[litho] Morning Litho Status 4/22/13
Gary J Sosa
gsosa at stanford.edu
Mon Apr 22 07:46:05 PDT 2013
Good morning All..
White Oven: Cannot change temperature
General Information/Lab Activities
Monday, April 22, 2013
Intermittent BSA focus issue
Making arrangements for annual PM . PO submitted on 4/17
Does not work as standard aligner. Suspect software or configuration
Further investigation shows that system does not work in imprint mode either. Working with EVG to set up a remote session on the tool to determine and correct the tool configuration
Bond-Align not working
PO for service approved on 4/10. Working with EVG on comprehensive plan to check out/repair his tool on the imprint tool.
Cannot change temperature
Continuous testing and investigating
1.Chillplate temp control
2. Wafer Handling
1. Replaced water pump. Testing in progress.
2. Testing various paths and wafer sizes.
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