From gsosa at stanford.edu Tue Sep 4 07:17:16 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 4 Sep 2012 07:17:16 -0700 (PDT) Subject: Morning Litho status 9/4 In-Reply-To: <98e14ff9-5329-48e7-953e-25405e577d8e@Gary-PC> Message-ID: <1e706417-d323-434f-96a2-33431e77ffee@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks..... The Litho Team Photolithography Quick Snapshot Tuesday, September 04, 2012 New Issues EVBonder - Problem: User "jaehlee" reports that megasonics cleaner is not working Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The current plan is to install the purge/extraction hood during the next monthly PM. The PM is tentatively scheduled for 9/11 - 9/13. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues ASML Stepper- Shutdown: User "eldwin" reports a wafer stuck in the stepper. Failed transfer from Port 4 to robot arm due to vacuum error. Removed stranded wafers. Tested system-OK SVG Dev2- Problem: User "wmtang" reports track not starting when pressing start button. Unable to reproduce problem. Suspect either track was not enabled or system in manual mode. Photolithography Area Status Tuesday, September 04, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Megasonic cleaner not working 1 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Sep 5 07:51:01 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 5 Sep 2012 07:51:01 -0700 (PDT) Subject: Morning Litho status 9/5 In-Reply-To: <7783ea1f-306a-4484-9505-7ef50015831a@Gary-PC> Message-ID: <3f345d78-e986-4cfb-85ac-521a50d86963@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, September 05, 2012 New Issues None reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The current plan is to install the purge/extraction hood during the next monthly PM. The PM is tentatively scheduled for 9/11 - 9/13. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues EVBonder - Problem: User "jaehlee" reports that megasonics cleaner is not working. Reset the megasonics controller. Tested OK. Photolithography Area Status Wednesday, September 05, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Sep 6 07:31:26 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 6 Sep 2012 07:31:26 -0700 (PDT) Subject: Morning Litho status 9/6 In-Reply-To: <31bd6a19-809c-4ca7-a006-93cb2e168dd2@Gary-PC> Message-ID: <21e80392-be30-435a-849a-256f4480b52d@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, September 06, 2012 New Issues SVGDEV1 - Problem: User "bclee79" reports wafer broke in process bowl Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The current plan is to install the purge/extraction hood during the next monthly PM. The PM is tentatively scheduled for 9/11 - 9/13. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Thursday, September 06, 2012 General Information / Lab Activities Mahnaz : Out at 1:20(9/6) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 3 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV PROBLEM Broken wafer 1 SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Sep 7 07:57:13 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 7 Sep 2012 07:57:13 -0700 (PDT) Subject: Morning Litho status 9/7 In-Reply-To: <44313ce6-1ecf-489e-80bf-2a54f49ecb79@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, September 07, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The current plan is to install the purge/extraction hood during the next monthly PM. The PM is tentatively scheduled for 9/11 - 9/13. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues SVGDEV1 - Problem: User "bclee79" reports wafer broke in process bowl. Cleaned up process bowl. Checked chuck vacuum-OK. Checked and replaced the carriage control PC board. Full system test- OK. Photolithography Area Status Friday, September 07, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Sep 10 07:46:17 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 10 Sep 2012 07:46:17 -0700 (PDT) Subject: Morning Litho status 9/10 In-Reply-To: <2a8b5085-39de-4db5-9a51-f80588d0b6f8@Gary-PC> Message-ID: <6418c59e-5df1-4459-978c-7945eafefc46@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, September 10, 2012 New Issues No new issues reported over the Weekend Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The current plan is to install the purge/extraction hood during the next monthly PM. The PM is tentatively scheduled for 9/11 - 9/13. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Monday, September 10, 2012 General Information / Lab Activities Mahnaz - In at 9:20am(9/10) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist processing 2 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Tue Sep 11 06:43:55 2012 From: vilanova at stanford.edu (Eddy M Vilanova) Date: Tue, 11 Sep 2012 06:43:55 -0700 (PDT) Subject: Litho Area AM Daily Report 09/11/2012 In-Reply-To: <787133062.18328876.1347371009266.JavaMail.root@zm05.stanford.edu> Message-ID: <2002176540.18329008.1347371035043.JavaMail.root@zm05.stanford.edu> A non-text attachment was scrubbed... Name: Litho Report # 2.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 27520 bytes Desc: not available URL: From gsosa at stanford.edu Wed Sep 12 07:43:48 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 12 Sep 2012 07:43:48 -0700 (PDT) Subject: Morning Litho status 9/12 In-Reply-To: Message-ID: <46d2d6e4-1e29-4f16-ba0d-4a64b3d89abe@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, September 12, 2012 New Issues ASML Stepper - Shutdown: User "kavhm" reports a level sensor fault. ASML F/S will be in this morning to address the problem and continue with PM Old Issues- Ongoing ASML Stepper -Problem: Process restriction - Do not expose any wafers with thick resist, 3.0um and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been repaired and is onsite. The purge hood is currently being installed and setup during the monthly PM which in in progress now. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Wednesday, September 12, 2012 General Information / Lab Activities ASML Stepper- Day 2 of monthly PM continues today(9/12) Exposure Tools Status Comments Priority ASML Stepper DOWN Level sensor fault 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Sep 13 07:43:31 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 13 Sep 2012 07:43:31 -0700 (PDT) Subject: Morning Litho status 9/13 In-Reply-To: Message-ID: <45df80f2-a8ad-4a31-8312-5efb9495e289@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, September 13, 2012 New Issues No new issues reported overnight Old Issues- Ongoing YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues ASML Stepper - Shutdown: User "kavhm" reports a level sensor fault. ASML F/S will be in this morning to address the problem and continue with PM. Mounting problem with the purge/extraction hood caused level sensor errors. FSE's checked and re-shimmed the purge hood to correct the mounting problem. All necessary metrology tests/calibrations completed. The Stepper is released for all thick resist processing. Photolithography Area Status Thursday, September 13, 2012 General Information / Lab Activities Mahnaz- Out at 1:25pm(9/13) ASML Stepper- Day 3 of Monthly PM continues today(9/13) Exposure Tools Status Comments Priority ASML Stepper UP No Restrictions EVAlign PROBLEM Intermittent joystick issue 3 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 1 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 2 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Sep 14 07:48:44 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 14 Sep 2012 07:48:44 -0700 (PDT) Subject: Morning Litho status 9/14 In-Reply-To: <92cd5df2-df7f-4033-a2bf-0bf693d8eb4c@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Friday, September 14, 2012 New Issues ASML Stepper- Shutdown: User "wslee" reports that software locked up while editing a job. Also ASML needs to troubleshoot the wafer handling repeatability issue and calibrate 3D align system SVG Coat2 - Problem: User "faridz" reports that the spin coater is not sensing wafer. Old Issues- Ongoing YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Friday, September 14, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room) Exposure Tools Status Comments Priority ASML Stepper DOWN Software lockup 1 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Not sensing wafers 2 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Sep 17 07:51:55 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 17 Sep 2012 07:51:55 -0700 (PDT) Subject: Morning Litho status 9/17 In-Reply-To: <3f38b405-3e78-478c-94bd-83ed30b6b4aa@Gary-PC> Message-ID: <5ad62bdd-713a-4464-b641-36fc443106ec@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Monday, September 17, 2012 New Issues No new issues reported over the weekend Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations are performed. 3D calibration scheduled for Tuesday(9/18) YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues ASML Stepper- Shutdown: User "wslee" reports that software locked up while edditing a job. Also ASML needs to troubleshoot the wafer handling repeatability issue and calibrate 3D align system. Applications software reset to clear the lockup. Purge hood causing contamination problem and physical damage to critical optical components on wafer table. The purge hood was removed to prevent further damage SVG Coat2 - Problem: User "faridz" reports that the spin coater is not sensing wafer. The spindle was not reaching top position. Troubleshot and replaced the spindle Up/Down air cylinder. Photolithography Area Status Monday, September 17, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need to hook up vacuum line, Nitrogen and Electrical. Mahnaz - Out sick (9/17) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Sep 18 07:34:55 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 18 Sep 2012 07:34:55 -0700 (PDT) Subject: Morning Litho status 9/18 In-Reply-To: <2d70ede8-fa02-4803-904e-8e898a08109f@Gary-PC> Message-ID: <08ada82e-e5f0-4b9e-b5c7-e41fb5ea34ac@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, September 18, 2012 New Issues No new issues reported overnight Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations are performed. 3D calibration postponed. Date still to be determined. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Tuesday, September 18, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need to hook up vacuum line, Nitrogen and Electrical. Mahnaz - Out sick (9/18) EVG Bonder- Changing pressure plate from Quartz to Steel this morning ASML Stepper - 3D calibration postponed. Date still to be determined. Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 1 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 3 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Sep 19 07:59:41 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 19 Sep 2012 07:59:41 -0700 (PDT) Subject: Morning Litho status 9/19 In-Reply-To: Message-ID: <379ed381-1639-4ee2-962c-9595cc8cff2b@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.... The Litho Team Photolithography Quick Snapshot Wednesday, September 19, 2012 New Issues Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Rebooting and restoring system defaults does not help. Contacted Field Service for Tech Support or service call. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations are performed. 3D calibration posponed. Date still to be determined. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Photolithography Area Status Wednesday, September 19, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). System does not pump down very well. Troubleshooting in progress. ASML Stepper - 3D calibration posponed. Date still to be determined. EVG Bonder- Changing pressure plate from Steel to Quartz today(9/19) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch DOWN No keyboard response 1 Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Sep 20 07:46:27 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 20 Sep 2012 07:46:27 -0700 (PDT) Subject: Morning Litho status 9/20 In-Reply-To: <1a0bd24b-3fab-4efe-9b13-319ed6c7f4e7@Gary-PC> Message-ID: <0549ba12-0f46-42bd-83a6-340559d907c3@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, September 20, 2012 New Issues SVGDEV2- Problem : User "zguo" reports a problem with bake program 1. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations are performed. 3D calibration posponed. Date still to be determined. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Rebooting and restoring system defaults does not help. Field Service expected in today(9/20) at 10:00am Resolved Issues Photolithography Area Status Thursday, September 20, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). System does not pump down very well. Troubleshooting in progress. ASML Stepper - 3D calibration posponed. Date still to be determined. Mahnaz- Out at 1:20pm(9/20) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch DOWN No keyboard response 1 Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Sep 21 07:23:29 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 21 Sep 2012 07:23:29 -0700 (PDT) Subject: Morning Litho status 9/21 In-Reply-To: <8a26ff7e-0396-4f7e-b943-910ffe15e104@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status . Thanks.. The Litho Team Photolithography Quick Snapshot Friday, September 21, 2012 New Issues None Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations are performed. 3D calibration posponed. Date still to be determined. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Rebooting and restoring system defaults does not help. Field Service expected to return today with repaired controller. Resolved Issues SVGDEV2- Problem : User "zguo" reports a problem with bake program 1. Error in program corrected. Photolithography Area Status Friday, September 21, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). System does not pump down very well. Troubleshooting in progress. ASML Stepper - 3D calibration posponed. Date still to be determined. Mario- Out sick today(9/21) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 2 EVAlign PROBLEM Intermittent joystick issue 5 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch DOWN No keyboard response 1 Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Mon Sep 24 07:42:44 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 24 Sep 2012 07:42:44 -0700 (PDT) Subject: Morning Litho status 9/24 In-Reply-To: <8a7d2ad9-9a34-4521-8903-8ca6cbcb3952@Gary-PC> Message-ID: <06e7e222-981d-41c2-92ea-4655d590ae55@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, September 24, 2012 New Issues SVG Coat2- Problem: User "zzp" reports a chuck vacuum problem. SVG DEV2- Problem: User "zzp" reports that system is freezing with wafer on the chuck. Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Rebooting and restoring system defaults does not help. Field Service is repairing our computer at their service office. Resolved Issues Photolithography Area Status Monday, September 24, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need to plumb Argon to the tool. ASML Stepper - 3D align is up Mahnaz- In at 9:20am(9/24) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 5 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem Chuck vacuum problem 2 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM System freezing 3 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 4 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch DOWN No keyboard response 1 Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Tue Sep 25 07:48:11 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 25 Sep 2012 07:48:11 -0700 (PDT) Subject: Morning Litho status 9/25 In-Reply-To: <0f3936a0-b290-437d-bb87-0c279f6a0403@Gary-PC> Message-ID: Good morning All... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Tuesday, September 25, 2012 New Issues SVG Coat 1- User "kgc" reports wafer handling problems Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare vacuum controller expected to arrive today. Will install ASAP and test KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Rebooting and restoring system defaults does not help. Vendor completed repairs to computer. A time still to be determined for revisit and install/setup/calibration Resolved Issues SVG Coat2- Problem: User "zzp" reports a chuck vacuum problem. Checked and adjusted spin chuck top position height. Tested OK. SVG DEV2- Problem: User "zzp" reports that system is freezing with wafer on the chuck. Metal shroud not making top limit sensor. Replaced the solinoid for shroud up/down travel. Photolithography Area Status Tuesday, September 25, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need to plumb Argon to the tool. ASML Stepper - 3D align is up Mario- Out today(9/25) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 4 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Problem Wafer transfer 2 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 3 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch DOWN No keyboard response 1 Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Wed Sep 26 07:25:17 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 26 Sep 2012 07:25:17 -0700 (PDT) Subject: Morning Litho status 9/26 In-Reply-To: Message-ID: <3e0b7490-7fb4-45ac-b40c-255b33cd1337@Gary-PC> Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Wednesday, September 26, 2012 New Issues Prometrix- User "jperez" reports that disk is full. Unable to print data Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Installed the repaired spare vacuum controller(9/25). 11 pump/vent cycles with no abort. Will continue to monitor KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues SVG Coat 1- User "kgc" reports wafer handling problems. Cycled many wafers. Unable to reproduce problem Nanospec1(Etch)- Down: User "gsosa" reports that keyboard does not respond. Vendor re-installed repaired controller, calibrated and tested on 9/25 am. Photolithography Area Status Wednesday, September 26, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need to plumb Argon to the tool. ASML Stepper - 3D align is up Mario- Out today(9/26) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 3 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix PROBLEM Disk is full 1 P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Thu Sep 27 07:36:12 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Thu, 27 Sep 2012 07:36:12 -0700 (PDT) Subject: Morning Litho status 9/27 In-Reply-To: <4e3d48e6-1056-4f25-a787-be4592abe7dc@Gary-PC> Message-ID: <3a58f1c2-9dc4-45e5-afe8-c7423a84bfa1@Gary-PC> Good morning All.. Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks... The Litho Team Photolithography Quick Snapshot Thursday, September 27, 2012 New Issues None- Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor the system for worsening condition. Installed the repaired spare vacuum controller(9/25). 11 pump/vent cycles with no abort. Will continue to monitor KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Prometrix- User "jperez" reports that disk is full. Unable to print data. Need to replace full disk with a specially formatted disk. Resolved Issues Photolithography Area Status Thursday, September 27, 2012 General Information / Lab Activities Hummer Sputter Coater : Installation is completed in room L-106(Paul Jerabek Room). System needs final clean, target replacement and testing by JWC. ASML Stepper - 3D align is up Mario- Out today(9/27) Mahnaz - Out at 1:20pm(9/27) Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 3 EVAlign PROBLEM Intermittent joystick issue EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix PROBLEM Disk is full 1 P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 4 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Sep 28 07:05:15 2012 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 28 Sep 2012 07:05:15 -0700 (PDT) Subject: Morning Litho status 9/28 In-Reply-To: <777499e7-a301-495f-9bea-47ca5637086c@Gary-PC> Message-ID: Good morning All.... Here is the morning Litho status report. Please check back in Coral for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Friday, September 28, 2012 New Issues SVG Dev2- Problem User "bchui" reports that developer freezes during processing of wafers Old Issues- Ongoing ASML Stepper- Purge hood removed again due to contamination issue and damage to wafer table optics. The following process restrictions are in effect: 1- No thick resist processing (3.0 microns and above) until further notice. YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Performing a leakcheck of chamber today(9/28) KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need to check 3", 5" 6" and 8" wafer sized and re-teach as needed. Resolved Issues Prometrix- User "jperez" reports that disk is full. Unable to print data. New, formatted disk logged into system Photolithography Area Status Friday, September 28, 2012 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper PROBLEM No thick resist 3 EVAlign PROBLEM Intermittent joystick issue 4 EVAlign2 UP EVG-Imprint PROBLEM Tool idle til needed Karl Suss 1 UP Karl Suss 2 UP Manual Coaters Status EVGSpraycoat UP Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Up 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 PROBLEM Freezes during operation 1 Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime PROBLEM Intermittent vacuum problem 2 Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscpoes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond PROBLEM Clamps are stiff 5 KSBonder UP KSCoat PROBLEM Robot teaching Litho SRD UP Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: