e-20da-458c-9203-3960e68e2736@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral fo rthe latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, February 27, 2012 Reported Problems SVG Coat 2- User "maxms" reports wafers are off center Problem Updates ( > 24 Hrs ) SVG Coat #1- Hardware and software functioning properly now. Will begin updating recipes and testing resist processes Photolithography Area Status Monday, February 27, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Up for frontside align only EVAlign PROBLEM Joystick issues 4 EVAlign2 UP EVG-Imprint DOWN Needs power up/testing Karl Suss 1 UP Karl Suss 2 PROBLEM Wafers off-center 2 Manual Coaters Status EVGSpraycoat DOWN Waiting for keycode from EVG 5 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Down Software and hardware issues appear to be resolved. Recipe updates and process tests to begin today 1 220-3 Process Down 220-7 Process Down SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion DOWN Needs power up/testing UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right DOWN To be replaced Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Needs test bond 3 KSBonder DOWN Need to power up/test KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Feb 28 07:36:07 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 28 Feb 2012 07:36:07 -0800 (PST) Subject: Morning Litho status report 2/28/12 Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral forthe latest tool updates and current equipment status. Thanks... The Litho team Photolithography Quick Snapshot Tuesday, February 28, 2012 Reported Problems Headway- Problem: User "bajcsy" reports plugged chuck vacuum line SVG DEV 2- Shutdown: Spindle control problem. Replacing the spin motor Problem Updates ( > 24 Hrs ) SVG Coat #1- Base programs for 3612 1.0 and 1.6 micron created. Need to create the variations for these recipes. 220-3 resist ongoing. 220-7 resist to follow, EVG Spraycoater- EVG supplied keycode did not work. Requesting another one. Photolithography Area Status Tuesday, February 28, 2012 General Information / Lab Activities Mario- Out today Exposure Tools Status Comments Priority ASML Stepper PROBLEM Up for frontside align only EVAlign PROBLEM Joystick issues EVAlign2 UP EVG-Imprint DOWN Needs power up/testing Karl Suss 1 UP Karl Suss 2 PROBLEM Wafers off-center 5 Manual Coaters Status EVGSpraycoat DOWN Waiting for keycode from EVG 4 Headway PROBLEM Vacuum problem 1 Laurel UP Coaters Process Status SVGCoat 3612 Process Down Recipe updates and process tests continuing 3 220-3 Process Down 220-7 Process Down SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 DOWN Spin motor problem 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion DOWN Needs power up/testing UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right DOWN To be replaced Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM KSBonder DOWN Need to power up/test KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Feb 29 08:49:52 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 29 Feb 2012 08:49:52 -0800 (PST) Subject: Morning Litho status report 2/29 Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, February 29, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) SVG Coat #1- Need to work on 220-7 and vapor prime process EVG Spraycoater- EVG supplied keycode did not work. Should receive new code today Photolithography Area Status Wednesday, February 29, 2012 General Information / Lab Activities Gary- Out at 11:00am Exposure Tools Status Comments Priority ASML Stepper PROBLEM Up for frontside align only EVAlign PROBLEM Joystick issues EVAlign2 UP EVG-Imprint DOWN Needs power up/testing Karl Suss 1 UP Karl Suss 2 PROBLEM Wafers off-center 2 Manual Coaters Status EVGSpraycoat DOWN Waiting for keycode from EVG 3 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Down Programming and process checks 1 SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion DOWN Needs power up/testing UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Headway UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Torrey Pines- Right DOWN To be replaced Metrology/Inspection Status Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM KSBonder DOWN Need to power up/test KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: