[litho] Morning Litho status 1/28

Gary J Sosa gsosa at stanford.edu
Mon Jan 28 07:53:40 PST 2013


Good morning All... 

Here is the morning Litho status report. 

Please check back in Badger for the latest tool updates and current equipment status. 

Thanks.. The Litho Team 


	
Photolithography Quick Snapshot 	
	
Monday, January 28, 2013 
	
New Issues 
	
SVG Coat2- Problem: User "jimkruger" reports wafers getting stuck at bake station 
	

	
EVG Bonder- Shutdown: User "ashwin" reports a problem with process program sequencing. 
	
Mahnaz to run a test bond today(1/28) 
	

	

	

	

	

	
Old Issues- Ongoing 
	
Karl Suss Align 2 - Problem: User "audet" reports a BSA focus problem. Need to investigate 
	

	
EVG Spraycoater- Shutdown: System will not power up. Identified a bad 24 volt DC power supply 
	
in the mainswitch unit, used in the EMO/interlock circuit. Replacement power supply installed on 
	
Friday(1/25). System power up successful. Submitted request to EVG for new keycode(1/25) 
	

	
KSCoat -Problem: Robot wafer pickup at load station. OK to process 4" wafers. Re-taught 
	
Left and Right load stations for 3", 6" and 8" wafers. Need to test system operation 
	

	
EVAlign- Problem: Intermittent joystick issue. New joystick received on 12/14. Installed 
	
new joystick. Still a drift in "X" direction. FSE advises to adjust Null voltage for joystick. Should 
	
be 2.5vdc +/- .1. Voltage is currently at 4.5vdc. 
	

	
EVG-Imprint - Shutdown: Top optics are not initializing. Possible bad "Y axis" servo controller. Need 
	
to isolate problem to "Y servo" controller. EVG F/S has the servo motor controller for testing. 
	

	
Litho SRD- Its been 6 weeks with no wafer breakage. Continuing to monitor closely 
	
	
	
	
	

	

	
Resolved Issues 	
	
	

	
SVG Coat2 - User "cechang" reports a 955-7 resist- poor spin problem. Checked and adjusted 
	
nitrogen and CDA supply to the track. Adjusted wafer centering. Tested with standard process 
	

	

	

	

	

	

	

	
Photolithography Area Status 	
	
Monday, January 28, 2013 
	
General Information / Lab Activities 	
	
	

	

	

	

	

	

	
Exposure Tools 	
Status 	
Comments 	
Priority 
	
ASML Stepper 	
UP 	
	

	
EVAlign 	
PROBLEM 	
Intermittant joystick problem 	
5 
	
EVAlign2 	
UP 	
	

	
EVG-Imprint 	
DOWN 	
Optics not initializing 	

	
Karl Suss 1 	
UP 	
	

	
Karl Suss 2 	
PROBLEM 	
BSA focus 	
4 
	
Manual Coaters 	
Status 	
	

	
EVGSpraycoat 	
DOWN 	
Need Key-code 	
2 
	
Headway 	
UP 	
	

	
Laurel 	
UP 	
	

	
Coaters 	
Process Status 	
	

	
SVGCoat 	
3612 Process 	
Up 	
	

	
220-3 Process 	
Up 	
	

	
220-7 Process 	
Up 	
	

	
SVGCoat2 	
3612 Process 	
Problem 	
wafers stuck at bake station 	
3 
	
3617 Process 	
Up 	
	

	
955-0.7 Process 	
Up 	
	

	
Developers 	
Status 	
	

	
SVGDEV 	
UP 	
	

	
SVGDEV2 	
UP 	
	

	
Ovens / Hotplates 	
Status 	
	

	
BLUEM 	
UP 	
	

	
Blue M 90 C. 	
UP 	
	

	
Blue M 110 C 	
UP 	
	

	
Blue M 150 C 	
UP 	
	

	
Fusion 	
UP 	
	

	
UV-Cure 	
UP 	
	

	
White-Oven 	
UP 	
	

	
YES Vapor Prime 	
UP 	
	

	
Hotplates- 	
	
	

	
Laurel-left 	
UP 	
	

	
Laurel- right 	
UP 	
	

	
Wenesco- Left 	
UP 	
	

	
90 Deg C 	
UP 	
	

	
115 Deg C 	
UP 	
	

	
Wenesco- Right 	
UP 	
	

	
Metrology/Inspection 	
Status 	
	

	
AFM 	
UP 	
	

	
Alpha-Step 500 	
UP 	
	

	
Flexus Stresstest 	
UP 	
	

	
Nanospec 1-Etch 	
UP 	
	

	
Nanospec 2-Litho 	
UP 	
	

	
Prometrix 	
UP 	
	

	
P2 Profiler 	
UP 	
	

	
Rudolph Ellipsometer 	
UP 	
	

	
Surfscan 4500 	
UP 	
	

	
Woolam 	
UP 	
	

	
Zygo 	
UP 	
	

	
Microscopes- 	
	
	

	
#1 Leica/ 	
UP 	
	

	
#2 Ergolux/Drytek2 	
UP 	
	

	
#3 Olympus/Litho 	
UP 	
	

	
#4 Nikon Optiphot/Litho 	
UP 	
	

	
#5 Nikon/Litho 	
UP 	
	

	
#6 Leitz/Bosch 	
UP 	
	

	
#7 Leitz/Diffusion 	
UP 	
	

	
#8 Olympus/Litho 	
UP 	
	

	
#9Olympus/Litho 	
UP 	
	

	
Miscellaneous 	
Status 	
	

	
EVBond 	
DOWN 	
Program problem 	
1 
	
KSBonder 	
UP 	
	

	
KSCoat 	
PROBLEM 	
Needs testing 	

	
Litho SRD 	
PROBLEM 	
Wafer broke inside, Under observation 	

	
Mask Cleaner 	
UP 	
	

	
	
	
	

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