From gsosa at stanford.edu Mon Oct 1 08:05:35 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 1 Oct 2012 08:05:35 -0700 (PDT) Subject: Morning Litho status 10/1 In-Reply-To: Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, October 01, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. SVG Dev2- Problem User "bchui" reports that developer freezes during processing of wafers. Intermittant problem. Will order a new air cylinder for the shroud up/down function Resolved Issues Photolithography Area Status Monday, October 01, 2012 General Information / Lab Activities Mahnaz- Out 10/1 and 10/2 Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Freezes during operation 2 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 2 08:16:57 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 2 Oct 2012 08:16:57 -0700 (PDT) Subject: Morning Litho status 10/2 In-Reply-To: <9aa06679-3ce4-4c44-b28a-4587836f3a13@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Tuesday, October 02, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues SVG Dev2- Problem User "bchui" reports that developer freezes during processing of wafers. Intermittant problem. Cleaned and lubed mechanism for shield up/down motion Photolithography Area Status Tuesday, October 02, 2012 General Information / Lab Activities Mahnaz- Out 10/1 and 10/2 YES Oven : Badger box installation and testing Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 3 07:50:30 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 3 Oct 2012 07:50:30 -0700 (PDT) Subject: Morning Litho status 10/3 In-Reply-To: Message-ID: <2b1b29f2-e5ab-49f3-a962-a1426abab934@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, October 03, 2012 New Issues Woolam- Problem: User "eldwin" reports problem with aligning sample. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependent on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Wednesday, October 03, 2012 General Information / Lab Activities YES Oven : Badger box installed, activated and tested OK. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam PROBLEM Cannot align sample 1 Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 4 07:36:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 4 Oct 2012 07:36:31 -0700 (PDT) Subject: Morning Litho status 10/4 In-Reply-To: <5614b8d9-46e5-432e-af55-7e9054bf870d@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool update and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, October 04, 2012 New Issues ASML Stepper- Problem: User "eperalta" reports that the software locked up during job editing Zygo - Problem: User "lindaw" reports that CD drive not working Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Woolam- Problem: User "eldwin" reports problem with aligning sample. Mechanics reset by EM Photolithography Area Status Thursday, October 04, 2012 General Information / Lab Activities YES Oven : Badger box installed, activated and tested OK. Exposure Tools Status Comments Priority ASML Stepper PROBLEM Software frozen 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD drive not working 2 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 5 08:00:19 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 5 Oct 2012 08:00:19 -0700 (PDT) Subject: Morning Litho status 10/5 In-Reply-To: Message-ID: Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, October 05, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues ASML Stepper- Problem: User "eperalta" reports that the software locked up during job editing. Rebooted the ASML application software. Zygo - Problem: User "lindaw" reports that CD drive not working. Rebooted computer and tested the CD burner software- OK Photolithography Area Status Friday, October 05, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 8 07:21:54 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 8 Oct 2012 07:21:54 -0700 (PDT) Subject: Morning Litho staus 10/8 In-Reply-To: <0416523f-3b11-4620-a6ab-4ad16c782014@Gary-PC> Message-ID: <14143ef1-f198-4a57-a3b3-f5e55ce8c5ce@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, October 08, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Monday, October 08, 2012 General Information / Lab Activities Mahnaz - In at 9:00am(10/8) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 9 07:44:36 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 9 Oct 2012 07:44:36 -0700 (PDT) Subject: Morning Litho status 10/9 In-Reply-To: <5bae288b-65cf-4129-ad1e-5bd6b4fd9093@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, October 09, 2012 New Issues Zygo- Problem: User "lindaw" reports that CD burner not working Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Tuesday, October 09, 2012 General Information / Lab Activities Mario - Out today(10/9) ASML Stepper - Day 1 of Monthly PM Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Burner not writing 3 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Wed Oct 10 06:59:17 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Wed, 10 Oct 2012 06:59:17 -0700 (PDT) Subject: Litho Area Daily AM Report 10/10/2012 In-Reply-To: <1420286498.12042228.1349877511658.JavaMail.root@zm05.stanford.edu> Message-ID: <725401044.12043131.1349877557128.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 27807 bytes Desc: not available URL: From gsosa at stanford.edu Thu Oct 11 07:57:44 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 11 Oct 2012 07:57:44 -0700 (PDT) Subject: Morning Litho status 10/11 In-Reply-To: <151c485c-f224-489a-82e4-e207b2d3873f@Gary-PC> Message-ID: <3807de7a-9ef6-45eb-b6e4-99226b06e704@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, October 11, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Zygo- Problem: User "lindaw" reports that CD burner not working. CD burner works with CD-R disks but not CD-RW disks. Resolved Issues Photolithography Area Status Thursday, October 11, 2012 General Information / Lab Activities EVG Bonder - Installing Quartz plate today Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo PROBLEM CD Burner not writing 4 Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Fri Oct 12 06:40:45 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Fri, 12 Oct 2012 06:40:45 -0700 (PDT) Subject: Litho AM Daily Report 10/12/2012 In-Reply-To: <1120719016.15359433.1350049240620.JavaMail.root@zm05.stanford.edu> Message-ID: <340672972.15359462.1350049245071.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 27995 bytes Desc: not available URL: From gsosa at stanford.edu Mon Oct 15 07:54:08 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 15 Oct 2012 07:54:08 -0700 (PDT) Subject: Morning Litho status 10/15 In-Reply-To: <6c3013e7-ac68-4132-8593-b3df8ef5ee4f@Gary-PC> Message-ID: <521c9dad-f037-4069-ae09-4d47f4f43155@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, October 15, 2012 New Issues EVG Spraycoater- User "jackson" reports that the system needs a new registration code. will request a new code from EVG ASAP. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. EV Align- Shutdown: Cannot focus and mask and wafer at the same time. Troubleshooting in progress, Woolam- Problem: User "ksbalram" reports spots on stage. Resolved Issues Photolithography Area Status Monday, October 15, 2012 General Information / Lab Activities ASML Stepper- 3D align not calibrated. Do not use for Back-side align. Will be calibrated this week by ASML Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 5 EVAlign DOWN Mask/wafer focus 1 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat DOWN Registration code 2 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 4 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam PROBLEM Spots on stage 3 Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Oct 18 07:40:03 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 18 Oct 2012 07:40:03 -0700 (PDT) Subject: Morning Litho status 10/18 In-Reply-To: <700388a1-e0b7-4ab1-b4bb-ec3f290e8370@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, October 18, 2012 New Issues SVG DEV1 - Problem: User "fpurkl" reports a wafer transfer problem from hotplate. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. EVG Spraycoater- User "jackson" reports that the system needs a new registration code. Request submitted. Following up with EVG on requested keycode. Resolved Issues SVG Coat2 - Problem: Intermittent issue with chuck moving to top position. Replaced the spindle position air cylinder Photolithography Area Status Thursday, October 18, 2012 General Information / Lab Activities ASML Stepper- 3D align not calibrated. Do not use for Back-side align. Will be calibrated this week by ASML. Tentatively scheduled for 10/18 Mahnaz- Out at 1:40pm(10/18) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 4 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat DOWN Registration code 1 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Wafer transfer 2 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 19 07:48:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 19 Oct 2012 07:48:31 -0700 (PDT) Subject: Morning Litho status 10/19 In-Reply-To: <0359f587-97a2-4fa6-9344-2ee18803c11e@Gary-PC> Message-ID: <53a7bcf0-9dff-411f-87dd-b5153404b0a6@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, October 19, 2012 New Issues SVG Coat1- Problem: User "bchui" reports that 220-7 resist is not dispensing. ASML Stepper- Problem: Edge sensor on pre-aligner having issues detecting the edges on Glass/Quartz wafers. ASML F/S notified on 10/18. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependent on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. EVG Spraycoater- User "jackson" reports that the system needs a new registration code. Request submitted. Will get the keycode today as per EVG F/S manager. SVG DEV1 - Problem: User "fpurkl" reports a wafer transfer problem from hotplate. Tested OK Resolved Issues Photolithography Area Status Friday, October 19, 2012 General Information / Lab Activities ASML Stepper- 3D align calibrated 10/18 by ASML. OK for BSA Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 4 EVAlign PROBLEM Intermittent joystick problem 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat DOWN Registration code 2 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Problem Not dispensing 1 SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 22 07:54:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 22 Oct 2012 07:54:31 -0700 (PDT) Subject: Morning Litho status 10/22 In-Reply-To: Message-ID: <176053e7-70fd-48ca-8d02-9fcc9436e0d8@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status . Thanks.... The Litho Team Photolithography Quick Snapshot Monday, October 22, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Possible re-installation within the next 2 weeks but dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. EVG Spraycoater- User "jackson" reports that the system needs a new registration code. Request submitted. Will get the keycode today as per EVG F/S manager. Resolved Issues SVG Coat1- Problem: User "bchui" reports that 220-7 resist is not dispensing. Reset the pump controller. ASML Stepper- Problem: Edge sensor on pre-aligner having issues detecting the edges on Glass/Quartz wafers. ASML F/S adjusted the edge sensor and verified with several samples EVG Spraycoater- User "jackson" reports that the system needs a new registration code. Request submitted. Key-code entered to activate software. System tested OK. Photolithography Area Status Monday, October 22, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 23 07:53:42 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 23 Oct 2012 07:53:42 -0700 (PDT) Subject: Morning Litho status 10/23 In-Reply-To: <004c2827-b3e6-40f1-bbec-6b168454bd3f@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Tuesday, October 23, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Tuesday, October 23, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 24 07:36:49 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 24 Oct 2012 07:36:49 -0700 (PDT) Subject: Morning Litho status 10/24 In-Reply-To: <29003db1-6808-4871-a739-f3bbcc716170@Gary-PC> Message-ID: <1e59d190-2a5d-4a24-bfe6-22d3512b34b0@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, October 24, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Wednesday, October 24, 2012 General Information / Lab Activities Campus Cleanup Tomorrow(10/25)! Uli- Vacation(10/24 - 10/31) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Oct 26 08:07:30 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 26 Oct 2012 08:07:30 -0700 (PDT) Subject: Morning Litho status 10/26 In-Reply-To: <77c52ade-899f-471b-b4ba-03c97e659856@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, October 26, 2012 New Issues Karl Suss Align2- Problem: User "lindaw" reports a lamp power supply problem EVG Spraycoate r- Problem: User "jackson" reports an interlock error preventing the tool to run Nanospec 2- Problem: User "ludwig" reports the screen is frozen Karl Suss Coater- Problem: User "lindaohara" reports a coolant water flow problem. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Friday, October 26, 2012 General Information / Lab Activities Uli- Vacation(10/24 - 10/31) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing EVAlign PROBLEM Intermittent joystick problem EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 PROBLEM Lamp power supply 3 Manual Coaters Status EVGSpraycoat PROBLEM Interlock issue 1 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 5 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho PROBLEM Screen frozen 2 Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat PROBLEM Coolant flow problem 4 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Oct 29 07:38:59 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 29 Oct 2012 07:38:59 -0700 (PDT) Subject: Morning Litho status 10/29 In-Reply-To: Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, October 29, 2012 New Issues None over the Weekend Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-installation still not decided yet, and is dependent on ASML's available resources YES Oven- Intermittent pump down problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Just head unit needs replacement. Advised ASML with pricing and vendor information. Resolved Issues Karl Suss Align2- Problem: User "lindaw" reports a lamp power supply problem. Replaced and set up new UV lamp. EVG Spraycoate r- Problem: User "jackson" reports an interlock error preventing the tool to run. The clean-counter was at 0. Reset back to 200 wafers. Nanospec 2- Problem: User "ludwig" reports the screen is frozen. System reset and checked out. Photolithography Area Status Monday, October 29, 2012 General Information / Lab Activities Uli- Vacation(10/24 - 10/31) Mahnaz - Vacation(10/29 - 11/13) EVG Bonder- Changing pressure plate today from Quartz to Steel Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Oct 30 08:01:18 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 30 Oct 2012 08:01:18 -0700 (PDT) Subject: Morning Litho status 10/30 In-Reply-To: <02ed269f-29fe-4765-91ce-3e2c067345c4@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, October 30, 2012 New Issues None Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Just head unit needs replacement. Advised ASML with pricing and vendor information. Resolved Issues Photolithography Area Status Tuesday, October 30, 2012 General Information / Lab Activities Uli- Vacation(10/24 - 10/31) Mahnaz - Vacation(10/29 - 11/13) Scheduled electrical panel work- Zygo, Woolam, Prometrix and Leica Scope powered down until work is completed. Expected time to complete is 9:00am Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix DOWN Scheduled electrical work P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam DOWN Scheduled electrical work Zygo DOWN Scheduled electrical work Microscpoes- #1 Leica/ DOWN Scheduled electrical work #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Oct 31 07:48:33 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 31 Oct 2012 07:48:33 -0700 (PDT) Subject: Morning Litho status 10/31 In-Reply-To: Message-ID: <7711fc61-b98e-47cb-8c50-de3df1792831@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Wednesday, October 31, 2012 New Issues None Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, and is dependant on ASML's available resources YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. KS Coat- Problem: User "lindaohara" reports a coolant water flow problem. Investigated and found the water pump to be bad. Motor is OK. Just head unit needs replacement. New pump is en-route for delivery today. Resolved Issues Photolithography Area Status Wednesday, October 31, 2012 General Information / Lab Activities Uli- Vacation(10/24 - 10/31) Mahnaz - Vacation(10/29 - 11/13) Mario - Out(PTO) 10/31 EVG Bonder - Changing pressure plate from "Steel " to "Quartz " today(10/31) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick problem 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Coolant flow problem 5 Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: