From venkat at snf.stanford.edu  Tue Nov 14 02:45:20 2000
From: venkat at snf.stanford.edu (venkat at snf.stanford.edu)
Date: Nov 14, 2000 2:45:20 AM
Subject: Problem matrix: system hanged..cannot be reset or turned off
Message-ID: <mailman.37.1357938494.25810.matrix-pcs@snf.stanford.edu>




From venkat at snf.stanford.edu  Tue Nov 14 02:46:02 2000
From: venkat at snf.stanford.edu (venkat at snf.stanford.edu)
Date: Nov 14, 2000 2:46:02 AM
Subject: Shutdown matrix: system hanged..wafer stuck inside.
Message-ID: <mailman.38.1357938494.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue Nov 14 07:53:03 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 14, 2000 7:53:03 AM
Subject: Problem Clear matrix: User loaded wafer with Resist on backside!
Message-ID: <mailman.39.1357938494.25810.matrix-pcs@snf.stanford.edu>