From crobin at snf.stanford.edu  Mon Oct 22 11:22:00 2001
From: crobin at snf.stanford.edu (crobin at snf.stanford.edu)
Date: Oct 22, 2001 11:22:00 AM
Subject: Problem matrix 2001-10-22 11:21:58: system  says "dropped wader:`"
Message-ID: <mailman.74.1357938494.25810.matrix-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Oct 22 11:28:05 2001
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Oct 22, 2001 11:28:05 AM
Subject: Problem matrix 2001-10-22 11:21:58: Fixed
Message-ID: <mailman.75.1357938494.25810.matrix-pcs@snf.stanford.edu>




From daesung at snf.stanford.edu  Fri Oct 26 08:35:41 2001
From: daesung at snf.stanford.edu (daesung at snf.stanford.edu)
Date: Oct 26, 2001 8:35:41 PM
Subject: Problem matrix 2001-10-26 20:35:40: wafer transport problem
Message-ID: <mailman.76.1357938495.25810.matrix-pcs@snf.stanford.edu>

There was a wafer transport problem. Now it's in initializing state.



From cbaxter at snf.stanford.edu  Fri Oct 26 09:23:23 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 26, 2001 9:23:23 PM
Subject: Problem matrix 2001-10-26 20:35:40: wafer transport problem
Message-ID: <mailman.77.1357938495.25810.matrix-pcs@snf.stanford.edu>

clear error and intialize tool by doing a reset