Morning Litho status 11/6

Gary J Sosa gsosa at stanford.edu
Tue Nov 6 07:35:43 PST 2012


Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Tuesday, November 06, 2012 
	
New Issues 	
	
	
	

	
None- 
	

	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper- Purge hood removed again due to contamination issue and damage to 
	
wafer table optics. The following process restrictions are in effect: 1- No thick resist processing 
	
(3.0 microns and above) until further notice. Purge hood re-installation scheduled for today(11/6) 
	

	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck 
	
on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. 
	
KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need 
	
to check 3", 5" 6" and 8" wafer sized and re-teach as needed. 
	

	
KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated 
	
and found the water pump to be bad. Motor is OK. Water pump replaced on 11/2. Good water 
	
flow. Cannot reach setpoint of 21 degrees C.. Suspect bad chiller. Will investigate further. 
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	
Laurel R- Problem: User "kcbalram" reports a broken wafer in process bowl. Cleaned up 
	
process bowl and tested operation. 
	
SVGCoat- Problem: User "popomoo" reports 3612 resist not dispensing. Cleaned dispense arm 
	
guide rods and rails. Tested dispense arm movement and position. 
	

	

	

	

	

	
Photolithography Area Status 	
	
Tuesday, November 06, 2012 
	
General Information / Lab Activities 	
	
	

	
Election Day- Don't forget to Vote 
	
Mahnaz - Vacation(10/29 - 11/13) 
	
Gary- Out at 12:30(11/6) 
	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
No thick resist processing 	
2 
	
EVAlign 	
PROBLEM 	
Intermittent joystick problem 	
5 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
1 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
3 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Coolant flow problem 	
4 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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