From gsosa at stanford.edu Fri Jun 1 08:15:00 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 1 Jun 2012 08:15:00 -0700 (PDT) Subject: Morning Litho status 6/1 In-Reply-To: Message-ID: <50d2874f-247c-4796-a694-83dc92868007@Gary-PC> Good morning All Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, June 01, 2012 New Issues N/A Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. Heater problem may be resolved with some tuning and updating of setup values in temperature controller. Final testing today with possible release of tool to users this afternoon Resolved Issues Photolithography Area Status Friday, June 01, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jun 4 08:26:55 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 4 Jun 2012 08:26:55 -0700 (PDT) Subject: Morning Litho status 6/4 In-Reply-To: <5033db19-89c1-4d2d-a1e0-52d61bf9060d@Gary-PC> Message-ID: Good morning All..... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, June 04, 2012 New Issues N/A Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. Heater problems continue. Suspect a bad temperature controller. We are trying to find a replacement temperature controller. Resolved Issues Photolithography Area Status Monday, June 04, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jun 5 08:01:44 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 5 Jun 2012 08:01:44 -0700 (PDT) Subject: Morning Litho status 6/5 In-Reply-To: <30356985-592a-467d-96ba-ac88d6faac8a@Gary-PC> Message-ID: <026fef92-f6ca-4641-b1f8-116288cea2a8@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and the current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, June 05, 2012 New Issues N/A Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. Heater problems continue. Suspect a bad temperature controller. Replacement controller ordered 6/4. Due to arrive 6/5 in the AM Resolved Issues Photolithography Area Status Tuesday, June 05, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jun 6 09:31:56 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 6 Jun 2012 09:31:56 -0700 (PDT) Subject: Morning Litho status 6/6 In-Reply-To: <922a9c31-4dab-45c8-ade4-3aa33c4864e0@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, June 06, 2012 New Issues N/A Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. Heater problems continue. Suspect a bad temperature controller. Replacement controller set up and installed 6/5. Still running tests. Resolved Issues Photolithography Area Status Wednesday, June 06, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jun 7 07:59:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 7 Jun 2012 07:59:26 -0700 (PDT) Subject: Morning Litho status 6/7 In-Reply-To: Message-ID: Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, June 07, 2012 New Issues Karl Suss Aligner 1- Shutdown: User "clee58" reports that the system buttons are not responding Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. Heater problems continue. Replacement controller set up and installed 6/5. Had an experienced user do a bond test last night. Temperature responded well. Results look promising. Will have them do another test before releasing the system. Resolved Issues Photolithography Area Status Thursday, June 07, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Mario- Out today(6/7) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 DOWN System locked up 1 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jun 8 07:43:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 8 Jun 2012 07:43:11 -0700 (PDT) Subject: Morning Litho status 6/8 In-Reply-To: <2fabf562-ea5a-46b4-b2a4-96aa524e8311@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, June 08, 2012 New Issues ASML Stepper - Shutdown: User "ysohn" reports wafer stuck in system SVG Coat 1 - Problem: User "cbellew" reports 220-3 resist nozzle dripping Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni gauge and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. Resolved Issues Karl Suss 1 - Reset system and tested operation EVG Bonder - 2 successful bonds by Jim and Aditya. Tool released for use with special instruction. See Coral entry for details. Jim and Aditya also available for assistance. Photolithography Area Status Friday, June 08, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Mario- Out today(6/8) Exposure Tools Status Comments Priority ASML Stepper DOWN wafer stuck in system 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Problem Dripping nozzle 2 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jun 11 07:59:43 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 11 Jun 2012 07:59:43 -0700 (PDT) Subject: Morning Litho status 6/11 In-Reply-To: Message-ID: <532398df-da84-46b5-85c7-16d97b987712@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, June 11, 2012 New Issues ASML Stepper - Shutdown: User "callarudo" reports batch control not working SVG DEV1- Shutdown: User "Callarudo" reports poor develop problem YES Oven- Intermittent pumpdown problem. Fails to achieve set point. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni gauge and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. New ship date for pressure transmitter is today(6/11). Will receive tracking # later today. Resolved Issues EVG Bonder - 2 successful bonds by Jim and Aditya. Tool released for use with special instruction. See Coral entry forr details. Jim and Aditya also available for assistance. ASML Stepper - Shutdown: User "ysohn" reports wafer stuck in system. Retrieved stranded wafer from E-chuck. Rebooted system. SVG Coat 1 - Problem: User "cbellew" reports 220-3 resist nozzle dripping. Adjusted suckback and purged pump. Photolithography Area Status Monday, June 11, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) EVG Bonder - Changing pressure plate from Steel to Quartz this morning Exposure Tools Status Comments Priority ASML Stepper DOWN Batch control problem 1 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV DOWN Poor develop 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jun 12 07:40:45 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 12 Jun 2012 07:40:45 -0700 (PDT) Subject: Morning Litho status 6/12 In-Reply-To: <1e8e97b5-a375-43de-8255-c9adcad96dee@Gary-PC> Message-ID: God Morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, June 12, 2012 New Issues Karl Suss1 - Shutdown: User "kyunlok" reports that program is stuck AFM - Problem: User "wmtang" reports a scan head problem Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni gauge and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. New ship date for pressure transmitter is today(6/11). Will receive tracking # later today. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Suspect leak through nitrogen purge valve. Rebuilding valve today(6/12) Resolved Issues ASML Stepper - Shutdown: User "callarudo" reports batch control not working. Full system software reboot. Full hardware reset/initialization. All OK SVG DEV1- Shutdown: User "Callarudo" reports poor develop problem. Cleaned off spindle encoder assembly. Tested OK. Photolithography Area Status Tuesday, June 12, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Purge Hood 5 EVAlign PROBLEM Intermittent joystick issue 6 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 DOWN Program is stuck 1 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM PROBLEM Scan header problem 2 Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Jun 12 09:55:42 2012 From: jwc at snf.stanford.edu (James W. Conway) Date: Tue, 12 Jun 2012 09:55:42 -0700 Subject: Morning Litho status 6/12 In-Reply-To: References: Message-ID: <4FD7748E.8010509@snf.stanford.edu> An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jun 13 07:45:58 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 13 Jun 2012 07:45:58 -0700 (PDT) Subject: Morning Litho status 6/13 In-Reply-To: <9b55f7a1-414e-4b52-ae02-6d05cfbdee12@Gary-PC> Message-ID: <1e311b86-9d3f-4801-a123-1d227739c15c@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Wednesday, June 13, 2012 New Issues ASML Stepper- Shutdown: User "gyama" reports wafer stuck on E-chuck Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni gauge and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. New ship date for pressure transmitter is today(6/11). Will receive tracking # later today. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are continuing to monitor system Resolved Issues Karl Suss1 - Shutdown: User "kyunlok" reports that program is stuck. Re-initialized system AFM - Problem: User "wmtang" reports a scan head problem. Cleaned the dovetail mount Photolithography Area Status Wednesday, June 13, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper DOWN Wafer stuck at Echuck 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jun 14 08:05:43 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 14 Jun 2012 08:05:43 -0700 (PDT) Subject: Morning Litho status 6/14 In-Reply-To: <301a265e-fa00-4e1b-9ee1-a89f5aa8a03f@Gary-PC> Message-ID: <6dd299fd-82fc-486b-afc0-f8b77844313d@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks .. The Litho Team Photolithography Quick Snapshot Thursday, June 14, 2012 New Issues SVG Coat 1 - Problem: User "bchui" reports dispense arm not returning home error Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. New ship date for pressure transmitter is today(6/11). Will receive tracking # later today. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. W are continuing to monitor system Resolved Issues ASML Stepper -Shutdown: User "gyama" reprts wafer stuck on E-chuck. Retrieved stranded wafers from tool. Re-initialized all hardware. Performed dauly qual. All OK. Photolithography Area Status Thursday, June 14, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) EVG Bonder - Changing pressure plate from Quart z to Steel this morning Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 4 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Dispense arm problem 1 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jun 15 07:43:12 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 15 Jun 2012 07:43:12 -0700 (PDT) Subject: Morning Litho status 6/15 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, June 15, 2012 New Issues None Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. New ship date for pressure transmitter is today(6/11). YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. W are continuing to monitor system Resolved Issues SVG Coat 1 - Problem: User "bchui" reports dispense arm not returning home error. Re-aligned the pulleys and belt that drive the dispense arm. Adj D/A up/down speed and wafer centering Photolithography Area Status Friday, June 15, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Jun 18 07:40:14 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 18 Jun 2012 07:40:14 -0700 (PDT) Subject: Morning Litho status 6/18 In-Reply-To: <37e28058-74e4-49e9-89c8-8ac953b49979@Gary-PC> Message-ID: <4efe1ef5-f569-4ef6-8bf6-e5f46786917c@Gary-PC> Good morning All..... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, June 18, 2012 New Issues EVG Align1 - Problem: User "munekazu" reports sequencing problem and system not initializing. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni guage and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. Pressure transmitter received on 6/14. Will schedule an appropriate time to replace. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. W are continuing to monitor system Resolved Issues Photolithography Area Status Monday, June 18, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Mario - Out today(6/18) Scheduled facilities work to repair TF-6 transfer fan for L100 conditioned air. 6:30am - 10:30am As per Email, this affects the temp/humidity in the Headway/Laurell/Blue-M aisle. Please process with caution or wait until repairs are completed. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 4 EVAlign PROBLEM Not initializing 1 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 3 KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jun 19 07:39:27 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 19 Jun 2012 07:39:27 -0700 (PDT) Subject: Morning Litho status 6/19 In-Reply-To: Message-ID: <0c9da8b9-186d-4a90-9eff-80901c5c6de1@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, June 19, 2012 New Issues None Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Problem: New vacuum pressure transmitter will be shipped from New Jersey on 6/4. Installed Piranni gauge and digital readout in parallel as workaround until replacement. Check Coral entry for details. Jim and Aditya also available for assistance. Pressure transmitter received on 6/14. Will install new transmitter today(6/19) YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. W are continuing to monitor system Resolved Issues EVG Align1 - Problem: User "munekazu" reports sequencing problem and system not initializing. Rebooted EVG software and re-initialized sysgtem hardware. Photolithography Area Status Tuesday, June 19, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- Day 1 of Scheduled Monthly PM. Tool will be unavailable to users during this time. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Pressure transmitter 2 KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jun 20 07:35:16 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 20 Jun 2012 07:35:16 -0700 (PDT) Subject: Morning Litho status 6/20 In-Reply-To: <5827296b-8fe0-4a6a-af56-66bf8dac91ec@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, June 20, 2012 New Issues None Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. W are continuing to monitor system Resolved Issues EVG Bonder - Installed new pressure transmitter. Tested good to -5 range. Removed digital gauge. System can be run as normal now. Photolithography Area Status Wednesday, June 20, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- Day 2 of Scheduled Monthly PM. Tool will be unavailable to users during this time. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jun 21 07:49:46 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 21 Jun 2012 07:49:46 -0700 (PDT) Subject: Morning Litho Status 6/21 In-Reply-To: <5a7651c5-fb52-4f58-9296-a9ea18deb03c@Gary-PC> Message-ID: <6daf306d-b183-4fed-a379-3f2115bcb628@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, June 21, 2012 New Issues None Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Resolved Issues Photolithography Area Status Thursday, June 21, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- Day 3 of Scheduled Monthly PM. Tool will be unavailable to users during this time. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jun 22 08:00:27 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 22 Jun 2012 08:00:27 -0700 (PDT) Subject: Morning Litho status 6/22 In-Reply-To: <1a1d2d3e-931a-4df8-bc21-d9af3d1b38b9@Gary-PC> Message-ID: <3ce053ad-f36f-40aa-a56f-73f7f2a53e3a@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Also, A reminder for ASML Stepper Users : This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th . The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, June 22, 2012 New Issues SVG Coat2- Problem: User "leixin" reports air bubble in 3612 resist line Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Resolved Issues Photolithography Area Status Friday, June 22, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Tencor Stresstest- Vendor from InSpec will be in today to check system calibrations Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Air bubble in resist line 1 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ASML Project Schedule.pdf Type: application/pdf Size: 203659 bytes Desc: not available URL: From gsosa at stanford.edu Mon Jun 25 07:29:57 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 25 Jun 2012 07:29:57 -0700 (PDT) Subject: Morning Litho status 6/25 In-Reply-To: <096a15b8-0ba2-487f-beeb-1952901d0803@Gary-PC> Message-ID: <5b074825-dfa5-4496-9651-8ab13972052c@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Also, A reminder for ASML Stepper Users: This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th . The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, June 25, 2012 New Issues SVG Dev1- Problem: User "hysoon" reports "spindle out of band" error Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Resolved Issues Photolithography Area Status Monday, June 25, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) Tencor Stresstest- Vendor verified system before adjustments- System in spec. Vendor performed system calibrations and adjustments and re-verified tool- All is spec. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Spindle deviation 1 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Jun 26 07:28:06 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 26 Jun 2012 07:28:06 -0700 (PDT) Subject: Morning Litho status 6/26 In-Reply-To: <578cf2f9-038e-48a8-9107-fa575df4f322@Gary-PC> Message-ID: <43ddc47c-89a5-41b1-ba81-534b63a5cb9a@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Also, A reminder for ASML Stepper Users: This is a reminder that the ASML Special Applications Group has a very important project beginning Tuesday 6/26 at 7:30am and is scheduled to be completed late evening on July 7th . The project requires an extensive amount of tool time and there will be times when the tool will not be available in the late evenings and early mornings due to ongoing work or tool configuration. I have attached a time line that shows the project schedule and time needed. I will also post a copy at the Lab entrance and at the tool. Note that the areas on the schedule shaded in blue are times when the tool is available, only if needed. Please make arrangements with Litho staff if you absolutely have to use the stepper during this time, otherwise the tool will remain under ASML's control to avoid any potential problems that will put their critical work at risk. Also, the ending times are estimates, so if ASML completes their scheduled daily work early, they will release the tool time to the lab members. You will have to check on Coral for these updates. Please plan you Stepper activities accordingly and make alternate plans during this time. Thank you in advance for you patience and understanding from the SNF Staff and ASML Special Applications Group. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, June 26, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Resolved Issues SVG Dev1- Problem: User "hysoon" reports "spindle out of band" error. Cleaned up encoder wheel and sensor. Performed spindle calibration. Photolithography Area Status Tuesday, June 26, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Jun 27 07:59:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 27 Jun 2012 07:59:26 -0700 (PDT) Subject: Morning Litho status 6/27 In-Reply-To: Message-ID: <545aa0e2-7bd9-47d2-8568-f612fe44a8a7@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho team Photolithography Quick Snapshot Wednesday, June 27, 2012 New Issues Zygo- Problem: User "mcherry" reports that the CD drawer is not opening Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Resolved Issues Photolithography Area Status Wednesday, June 27, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not opening 2 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Jun 28 09:45:08 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 28 Jun 2012 09:45:08 -0700 (PDT) Subject: Morning Litho status 6/28 In-Reply-To: Message-ID: <39452bd3-59e8-4962-9dfe-98a05ecc9062@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, June 28, 2012 New Issues ASML Stepper- Shutdown: ASML test wafer got stranded in the tool at 11:30pm. Recovered wafers this morning and tested tool. Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Need to replace the CD/DVD Burner. Resolved Issues Photolithography Area Status Thursday, June 28, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper DOWN Wafer lost 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not opening 2 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jun 29 07:44:59 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 29 Jun 2012 07:44:59 -0700 (PDT) Subject: Morning Litho status 6/29 In-Reply-To: <31ea8827-7bbf-4947-b6d8-d1d9ef0bfb22@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, June 29, 2012 New Issues None- Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve stem/seat for N2 purge. We are still troubleshooting Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Need to replace the CD/DVD Burner. Checking with IT dept for CD burner or will order one Resolved Issues ASML Stepper- Shutdown: ASML test wafer got stranded in the tool at 11:30pm. Recovered stranded wafer. Reset software/hardware. Performed tests/quals Photolithography Area Status Friday, June 29, 2012 General Information / Lab Activities Mahnaz - LOA( 5/31 - ??? ) ASML Stepper- 6/26 through 7/7: Stepper will be unavailable as per posted schedule unless otherwise released to users by ASML Applications Group. Please check Coral for updates Exposure Tools Status Comments Priority ASML Stepper DOWN Demo in Progress 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP . Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Drawer not opening 2 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat UP Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: