From gsosa at stanford.edu Thu Nov 1 07:46:46 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 1 Nov 2012 07:46:46 -0700 (PDT) Subject: Morning Litho status 11/1 In-Reply-To: <43ece41c-a0c3-41dd-84c1-23ac5f9ba7df@Gary-PC> Message-ID: <2340db4c-38be-4c40-84fe-882124e395ae@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, November 01, 2012 New Issues Karl Suss Aligner 1 - Problem: User "kangjuhy" reports that power densities read Zero on lamp power supply. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Just head unit needs replacement. New pump delivered 10/31. Resolved Issues Photolithography Area Status Thursday, November 01, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 3 EVAlign PROBLEM Intermittent joystick problem EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Power reads Zero 1 Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Coolant flow problem 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Nov 2 07:26:24 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 2 Nov 2012 07:26:24 -0700 (PDT) Subject: Morning Litho status 11/2 In-Reply-To: Message-ID: <6ccfb009-6bba-46c8-bbe4-88a0a1a627b8@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, November 02, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Just head unit needs replacement. New pump delivered ready for re-install Resolved Issues Karl SussAligner 1 - Problem: User "kangjuhy" reports that power densities read Zero on lamp power supply. No problem found. Photolithography Area Status Friday, November 02, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 5 07:46:17 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 5 Nov 2012 07:46:17 -0800 (PST) Subject: Morning Litho status 11/5 In-Reply-To: <6d701c46-add1-435d-8f2a-398f995d2ae7@Gary-PC> Message-ID: <5574198a-1975-4ce1-87f7-7d6bfb7211c1@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status Thanks.. The Litho Team Photolithography Quick Snapshot Monday, November 05, 2012 New Issues Laurel R- Problem: User "kcbalram" reports a broken wafer in process bowl. SVGCoat- Problem: User "popomoo" reports 3612 resist not dispensing Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation this week but depends on ASML's available resources. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues Photolithography Area Status Monday, November 05, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) EVG Bonder- Changing pressure plate from Quartz to Steel today(11/5) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 5 EVAlign PROBLEM Intermittent joystick problem EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel PROBLEM Broken wafer 1 Coaters Process Status SVGCoat 3612 Process Problem Not dispensing 2 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Coolant flow problem Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Nov 6 07:35:43 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 6 Nov 2012 07:35:43 -0800 (PST) Subject: Morning Litho status 11/6 In-Reply-To: <060257be-8f80-420f-b887-a6fc101ca79a@Gary-PC> Message-ID: <00e76645-092a-4026-a9f9-972885bfb17d@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, November 06, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Purge hood re-installation scheduled for today(11/6) YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues Laurel R- Problem: User "kcbalram" reports a broken wafer in process bowl. Cleaned up process bowl and tested operation. SVGCoat- Problem: User "popomoo" reports 3612 resist not dispensing. Cleaned dispense arm guide rods and rails. Tested dispense arm movement and position. Photolithography Area Status Tuesday, November 06, 2012 General Information / Lab Activities Election Day- Don't forget to Vote Mahnaz - Vacation(10/29 - 11/13) Gary- Out at 12:30(11/6) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Nov 7 08:37:10 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 7 Nov 2012 08:37:10 -0800 (PST) Subject: Morning litho status 11/7 In-Reply-To: Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, November 07, 2012 New Issues ASML Stepper- Shutdown: system stabilizing after purge hood installation SVG Coat 2 - Problem: User "sclaussen" reports a vapor priming problem Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Purge hood re-installed 11/6. Tool stabilized overnight. Metrology setups to be performed YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues SVG Coat 2 - Problem: User "sclaussen" reports a vapor primming problem. Checked canister level-OK. Checked program-OK. Checked contact angle-OK Photolithography Area Status Wednesday, November 07, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Nov 8 08:09:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 8 Nov 2012 08:09:11 -0800 (PST) Subject: Morning Litho status 11/8 In-Reply-To: Message-ID: <1e761538-19ec-412a-a8fd-b0cab0b244b9@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Thursday, November 08, 2012 New Issues ASML Stepper- Shutdown: Room temperature at stepper location was 24.8 deg.C. as of 7:00PM. Stepper C&T in error for incoming air temperature too high. Shut down the C&T unit as per ASML advice to protect the C&T from overworking itself. Facilities group notified Old Issues- Ongoing YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues ASML Stepper- Purge hood re-installed and tested. Tool released for thick resist processing Photolithography Area Status Thursday, November 08, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper DOWN Room temperature- Hot 1 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Nov 9 07:25:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 9 Nov 2012 07:25:26 -0800 (PST) Subject: Morning Litho status 11/9 In-Reply-To: <0c8f953c-0748-44a4-9358-aba57341dfe0@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, November 09, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Shutdown: Room temperature at stepper location was 24.8 deg.C. On Wednesday. Facilities corrected problem with temperature. Stepper C&T re-started Thursday(am). System still not stable by Thursday(PM). System alllowed to stabilize overnight. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues ASML Stepper- Purge hood re-installed and tested. Tool released for thick resist processing Photolithography Area Status Friday, November 09, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper DOWN Room temperature- Hot 1 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Nov 12 07:42:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 12 Nov 2012 07:42:26 -0800 (PST) Subject: Morning Litho status 11/12 In-Reply-To: <6db6d2e4-bb2e-4f38-bcbb-99dd8213370f@Gary-PC> Message-ID: <47de2d8d-2cd8-4a22-a1c0-9eba7a2a6d38@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Monday, November 12, 2012 New Issues None over the Weekend- Old Issues- Ongoing YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Making plans to have chamber repaired over the annual Stanford shutdown at the end of the year. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. Resolved Issues ASML Stepper- Shutdown: Room temperature at stepper location was 24.8 deg.C. On Wednesday. Facilities corrected problem with temperature. Stepper not stable til Friday(11/9)am. Focus checked and adjusted. Daily qual performed-OK. Tool released Friday @ 5:30pm Photolithography Area Status Monday, November 12, 2012 General Information / Lab Activities Mahnaz - Vacation(10/29 - 11/13) Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittent joystick problem 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Coolant flow problem 3 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: