From sanli at snf.stanford.edu  Tue Apr  3 02:56:14 2001
From: sanli at snf.stanford.edu (sanli at snf.stanford.edu)
Date: Apr 3, 2001 2:56:14 PM
Subject: Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside
Message-ID: <mailman.56.1357938494.25810.matrix-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed Apr  4 10:52:50 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 4, 2001 10:52:50 AM
Subject: Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside
Message-ID: <mailman.57.1357938494.25810.matrix-pcs@snf.stanford.edu>

removed by Cesar last night.



From kidonge at snf.stanford.edu  Thu Apr 12 11:20:26 2001
From: kidonge at snf.stanford.edu (kidonge at snf.stanford.edu)
Date: Apr 12, 2001 11:20:26 AM
Subject: Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem
Message-ID: <mailman.58.1357938494.25810.matrix-pcs@snf.stanford.edu>

Load wand does not sense wafers and it might be an indexing problem.



From cbaxter at snf.stanford.edu  Thu Apr 12 05:26:49 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 12, 2001 5:26:49 PM
Subject: Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem
Message-ID: <mailman.59.1357938494.25810.matrix-pcs@snf.stanford.edu>

chanaged faulty clifford solenoid..



From latta at snf.stanford.edu  Thu Apr 26 04:20:54 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Apr 26, 2001 4:20:54 PM
Subject: Problem matrix 2001-04-26 16:20:52: Chamber pressuer high in Standby Mode
Message-ID: <mailman.60.1357938494.25810.matrix-pcs@snf.stanford.edu>

Rises steadily to 1400mt.....