Status report 02162012

[Gary J Sosa]

Hi All... 

Here is the Litho status report. 

The Litho Team 



	
Photolithography Quick Snapshot 	
	
Thursday, February 16, 2012 
	
Reported Problems 	
	
	
	

	

	

	

	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
SVG Coat #1- Vendor working on software/hardware conflicts 
	

	

	

	

	
Photolithography Area Status 	
	
Thursday, February 16, 2012 
	
General Information / Lab Activities 	
	
	

	

	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
DOWN 	
6" Demo in progress 	
1 
	
EVAlign 	
PROBLEM 	
	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
DOWN 	
Needs power up/testing 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Misaligning pieces 	
3 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
DOWN 	
Needs new keycode 	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Down 	
Vendor working on software issue 	
2 
	
220-3 Process 	
Down 	
	

	
220-7 Process 	
Down 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Down 	
Needs thickness check 	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
Powered up/Tested 	

	
SVGDEV2 	
UP 	
Powered up/Tested 	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
DOWN 	
Needs power up/testing 	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
DOWN 	
	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
UP 	
Needs test bond 	

	
KSBonder 	
DOWN 	
Need to power up/test 	

	
KSCoat 	
PROBLEM 	
Wafer handling 	
4 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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