Morning Litho status report 2/27

Gary J Sosa gsosa at stanford.edu
Mon Feb 27 07:55:06 PST 2012


Good morning All.... 

Here is the morning Litho status report. 

Please check back in Coral fo rthe latest tool updates and current equipment status. 

Thanks... The Litho Team 



	
Photolithography Quick Snapshot 	
	
Monday, February 27, 2012 
	
Reported Problems 	
	
	
	

	
SVG Coat 2- User "maxms" reports wafers are off center 
	

	

	

	

	
Problem Updates ( > 24 Hrs ) 	
	
	

	
SVG Coat #1- Hardware and software functioning properly now. Will begin updating recipes 
	
and testing resist processes 
	

	

	

	
Photolithography Area Status 	
	
Monday, February 27, 2012 
	
General Information / Lab Activities 	
	
	

	

	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Up for frontside align only 	

	
EVAlign 	
PROBLEM 	
Joystick issues 	
4 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
DOWN 	
Needs power up/testing 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Wafers off-center 	
2 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
DOWN 	
Waiting for keycode from EVG 	
5 
	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Down 	
Software and hardware issues appear to be resolved. Recipe updates and process tests to begin today 	
1 
	
220-3 Process 	
Down 	

	
220-7 Process 	
Down 	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
DOWN 	
Needs power up/testing 	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Headway 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Torrey Pines- Right 	
DOWN 	
To be replaced 	

	
Metrology/Inspection 	
Status 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Needs test bond 	
3 
	
KSBonder 	
DOWN 	
Need to power up/test 	

	
KSCoat 	
PROBLEM 	
Wafer handling 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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