Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside
booth at snf.stanford.edu
booth at snf.stanford.edu
Wed Apr 4 10:52:50 PDT 2001
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Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside
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Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem
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removed by Cesar last night.
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Shutdown matrix 2001-04-03 14:56:13: my wafer is stuck inside
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Problem matrix 2001-04-12 11:20:23: Not sensing wafers indexing problem
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