Shutdown matrix 2001-03-15 16:08:26: wafer transport problem

sanli at snf.stanford.edu sanli at snf.stanford.edu
Thu Mar 15 04:08:27 PST 2001


It couldn't transport my wafer into thr chamber. Nancy turned off and on, it is still in the wafer transport initializing step.




More information about the matrix-pcs mailing list