From crobin at snf.stanford.edu Wed Nov 28 02:11:41 2001 From: crobin at snf.stanford.edu (crobin at snf.stanford.edu) Date: Nov 28, 2001 2:11:41 PM Subject: Problem matrix 2001-11-28 14:11:41: matrix dropped wafer Message-ID: From crobin at snf.stanford.edu Wed Nov 28 02:12:08 2001 From: crobin at snf.stanford.edu (crobin at snf.stanford.edu) Date: Nov 28, 2001 2:12:08 PM Subject: Shutdown matrix 2001-11-28 14:12:08: dropped wafer Message-ID: From cbaxter at snf.stanford.edu Wed Nov 28 06:12:13 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 28, 2001 6:12:13 PM Subject: Shutdown matrix 2001-11-28 14:12:08: dropped wafer Message-ID: removed wafer From cbaxter at snf.stanford.edu Wed Nov 28 06:12:19 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 28, 2001 6:12:19 PM Subject: Problem matrix 2001-11-28 14:11:41: matrix dropped wafer Message-ID: From brads at snf.stanford.edu Fri Nov 30 12:29:04 2001 From: brads at snf.stanford.edu (brads at snf.stanford.edu) Date: Nov 30, 2001 12:29:04 PM Subject: Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in. Message-ID: the first wafer is stuck on the arm. From booth at snf.stanford.edu Fri Nov 30 02:06:19 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 30, 2001 2:06:19 PM Subject: Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in. Message-ID: removed brads wafers & put in his storage box. restarted machine & loaded & unloaded test wafer OK. Everything seems to work fine now.