From gsosa at stanford.edu Mon Jan 28 07:53:40 2013 From: gsosa at stanford.edu (Gary J Sosa) Date: Mon, 28 Jan 2013 07:53:40 -0800 (PST) Subject: [litho] Morning Litho status 1/28 In-Reply-To: Message-ID: <3b2ac0e7-416b-4678-9f8c-a1fccd686ad2@Gary-PC> Good morning All... Here is the morning Litho status report. Please check back in Badger for the latest tool updates and current equipment status. Thanks.. The Litho Team Photolithography Quick Snapshot Monday, January 28, 2013 New Issues SVG Coat2- Problem: User "jimkruger" reports wafers getting stuck at bake station EVG Bonder- Shutdown: User "ashwin" reports a problem with process program sequencing. Mahnaz to run a test bond today(1/28) Old Issues- Ongoing Karl Suss Align 2 - Problem: User "audet" reports a BSA focus problem. Need to investigate EVG Spraycoater- Shutdown: System will not power up. Identified a bad 24 volt DC power supply in the mainswitch unit, used in the EMO/interlock circuit. Replacement power supply installed on Friday(1/25). System power up successful. Submitted request to EVG for new keycode(1/25) KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Re-taught Left and Right load stations for 3", 6" and 8" wafers. Need to test system operation EVAlign- Problem: Intermittent joystick issue. New joystick received on 12/14. Installed new joystick. Still a drift in "X" direction. FSE advises to adjust Null voltage for joystick. Should be 2.5vdc +/- .1. Voltage is currently at 4.5vdc. EVG-Imprint - Shutdown: Top optics are not initializing. Possible bad "Y axis" servo controller. Need to isolate problem to "Y servo" controller. EVG F/S has the servo motor controller for testing. Litho SRD- Its been 6 weeks with no wafer breakage. Continuing to monitor closely Resolved Issues SVG Coat2 - User "cechang" reports a 955-7 resist- poor spin problem. Checked and adjusted nitrogen and CDA supply to the track. Adjusted wafer centering. Tested with standard process Photolithography Area Status Monday, January 28, 2013 General Information / Lab Activities Exposure Tools Status Comments Priority ASML Stepper UP EVAlign PROBLEM Intermittant joystick problem 5 EVAlign2 UP EVG-Imprint DOWN Optics not initializing Karl Suss 1 UP Karl Suss 2 PROBLEM BSA focus 4 Manual Coaters Status EVGSpraycoat DOWN Need Key-code 2 Headway UP Laurel UP Coaters Process Status SVGCoat 3612 Process Up 220-3 Process Up 220-7 Process Up SVGCoat2 3612 Process Problem wafers stuck at bake station 3 3617 Process Up 955-0.7 Process Up Developers Status SVGDEV UP SVGDEV2 UP Ovens / Hotplates Status BLUEM UP Blue M 90 C. UP Blue M 110 C UP Blue M 150 C UP Fusion UP UV-Cure UP White-Oven UP YES Vapor Prime UP Hotplates- Laurel-left UP Laurel- right UP Wenesco- Left UP 90 Deg C UP 115 Deg C UP Wenesco- Right UP Metrology/Inspection Status AFM UP Alpha-Step 500 UP Flexus Stresstest UP Nanospec 1-Etch UP Nanospec 2-Litho UP Prometrix UP P2 Profiler UP Rudolph Ellipsometer UP Surfscan 4500 UP Woolam UP Zygo UP Microscopes- #1 Leica/ UP #2 Ergolux/Drytek2 UP #3 Olympus/Litho UP #4 Nikon Optiphot/Litho UP #5 Nikon/Litho UP #6 Leitz/Bosch UP #7 Leitz/Diffusion UP #8 Olympus/Litho UP #9Olympus/Litho UP Miscellaneous Status EVBond DOWN Program problem 1 KSBonder UP KSCoat PROBLEM Needs testing Litho SRD PROBLEM Wafer broke inside, Under observation Mask Cleaner UP -------------- next part -------------- An HTML attachment was scrubbed... URL: