Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in.
brads at snf.stanford.edu
brads at snf.stanford.edu
Fri Nov 30 12:29:04 PST 2001
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Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in.
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the first wafer is stuck on the arm.
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Shutdown matrix 2001-11-28 14:12:08: dropped wafer
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Shutdown matrix 2001-11-30 12:29:04: 1st wafer stuck going in.
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