From rcrane at snf.stanford.edu Wed Feb 21 12:18:56 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Feb 21, 2001 12:18:56 PM Subject: Shutdown matrix 2001-02-21 12:18:53: power change over Message-ID: unit will be down thru Thursday afternoon for electrical power change over From lindaw at snf.stanford.edu Fri Feb 23 10:04:15 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 23, 2001 10:04:15 AM Subject: Comment matrix 2001-02-23 10:04:14: It is now friday morning. An y idea when it will be up??? Message-ID: can someone please give an update to the status of the matrix? From latta at snf.stanford.edu Fri Feb 23 11:18:04 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 23, 2001 11:18:04 AM Subject: Shutdown matrix 2001-02-21 12:18:53: power change over Message-ID: Change over complete. Glass shatter box not in operation and appropriate sign is in place. Test run of process program run- ok. From lindaw at snf.stanford.edu Fri Feb 23 02:01:37 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 23, 2001 2:01:37 PM Subject: Comment matrix 2001-02-23 14:01:36: ran wafers through 4X, still have resist Message-ID: normally after my heavy dose implant the resist strips almost clean in 2 passes. I have run my wafers through the standard program 4X, and there appears to be no visual difference than from before startig the strip. Is the O2 on? MFC is reading flow, and chamber has pressure, and power settings seem fine. Do my wafers just have bad karma??? Linda W. From lindaw at snf.stanford.edu Tue Feb 27 08:14:24 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 27, 2001 8:14:24 AM Subject: Comment matrix 2001-02-27 08:14:24: strips standard 3612 just fine in one pass Message-ID: