[litho] Morning Litho Status 4/8

Gary J Sosa gsosa at stanford.edu
Mon Apr 8 08:15:27 PDT 2013


Good morning All.. 
New Issues 
-Karl Suss1- Z axis initialization problem 
	
General Information/Lab Activities 	
Monday, April 08, 2013 
	
ASML Stepper: Monthly PM rescheduled for Wednesday(4/10) and Thursday(4/11) 




	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
	

	
Karlsuss2 	
PROBLEM 	
1 	
BSA Issue 	

	
EVImprint 	
DOWN 	
2 	
Does not work as standard aligner. Suspect software or configuration 	
Will contact vendor for assistance 
	
Laurell-R 	
UP 	
	
Bowl and bench exhaust adjusted 	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
3 	
Program execution 	
Continuous testing and investigating 
	
KSCoat 	
PROBLEM 	
4 	
1.Chillplate temp control 
2. Wafer Handling 	
1. Replaced water pump. Testing in progress. 
2. Testing various paths and wafer sizes. 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	
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