[litho] Morning Litho Status 4/22/13

Gary J Sosa gsosa at stanford.edu
Mon Apr 22 07:46:05 PDT 2013


Good morning All.. 
New Issues 
White Oven: Cannot change temperature 
	
General Information/Lab Activities 	
Monday, April 22, 2013 
	





	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
	

	
Karlsuss2 	
PROBLEM 	
3 	
Intermittent BSA focus issue 	
Making arrangements for annual PM . PO submitted on 4/17 
	
EVImprint 	
DOWN 	
1 	
Does not work as standard aligner. Suspect software or configuration 	
Further investigation shows that system does not work in imprint mode either. Working with EVG to set up a remote session on the tool to determine and correct the tool configuration 
	
EVAlign 	
PROBLEM 	
2 	
Bond-Align not working 	
PO for service approved on 4/10. Working with EVG on comprehensive plan to check out/repair his tool on the imprint tool. 
	
White-Oven 	
PROBLEM 	
4 	
Cannot change temperature 	

	
	
	
	
	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
5 	
Program execution 	
Continuous testing and investigating 
	
KSCoat 	
PROBLEM 	
	
1.Chillplate temp control 
2. Wafer Handling 	
1. Replaced water pump. Testing in progress. 
2. Testing various paths and wafer sizes. 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	
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