Morning Litho status 5/31

[Gary J Sosa]

Good morning All 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Thursday, May 31, 2012 
	
New Issues 	
	
	
	

	
N/A 
	

	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um 
	
and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed 
	
for repair by ASML. 
	
EVG Bonder -Down: Ordered new vacuum pressure transmitter. Installed Piranni guage and 
	
digital readout in parallel as workaround until replacement transmitter arrives and is installed. 
	
Chamber pumps down to the mid -4 range. New problem is that bottom heater is not working. 	

	
Troubleshooting in progress. Also receiving assistance from EVG 
	
AFM -Problem: User "ahazeghi" reports a poor image problem 	

	
	
	
	
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	

	

	
	
	
	
	

	
	
	
	
	

	

	

	
Photolithography Area Status 	
	
Thursday, May 31, 2012 
	
General Information / Lab Activities 	
	
	

	
Mahnaz- LOA( 5/31 - ??? ) 
	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
Do not expose thick resist 	
2 
	
EVAlign 	
PROBLEM 	
Intermittent joystick issue 	
3 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
PROBLEM 	
Poor image 	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
DOWN 	
Bottom heater problem 	
1 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Wafer handling 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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