From gsosa at stanford.edu Tue May 1 07:49:10 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 1 May 2012 07:49:10 -0700 (PDT) Subject: Morning Litho status report 5/1 In-Reply-To: <79959fc7-ccfa-45ca-bbfc-440c574575f6@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, May 01, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Shutdown: Damage to several optical components on wafer table and mirror block. Purge hood removed for repair and investigation. New 3D align wafer table installed. ASML is currently doing the system baseline setup. Photolithography Area Status Tuesday, May 01, 2012 General Information / Lab Activities New oven to replace "White Oven" expected to ship from Oregon on 4/27. No confirmation yet Mahnaz- Out Today and ( 5/1) Exposure Tools Status Comments Priority ASML Stepper DOWN Setup after E-chuck replacement 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 4/27 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed May 2 08:16:35 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 2 May 2012 08:16:35 -0700 (PDT) Subject: Morning Litho status report 5/2 In-Reply-To: <64329db3-942b-4e0d-bb16-371983fc5ee5@Gary-PC> Message-ID: <86cfaa25-bd36-4603-b3ca-c69c8be398d8@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, May 02, 2012 Reported Problems SVG Dev-Problem: User "dongrip" reports thad developer is making a loud noise SVG Dev2- Problem: User "ysohn" reports a send indexer problem Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Up for frontside align only. 3D calibration still needs to be done by ASML Photolithography Area Status Wednesday, May 02, 2012 General Information / Lab Activities New oven to replace "White Oven" New ship date from Oregon is 5/4. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Frontside align only 3 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Making noise 1 SVGDEV2 PROBLEM Sender problem 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 5/4 6 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu May 3 07:25:48 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 3 May 2012 07:25:48 -0700 (PDT) Subject: Morning Litho status report 5/3 In-Reply-To: <52c10144-334b-40f2-99e8-310ecf291cfb@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Thursday, May 03, 2012 Reported Problems SVGDEV-Problem: "User jparker" reports a high pitch noise at 5K spin speed ASML Stepper-User "maxms" reports broken hinges on input port cover. Will replace hinges Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Up for frontside align only. 3D calibration/setup in progress by ASML Photolithography Area Status Thursday, May 03, 2012 General Information / Lab Activities New oven to replace "White Oven" New ship date from Oregon is 5/4. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Frontside align only 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Spindle noise at 5K 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 5/4 5 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri May 4 07:43:34 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 4 May 2012 07:43:34 -0700 (PDT) Subject: Morning Litho status report 5/4 In-Reply-To: <002e02d6-3076-468f-9e25-ebb6ae6f1b9f@Gary-PC> Message-ID: <8d9a4c58-2533-4675-93ee-e53d4af8365f@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, May 04, 2012 Reported Problems No new problems reported over night Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Friday, May 04, 2012 General Information / Lab Activities New oven to replace "White Oven" New ship date from Oregon is 5/4. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 1 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven shipping on 5/4 4 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue May 8 07:33:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 8 May 2012 07:33:11 -0700 (PDT) Subject: Morning Litho status report 5/8 In-Reply-To: Message-ID: <436a5ad6-d25b-4615-b37f-0dcdc88d2486@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, May 08, 2012 Reported Problems Headway- Problem: User "jackson" reports a spindle vacuum problem. Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Tuesday, May 08, 2012 General Information / Lab Activities Mario- Out today(5/8) New oven to replace "White Oven" has been delivered Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway PROBLEM Spindle vacuum 1 Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven arrived 3 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed May 9 07:51:37 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 9 May 2012 07:51:37 -0700 (PDT) Subject: Morning Litho status report 5/9 In-Reply-To: Message-ID: <6de82fbf-1e48-4844-b615-a0b6f5d62583@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, May 09, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Wednesday, May 09, 2012 General Information / Lab Activities New oven to replace "White Oven" has been delivered. Need to test and burn in before installation Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven arrived 2 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu May 10 07:22:38 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 10 May 2012 07:22:38 -0700 (PDT) Subject: Morning Litho status report 5/10 In-Reply-To: <2b592aeb-cb8f-4c86-8969-d56aef5a2d4b@Gary-PC> Message-ID: <06620db7-3522-4dff-89dd-4c03a3e274b8@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, May 10, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Thursday, May 10, 2012 General Information / Lab Activities New oven to replace "White Oven" has been delivered. Will begin installation today Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven arrived 2 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri May 11 07:46:23 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 11 May 2012 07:46:23 -0700 (PDT) Subject: Morning Litho status 5/11 In-Reply-To: Message-ID: <3f1f16e6-54cc-42cb-b375-28c4f8222d3c@Gary-PC> Good m0rning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks ... The Litho Team Photolithography Quick Snapshot Friday, May 11, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Friday, May 11, 2012 General Information / Lab Activities "White Oven" replacement to be released to users this afternoon. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven DOWN New oven to be released today 2 YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon May 14 07:49:29 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 14 May 2012 07:49:29 -0700 (PDT) Subject: Morning Litho status report 5/14 In-Reply-To: <982e4a5f-e63a-4fca-8b99-2c5e93b86896@Gary-PC> Message-ID: <6b73397d-b528-46bf-9008-587211050d59@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, May 14, 2012 Reported Problems Karl Suss-Problem: User "Jasonlin" reports X/Y micrometers not working. SVGCoat2-Problem: User "kokab" reports send indexer not working Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Monday, May 14, 2012 General Information / Lab Activities "White Oven" is now released to users. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 PROBLEM X/Y micrometer problem 1 Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Sender problem 2 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP Released for use YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue May 15 08:10:10 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 15 May 2012 08:10:10 -0700 (PDT) Subject: Morning Litho status 5/15 In-Reply-To: Message-ID: <4af70523-cdf5-4ee9-b692-2537df2f0d10@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, May 15, 2012 Reported Problems EVG Bonder-Down: Chamber not pumping down very well. Troubleshooting in progress SVGDEV-Problem: User "kavehm" reports a problem at the bake station Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. Photolithography Area Status Tuesday, May 15, 2012 General Information / Lab Activities "White Oven" is now released to users. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Bake plate problem 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP Released for use YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed May 16 07:45:02 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 16 May 2012 07:45:02 -0700 (PDT) Subject: Morning Litho status report 5/16 In-Reply-To: <8c7cc64a-ad21-4f6a-b800-4bfd4ab7f0bc@Gary-PC> Message-ID: <8c664c74-e3f5-4f43-838a-2f2bae8c5db9@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, May 16, 2012 Reported Problems No new problems Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Troubleshooting in progress Photolithography Area Status Wednesday, May 16, 2012 General Information / Lab Activities "White Oven" is now released to users. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP Released for use YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu May 17 07:32:41 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 17 May 2012 07:32:41 -0700 (PDT) Subject: Morning Litho status 5/17 In-Reply-To: <3b79c42b-b599-4983-85da-a0c01d302993@Gary-PC> Message-ID: <0a35ef53-4181-4dd8-b9a0-90ad0fdb6faf@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, May 17, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum valves-OK. Still troubleshooting the system Photolithography Area Status Thursday, May 17, 2012 General Information / Lab Activities "White Oven" is now released to users. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP Released for use YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri May 18 07:06:19 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 18 May 2012 07:06:19 -0700 (PDT) Subject: Morning Litho status 5/18 In-Reply-To: <7c5f4e42-6cd9-45ff-be3b-9f75d72cbb5b@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, May 18, 2012 Reported Problems No new problems reported overnight Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum valves-OK. Still troubleshooting the system. Trying to isolate the chamber from the vacuum manifold. In progress Photolithography Area Status Friday, May 18, 2012 General Information / Lab Activities "White Oven" is now released to users. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP Released for use YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon May 21 07:34:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 21 May 2012 07:34:11 -0700 (PDT) Subject: Morning Litho status report 5/21 In-Reply-To: <9f59ac0a-49d8-4f00-be5f-620920bfeb68@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, May 21, 2012 Reported Problems No new problems reported over the Weekend Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum valves-OK. Still troubleshooting the system. Trying to isolate the chamber from the vacuum manifold. Determined that vacuum problem is not in the chamber. Continuing to troubleshoot the vacuum manifold. Photolithography Area Status Monday, May 21, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue May 22 08:17:51 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 22 May 2012 08:17:51 -0700 (PDT) Subject: Morning Litho status 5/22 In-Reply-To: <37f618b7-15f4-4162-825c-d4035dbf6d59@Gary-PC> Message-ID: <60891fc5-ab17-4d91-aa28-96c5e618d5d4@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, May 22, 2012 Reported Problems No new problems reported over night Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 reists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum valves-OK. Still troubleshooting the system. Trying to isolate the chamber from the vacuum manifold. Determined that vacuum problem is not in the chamber. Continuing to troubleshoot the vacuum manifold. Also contacting EVG for technical support Photolithography Area Status Tuesday, May 22, 2012 General Information / Lab Activities ASML Stepper- Day 1 of Quarterly PM begins today Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed May 23 07:45:46 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 23 May 2012 07:45:46 -0700 (PDT) Subject: Morning Litho status 5/23 In-Reply-To: Message-ID: Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Wednesday, May 23, 2012 Reported Problems No new problems reported over night Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum valves-OK. Still troubleshooting the system. Trying to isolate the chamber from the vacuum manifold. Determined that vacuum problem is not in the chamber. Continuing to troubleshoot the vacuum manifold. Also contacting EVG for technical support Photolithography Area Status Wednesday, May 23, 2012 General Information / Lab Activities ASML Stepper- Day 2 of Quarterly PM continues today Exposure Tools Status Comments Priority ASML Stepper DOWN Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu May 24 08:44:02 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 24 May 2012 08:44:02 -0700 (PDT) Subject: Morning Litho status 5/24 In-Reply-To: Message-ID: <6809b1ef-4b7f-4f33-9fe7-5026e52bd7c7@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, May 24, 2012 Reported Problems No new problems reported over night Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Chamber not pumping down very well. Tested vacuum manifold-OK Determined that the vacuum transmitter is at fault and needs replacement. Will re-assemble system and install an alternate transmitter and digital gauge in parallel, while we order a replacement. Photolithography Area Status Thursday, May 24, 2012 General Information / Lab Activities ASML Stepper- Day 3 of Quarterly PM continues today Exposure Tools Status Comments Priority ASML Stepper DOWN Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Not pumping down 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri May 25 08:03:18 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 25 May 2012 08:03:18 -0700 (PDT) Subject: Morning Litho status 5/25 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, May 25, 2012 Reported Problems Coral is down. Cannot report current status Problem Updates ( > 24 Hrs ) ASML Stepper-Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder-Down: Ordered new vacuum pressure transmitter. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. New problem is that bottom heater is not working. Troubleshooting in progress. Photolithography Area Status Friday, May 25, 2012 General Information / Lab Activities ASML Stepper- Day 4 of Quarterly PM continues today. BSA calibrations to be done today Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Tue May 29 07:22:45 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Tue, 29 May 2012 07:22:45 -0700 (PDT) Subject: Litho Morning Daily Report 5/29/2012 In-Reply-To: <1168707785.141581427.1338301318893.JavaMail.root@zm05.stanford.edu> Message-ID: <177154050.141582247.1338301365642.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 25291 bytes Desc: not available URL: From vilanova at stanford.edu Wed May 30 08:44:51 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Wed, 30 May 2012 08:44:51 -0700 (PDT) Subject: Daily Litho AM Report 5/30/12 In-Reply-To: <940265958.143496570.1338392642237.JavaMail.root@zm05.stanford.edu> Message-ID: <1361968007.143498246.1338392691631.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 25245 bytes Desc: not available URL: From gsosa at stanford.edu Thu May 31 08:06:04 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 31 May 2012 08:06:04 -0700 (PDT) Subject: Morning Litho status 5/31 In-Reply-To: Message-ID: Good morning All Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, May 31, 2012 New Issues N/A Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed for repair by ASML. EVG Bonder -Down: Ordered new vacuum pressure transmitter. Installed Piranni guage and digital readout in parallel as workaround until replacement transmitter arrives and is installed. Chamber pumps down to the mid -4 range. New problem is that bottom heater is not working. Troubleshooting in progress. Also receiving assistance from EVG AFM -Problem: User "ahazeghi" reports a poor image problem Resolved Issues Photolithography Area Status Thursday, May 31, 2012 General Information / Lab Activities Mahnaz- LOA( 5/31 - ??? ) Exposure Tools Status Comments Priority ASML Stepper PROBLEM Do not expose thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM PROBLEM Poor image Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Bottom heater problem 1 KSBonder UP KSCoat PROBLEM Wafer handling Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: