From gsosa at stanford.edu Mon Jul 2 07:27:19 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 2 Jul 2012 07:27:19 -0700 (PDT) Subject: Morning Litho status 7/2 In-Reply-To: Message-ID: <3777b344-bb81-4f1e-bf51-460e9f5e0e53@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, July 02, 2012 New Issues SVGDev 1- Problem: User "jparker" reports developer alarming during dispense. Karl Suss 2- Shutdown: User "bchui" reports an overcurrent problem. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replacing pump today(7/2) Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Need to look at system setup Resolved Issues Photolithography Area Status Monday, July 02, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 5 EVAlign PROBLEM Intermittent joystick issue 6 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 DOWN Overcurrent error 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Alarming durning dispense 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 4 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jul 3 07:44:36 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 3 Jul 2012 07:44:36 -0700 (PDT) Subject: Morning Litho status 7/3 In-Reply-To: <5969e390-7e89-4f96-8b8e-350e09fb7098@Gary-PC> Message-ID: <2ee584b5-a67c-40a5-912a-6cf7f6e25bf1@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, July 03, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Need to look at system setup Resolved Issues SVGDev 1- Problem: User "jparker" reports developer alarming during dispense. Repaced female pins on track-side of spindle wire harness. Karl Suss 2- Shutdown: User "bchui" reports an overcurrent problem. Reset the system Photolithography Area Status Tuesday, July 03, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper DOWN ASML work in progress EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 2 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Fri Jul 6 06:15:24 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Fri, 6 Jul 2012 06:15:24 -0700 (PDT) Subject: Morning Litho Daily Report 7/6/2012 In-Reply-To: <1107660486.6100253.1341580474542.JavaMail.root@zm05.stanford.edu> Message-ID: <350782877.6100494.1341580524796.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Photolithography Area Status.doc Type: application/msword Size: 84480 bytes Desc: not available URL: From gsosa at stanford.edu Mon Jul 9 07:47:34 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 9 Jul 2012 07:47:34 -0700 (PDT) Subject: Morning Litho Status 7/9 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, July 09, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Need to look at system setup Resolved Issues Photolithography Area Status Monday, July 09, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jul 10 07:49:50 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 10 Jul 2012 07:49:50 -0700 (PDT) Subject: Morning Litho status 7/10 In-Reply-To: <29ca9479-e54f-42d8-b35f-9dba2669349d@Gary-PC> Message-ID: <09eaa57c-469b-4d30-a57c-436186910f4a@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, July 10, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Reviewing list of supported drives from the application software and trying to find a suitable replacement Resolved Issues Photolithography Area Status Tuesday, July 10, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jul 11 07:30:06 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 11 Jul 2012 07:30:06 -0700 (PDT) Subject: Morning Litho status 7/11 In-Reply-To: <7adf954f-4b90-4490-b226-c7bd5464f412@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Wednesday, July 11, 2012 New Issues SVG Coat2- Problem: Temperature in the vapor prime module is unstable. Need to troubleshoot and repair. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Reviewing list of supported drives from the application software and trying to find a suitable replacement Resolved Issues Photolithography Area Status Wednesday, July 11, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 3 EVAlign PROBLEM Intermittent joystick issue 6 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Unstable vapor prime temperature 1 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 4 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Thu Jul 12 06:51:11 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Thu, 12 Jul 2012 06:51:11 -0700 (PDT) Subject: Litho Daily Morning Report 07/12/2012 In-Reply-To: <227507625.1081541.1342101054767.JavaMail.root@zm05.stanford.edu> Message-ID: <1876361081.1081612.1342101071163.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 25777 bytes Desc: not available URL: From gsosa at stanford.edu Fri Jul 13 07:51:09 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 13 Jul 2012 07:51:09 -0700 (PDT) Subject: Morning Litho status 7/13 In-Reply-To: <20d8bcca-bf74-487b-8d4b-01de0831740a@Gary-PC> Message-ID: Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, July 13, 2012 New Issues Tencor P-2 Profiler- Down: User "arion" reports system will not boot up Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Reviewing list of supported drives from the application software and trying to find a suitable replacement Resolved Issues Photolithography Area Status Friday, July 13, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 4 EVAlign PROBLEM Intermittent joystick issue 6 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler DOWN Will not boot 1 Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jul 16 07:40:02 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 16 Jul 2012 07:40:02 -0700 (PDT) Subject: Morning Litho status 7/16 In-Reply-To: Message-ID: <3390ffae-8fd3-43d9-89a0-4b71ee8764ec@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, July 16, 2012 New Issues SVG DEV2- Problem: User "popomoo" reports a bake program eoor Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Ordered replacement drive on 7/13 ETA on delivery is 7/17 Resolved Issues Tencor P-2 Profiler- Down: User "arion" reports system will not boot up. Reseated some connectors. Was able to reboot and re-initialize. Tested good by Uli Photolithography Area Status Monday, July 16, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 4 EVAlign PROBLEM Intermittent joystick issue 6 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Error in bake program 1 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jul 17 07:40:40 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 17 Jul 2012 07:40:40 -0700 (PDT) Subject: Morning Litho status 7/17 In-Reply-To: <6191be65-8eb6-47f3-bce9-e8bf67a5443d@Gary-PC> Message-ID: <2b424471-a3e5-4352-8904-82a181fa076d@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, July 17, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a replacement drive but software does not recognize. Ordered replacement drive on 7/13. On Fed/Ex truck out for delivery Resolved Issues SVG DEV2- Problem: User "popomoo" reports a bake program error. Program corrected Photolithography Area Status Tuesday, July 17, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 ? 8/1 ) ASML Stepper : Day 1 of Monthly PM begins today(7/17) ASML is also planning on re-installing the purge/extraction hood and replacing the RIS plate. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jul 18 07:42:43 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 18 Jul 2012 07:42:43 -0700 (PDT) Subject: Morning Litho status 7/18 In-Reply-To: <6faba2c7-839f-4d7d-9e9b-7533196385c2@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, July 18, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed the replacement drive yesterday. CD burning software now recognizes the drive. Still need to test by writing a file to the disk. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Wednesday, July 18, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Monthly PM continues today(7/18)- Day 2. ASML replaced and set up the RIS plate yesterday. ASML still planning on re-installing the purge/extraction hood. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not recognized 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat DOWN Robot vacuum Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jul 19 07:57:53 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 19 Jul 2012 07:57:53 -0700 (PDT) Subject: Morning Litho status 7/19 In-Reply-To: Message-ID: <5358a1bc-63f0-4568-9075-5f6b197366fd@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Thursday, July 19, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. Replace pump on 7/2. Monitoring system KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed the replacement drive on 7/17. Tested function-OK Photolithography Area Status Thursday, July 19, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Monthly PM continues today(7/18)- Day 3. Purge hood installation scheduled Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP CD burner works Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jul 20 07:41:06 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 20 Jul 2012 07:41:06 -0700 (PDT) Subject: Morning Litho status 7/20 In-Reply-To: <02cc8718-3760-4f3e-af7c-c1e31d6e43ea@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, July 20, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusting N2 purge and adjusting chamber door with continued testing. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Friday, July 20, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install postponed due to ASML manpower issues. Install to be rescheduled at a later date TBD. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP CD burner works Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jul 23 07:40:58 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 23 Jul 2012 07:40:58 -0700 (PDT) Subject: Morning Litho status 7/23 In-Reply-To: <29eafc8c-8bf9-4907-a416-118620e045a4@Gary-PC> Message-ID: <985ab69b-f5a1-40ec-a645-d587fa6f2b86@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, July 23, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. Continued testing in progress. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Monday, July 23, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install postponed due to ASML manpower issues. Install to be rescheduled at a later date TBD. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP CD burner works Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jul 24 07:45:08 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 24 Jul 2012 07:45:08 -0700 (PDT) Subject: Morning Litho status 7/24 In-Reply-To: <7ec74f4c-1d63-43b3-9219-d53c808b6305@Gary-PC> Message-ID: <8c4779ec-bf11-4e24-bc52-3ef9e02f79f8@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, July 24, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. continued testing in progress. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Tuesday, July 24, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install postponed due to ASML manpower issues. Install to be rescheduled at a later date TBD. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP CD burner works Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jul 25 07:59:54 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 25 Jul 2012 07:59:54 -0700 (PDT) Subject: Morning Litho status 7/25 In-Reply-To: Message-ID: <4fb58563-dba2-4526-839d-9142843b5f96@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, July 25, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. continued Replaced door gasket on 7/24. Testing in progress. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Wednesday, July 25, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to Veldhoven to replace broken windows. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP CD burner works Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jul 26 07:21:05 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 26 Jul 2012 07:21:05 -0700 (PDT) Subject: Morning Litho status 7/26 In-Reply-To: <5aaebf1f-6fb0-49b8-b254-7f60aeeac3f0@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Thursday, July 26, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. continued Replaced door gasket on 7/24. Will try a replacement controller today KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Thursday, July 26, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to Veldhoven to replace broken windows. Mario - Vacation Today(7/26) and Tomorrow(7/27) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jul 27 07:37:36 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 27 Jul 2012 07:37:36 -0700 (PDT) Subject: Morning Litho status 7/27 In-Reply-To: <07724073-f1fc-4a62-9e83-b5184daf5df7@Gary-PC> Message-ID: <88b28c17-f381-4025-abc5-68139d20954f@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, July 27, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. Replaced door gasket on 7/24. Replaced controller 7/26. Testing continues KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Photolithography Area Status Friday, July 27, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to Veldhoven to replace broken windows. Tentative installation on either 8/1 or 8/2 Mario - Vacation Today(7/26) and Tomorrow(7/27) Gary - Out at 1:30PM Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jul 30 07:47:14 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 30 Jul 2012 07:47:14 -0700 (PDT) Subject: Morning Litho status 7/30 In-Reply-To: <58cab82b-c7a9-44cf-85cd-e947775223a4@Gary-PC> Message-ID: <9bfc692c-b0b2-4901-8c69-590345ebffb1@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, July 30, 2012 New Issues Karl Suss Aligner1- Problem: User "popomoo" reports left BSA bulb not on. Bulb Replaced Karl Suss Aligner2 - Problem: "User " popomoo" reports "reset mechanics failed". X,Y and Theta stages recentered and full system reset and hardware initialization. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. Replaced door gasket on 7/24. Replaced controller 7/26. Ordered additional valves to replace. KSCoat -Shutdown: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Karl Suss Aligner1- Problem: User "popomoo" reports left BSA bulb not on. Bulb Replaced Karl Suss Aligner2 - Problem: "User " popomoo" reports "reset mechanics failed". X,Y and Theta stages recentered and full system reset and hardware initialization. Photolithography Area Status Monday, July 30, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to Veldhoven to replace broken windows. Tentative instalation on either 8/1 or 8/2 EVG Bonder - Changing pressure plate from Steel to Quartz today(7/30) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jul 31 07:31:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 31 Jul 2012 07:31:11 -0700 (PDT) Subject: Morning Litho status 7/31 In-Reply-To: Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, July 31, 2012 New Issues SVG Coat1- Problem: User "xuanwu" reports a wafer transfer problem at bake plate. Karl Suss Aligner1 - Problem: User " xuanwu" reports " a poor exposure problem Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replacement of valve body and mech pump did not solve. Adjusted N2 purge and chamber door position. Replaced door gasket on 7/24. Replaced controller 7/26. Replacing vacuum valve today(7/31) KSCoat -Problem: Robot vacuum and wafer pick up failure at load-station. Troubleshot vacuuum problem and replaced vacuum solenoid for endeffector. Re-taught loadstation Z height positions for 4"wafers. ASML will test. Still need to teach 3",5",6" and 8" positions Resolved Issues Karl Suss Aligner1- Problem: User "popomoo" reports left BSA bulb not on. Bulb Replaced Karl Suss Aligner2 - Problem: "User " popomoo" reports "reset mechanics failed". X,Y and Theta stages recentered and full system reset and hardware initialization. Photolithography Area Status Tuesday, July 31, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - 8/1 ) ASML Stepper : Purge/extraction hood install delayed. Purge hood sent back to Veldhoven to replace broken windows. Tentative instalation on either 8/1 or 8/2 Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 4 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 PROBLEM Poor exposure 2 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Wafer transfer 1 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: