Morning Litho status 10/26

Gary J Sosa gsosa at stanford.edu
Fri Oct 26 08:07:30 PDT 2012


Good morning All.... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks.. The Litho Team 

	
Photolithography Quick Snapshot 	
	
Friday, October 26, 2012 
	
New Issues 	
	
	
	

	
Karl Suss Align2- Problem: User "lindaw" reports a lamp power supply problem 
	
EVG Spraycoate r- Problem: User "jackson" reports an interlock error preventing the tool to run 
	
Nanospec 2- Problem: User "ludwig" reports the screen is frozen 
	
Karl Suss Coater- Problem: User "lindaohara" reports a coolant water flow problem. 
	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper- Purge hood removed again due to contamination issue and damage to 	

	
wafer table optics. The following process restrictions are in effect: 1- No thick resist processing 
	
(3.0 microns and above) until further notice. Timing of re-instalation still not decided yet, 
	
and is dependant on ASML's available resources 	
	
	

	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performed a leakcheck 
	
on 9/28). Identified a leak in the chamber( rear/lower right corner). Investigating options. 
	
KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need 
	
to check 3", 5" 6" and 8" wafer sized and re-teach as needed. 
	

	

	

	

	

	
	
	
	
	

	
Resolved Issues 	
	
	

	

	

	

	
	
	
	
	

	

	

	

	

	

	
Photolithography Area Status 	
	
Friday, October 26, 2012 
	
General Information / Lab Activities 	
	
	

	
Uli- Vacation(10/24 - 10/31) 
	

	
	
	
	
	

	
	
	
	
	

	
	
	
	
	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
No thick resist processing 	

	
EVAlign 	
PROBLEM 	
Intermittent joystick problem 	

	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
Lamp power supply 	
3 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
PROBLEM 	
Interlock issue 	
1 
	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
5 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
PROBLEM 	
Screen frozen 	
2 
	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	

	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Coolant flow problem 	
4 
	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	


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