[litho] Morning Litho Status 4/25

Gary J Sosa gsosa at stanford.edu
Thu Apr 25 08:17:45 PDT 2013


Good morning All.. 
New Issues 
SVG Dev1- 2 users report wafers coming out wet 
	
General Information/Lab Activities 	
Thursday, April 25, 2013 
	





	
Tool 	
Status 	
Priority 	
Problem/Comment 	
Action Plan/Update 
	
ASML Stepper 	
UP 	
	
	

	
Karlsuss2 	
PROBLEM 	
5 	
Intermittent BSA focus issue 	
Making arrangements for annual PM . PO Approved. Scheduling of PM’s for both aligners in progress 
	
EVImprint 	
DOWN 	
2 	
Does not work as standard aligner. Suspect software or configuration 	
Further investigation shows that system does not work in imprint mode either. EVG opened an internet session and attempted to update the machine tool configuration list. Info being passed on to HQ for further support 
	
EVAlign 	
PROBLEM 	
3 	
Bond-Align not working 	
PO for service approved on 4/10. Working with EVG on comprehensive plan to check out/repair his tool on the imprint tool. 
	
White-Oven 	
PROBLEM 	
4 	
Cannot change temperature 	
Arranging with supplier for new temperature controller 
	
SVGDev 	
PROBLEM 	
1 	
Wet wafers 	

	
Miscellaneous 	
	
	
	

	
EVBonder 	
PROBLEM 	
	
Program execution 	
Continuous testing and investigating 
	
KSCoat 	
PROBLEM 	
	
1.Chillplate temp control 
2. Wafer Handling 	
1. Replaced water pump. Testing in progress. 
2. Testing various paths and wafer sizes. 
	
	
	
	
	

	
	
	
	
	

	
	
	
	
	
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