From evelyn at snf.stanford.edu  Mon Mar  5 11:51:27 2001
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 5, 2001 11:51:27 PM
Subject: Problem matrix 2001-03-05 23:51:24: resist not removed
Message-ID: <mailman.48.1357938494.25810.matrix-pcs@snf.stanford.edu>

Myself and someone else had problems with Matrix asher...our resist didn't come competely off.....thank you



From cbaxter at snf.stanford.edu  Tue Mar  6 04:19:35 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 6, 2001 4:19:35 PM
Subject: Problem matrix 2001-03-05 23:51:24: resist not removed
Message-ID: <mailman.49.1357938494.25810.matrix-pcs@snf.stanford.edu>

ran two resist dummy and it stripping ok. might need to check
recipe?



From sanli at snf.stanford.edu  Thu Mar 15 04:08:27 2001
From: sanli at snf.stanford.edu (sanli at snf.stanford.edu)
Date: Mar 15, 2001 4:08:27 PM
Subject: Shutdown matrix 2001-03-15 16:08:26: wafer transport problem
Message-ID: <mailman.50.1357938494.25810.matrix-pcs@snf.stanford.edu>

It couldn't transport my wafer into thr chamber. Nancy turned off and on, it is still in the wafer transport initializing step.



From cbaxter at snf.stanford.edu  Thu Mar 15 05:54:10 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 15, 2001 5:54:10 PM
Subject: Shutdown matrix 2001-03-15 16:08:26: wafer transport problem
Message-ID: <mailman.51.1357938494.25810.matrix-pcs@snf.stanford.edu>

transport arm was jammed. turn off power and move 
arm back to position. system  intialize fine. cycle dummy
wafer  no problem encountered.



From sanli at snf.stanford.edu  Fri Mar 16 08:18:25 2001
From: sanli at snf.stanford.edu (sanli at snf.stanford.edu)
Date: Mar 16, 2001 8:18:25 AM
Subject: Shutdown matrix 2001-03-16 08:18:25: wafer transport problem
Message-ID: <mailman.52.1357938494.25810.matrix-pcs@snf.stanford.edu>

My wafer is stuck somewhere in there. It couldn't transport it properly.



From vilanova at snf.stanford.edu  Fri Mar 16 09:24:55 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 16, 2001 9:24:55 AM
Subject: Shutdown matrix 2001-03-16 08:18:25: wafer transport problem
Message-ID: <mailman.53.1357938494.25810.matrix-pcs@snf.stanford.edu>

Machine Failure due to Nitrogen failure, I Power it off and back on , Ok to use 



From cbaxter at snf.stanford.edu  Mon Mar 26 05:53:12 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 26, 2001 5:53:12 PM
Subject: Shutdown matrix 2001-03-26 17:53:10: need to cleaned foreline tc not reading  right pressure
Message-ID: <mailman.54.1357938494.25810.matrix-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Mon Mar 26 05:57:33 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 26, 2001 5:57:33 PM
Subject: Shutdown matrix 2001-03-26 17:53:10: need to cleaned foreline tc not reading  right pressure
Message-ID: <mailman.55.1357938494.25810.matrix-pcs@snf.stanford.edu>

soory wrong tool..system is ok....