Shutdown matrix 2000-11-14 02:46:00: system hanged..wafer stuck inside.

latta at latta at
Fri Dec 15 05:00:42 PST 2000

Off shutdown temporarily- waiting for parts.  However, a new 
program may be used.  Only this program may be used.
Use at your own risk- we have not characterized the new
Hi Pr/Pw program.  Please report all problems/comments.

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