Morning Litho status 9/17

Gary J Sosa gsosa at stanford.edu
Mon Sep 17 07:51:55 PDT 2012


Good morning All... 

Here is the morning Litho status report. 

Please check back in Coral for the latest tool updates and current equipment status. 

Thanks... The Litho Team 


	
Photolithography Quick Snapshot 	
	
Monday, September 17, 2012 
	
New Issues 	
	
	
	

	
No new issues reported over the weekend 
	

	

	

	

	
Old Issues- Ongoing 	
	
	

	
ASML Stepper- Purge hood removed again due to contamination issue and damage to 	

	
wafer table optics. The following process restrictions are in effect: 1- No thick resist processing 
	
(3.0 microns and above) until further notice, 2- No processing with 3D align until calibrations 
	
are performed. 3D calibration scheduled for Tuesday(9/18) 
	
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Continuing to monitor 
	
the system for worsening condition. Also need to make plans to leakcheck the chamber. Spare 
	
vacuum controller sent out for repair. Estimated turnaround time: 7 - 10 days 	

	
KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Still need 
	
to check 3", 5" 6" and 8" wafer sized and re-teach as needed. 
	

	
	
	
	
	

	
	
	
	
	

	
Resolved Issues 	
	
	

	
ASML Stepper- Shutdown: User "wslee" reports that software locked up while edditing 
	
a job. Also ASML needs to troubleshoot the wafer handling repeatability issue and calibrate 
	
3D align system. Applications software reset to clear the lockup. Purge hood causing 
	
contamination problem and physical damage to critical optical components on wafer table. 
	
The purge hood was removed to prevent further damage 
	
SVG Coat2 - Problem: User "faridz" reports that the spin coater is not sensing wafer. The 
	
spindle was not reaching top position. Troubleshot and replaced the spindle Up/Down air cylinder. 
	

	

	
Photolithography Area Status 	
	
Monday, September 17, 2012 
	
General Information / Lab Activities 	
	
	

	
Hummer Sputter Coater : Installation is in progress in room L-106(Paul Jerabek Room). Need 
	
to hook up vacuum line, Nitrogen and Electrical. 
	
Mahnaz - Out sick (9/17) 
	
	
	
	
	

	
	
	
	
	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
PROBLEM 	
No thick resist 	
1 
	
EVAlign 	
PROBLEM 	
Intermittent joystick issue 	
4 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
PROBLEM 	
Tool idle til needed 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
UP 	
	

	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
UP 	
	

	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Up 	
	

	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
PROBLEM 	
Intermittent vacuum problem 	
2 
	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscpoes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
PROBLEM 	
Clamps are stiff 	
3 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Robot teaching 	

	
Litho SRD 	
UP 	
	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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