Problem matrix 2001-10-26 20:35:40: wafer transport problem
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Oct 26 09:23:23 PDT 2001
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Problem matrix 2001-10-26 20:35:40: wafer transport problem
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clear error and intialize tool by doing a reset
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Problem matrix 2001-10-26 20:35:40: wafer transport problem
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